• Title/Summary/Keyword: Gas sensors

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Pt-AlGaN/GaN HEMT-based hydrogen gas sensors with and without SiNx post-passivation

  • Vuong, Tuan Anh;Kim, Hyungtak
    • Journal of IKEEE
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    • v.23 no.3
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    • pp.1033-1037
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    • 2019
  • GaN-based sensors have been widely investigated thanks to its potential in detecting the presence of hydrogen. In this study, we fabricated hydrogen gas sensors with AlGaN/GaN heterojunction and investigated how the sensing performance to be affected by SiN surface passivation. The gas sensor employed a high electron mobility transistors (HEMTs) with 30 nm platinum catalyst as a gate to detect the hydrogen presence. SiN layer was deposited by inductively-coupled chemical vapor deposition as post-passivation. The sensors with SiN passivation exhibited hydrogen sensing characteristics with various gas flow rates and concentrations of hydrogen in inert background gas at $200^{\circ}C$ similar to the ones without passivation. Aside from quick response time for both sensors, there are differences in sensitivity and recovery time because of the existence of the passivation layer. The results also confirmed the dependence of sensing performance on gas flow rate and gas concentration.

Self-activated Graphene Gas Sensors: A Mini Review

  • Kim, Taehoon;Eom, Tae Hoon;Jang, Ho Won
    • Journal of Sensor Science and Technology
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    • v.29 no.4
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    • pp.220-226
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    • 2020
  • Graphene has been widely considered a promising candidate for high-quality chemical sensors, owing to its outstanding characteristics, such as sensitive gas adsorption at room temperature, high conductivity, high flexibility, and high transparency. However, the main drawback of a graphene-based gas sensor is the necessity for external heaters due to its slow response, incomplete recovery, and low selectivity at room temperature. Conventional heating devices have limitations such as large volume, thermal safety issues, and high power consumption. Moreover, metal-based heating systems cannot be applied to transparent and flexible devices. Thus, to solve this problem, a method of supplying the thermal energy necessary for gas sensing via the self-heating of graphene by utilizing its high carrier mobility has been studied. Herein, we provide a brief review of recent studies on self-activated graphene-based gas sensors. This review also describes various strategies for the self-activation of graphene sensors and the enhancement of their sensing properties.

Review on Sensor Technology to Detect Toxic Gases (독성가스 감지용 센서 기술 동향 리뷰)

  • Lee, Janghyeon;Lim, Si-Hyung
    • Journal of Sensor Science and Technology
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    • v.24 no.5
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    • pp.311-318
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    • 2015
  • The excess use and generation of various toxic gases from many industrial complexes and plant facilities have increased the possibility of leakage or explosion accidents, which can cause fatal damage to human beings in the wide range of neighboring area. To prevent the exposure to the fatal toxic gases, it is very important to monitor the leakage of toxic gases using gas sensors in real time. Various types of gas sensors, which can be classified as semiconductor, electrochemical, optical, and catalytic combustion types according to the operating principles, have been developed. In this review, the operation principles of gas sensors are explained and the performance of those sensors is compared. The state-of-the-art gas sensor technologies developed by research institutes or companies are reviewed also.

Recent Trends of Light-enhanced Metal Oxide Gas Sensors: Review

  • Cho, Minkyu;Park, Inkyu
    • Journal of Sensor Science and Technology
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    • v.25 no.2
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    • pp.103-109
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    • 2016
  • Recent light-enhanced metal oxide gas sensors are reviewed in this article. The basic mechanisms of a light-enhanced metal oxide gas sensor are discussed. Many literatures reveal that the standalone sensitivity and the response/recovery time enhancements enabled by the exposing light are not as high as the performance enhancement provided by external heating. Therefore, both optimal amount of external heating and exposed light intensity are necessary to increase the performance of these light-enhanced gas sensors. The development of highly light sensitive materials and structures is important to lower the overall power consumptions of the sensors.

A Study on the Measurement of Halitosis of Human Mouth with Chemical Gas Sensor Arrays (화학 가스센서를 활용한 구취측정 방법에 관한 연구)

  • Lee, Seok-Jun;Kim, Sun-Tae;Kim, Han-Soo
    • Journal of Sensor Science and Technology
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    • v.20 no.4
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    • pp.279-285
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    • 2011
  • This study was carried out to apply chemical gas sensors for the identification of bad breath which is one of the important sensitive problem for the humans' daily life. Seven sensors, including five semiconductor sensors and two electrochemical sensors, were tested for the three panels three times in several conditions. The results showed that the reproducibility of sensors were generally good, and electrochemical sensors showed better reproducibility while semiconductor sensors showed better sensitivity. No rinsing before measurement showed relatively better results in terms of both sensitivity and reproducibility. Semiconductor gas sensors for hydrogen sulfide shows the highest sensitivity, and it was recommended to use the odor-free bag for the measurement of bad breath.

Light-activated mechanism for metal oxide gas sensors (금속 산화물 가스 센서의 광 활성화 센싱 메커니즘)

  • Oum, Wansik;Shin, Ka Yoon;Yu, Dong Jae;Kang, Sukwoo;Kim, Eun Bi;Kim, Hyoun Woo
    • Journal of Sensor Science and Technology
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    • v.30 no.6
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    • pp.381-383
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    • 2021
  • Light-activated metal oxide gas sensors have been investigated in recent decades. Light illumination enhances the sensing attributes, including the operational temperature, sensitivity, and selectivity. Unfortunately, high operating temperature is a major problem for gas sensors because of the huge energy consumption. Therefore, the importance of light-activated room-temperature sensing has increased. This paper reviews recent light-activated sensors and their sensing mechanisms with a specific focus on metal oxide gas sensors. Studies use the outstanding ZnO and SnO2 sensors to research photoactivation when illuminated by various sources such as ultraviolet (UV), halogen lamp, or monochromatic light. Photon induction generates electron-hole pairs that increase the number of adsorption sites of gas molecules and ions improving the sensor's sensing properties.

Detection Characteristics for the Ultra Lean NOx Gas Concentration Using the MWCNT Gas Sensor Structured with MOS-FET (MOS-FET 구조의 MWCNT 가스센서를 이용한 초희박 NOx 가스 검출 특성)

  • Kim, Hyun-Soo;Lee, Seung-Hun;Jang, Kyung-Uk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.9
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    • pp.707-711
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    • 2013
  • Carbon nanotubes(CNT) has strength and chemical stability, greatly conductivity characteristics. In particular, MWCNT (multi-walled carbon nanotubes) show rapidly resistance sensitive for changes in the ambient gas, and therefore they are ideal materials to gas sensor. So, we fabricated NOx gas sensors structured MOS-FET using MWCNT (multi-walled carbon nanotubes) material. We investigate the change resistance of NOx gas sensors based on MOS-FET with ultra lean NOx gas concentrations absorption. And NOx gas sensors show sensitivity on the change of gate-source voltage ($V_{gs}=0[V]$ or $V_{gs}=3.5[V]$). The gas sensors show the increase of sensitivity with increasing the temperature (largest value at $40^{\circ}C$). On the other hand, the sensitivity of sensors decreased with increasing of NOx gas concentration. In addition, We obtained the adsorption energy($U_a$), $U_a$ = 0.06714[eV] at the NOx gas concentration of 8[ppm], $U_a$ = 0.06769[eV] at 16[ppm], $U_a$ = 0.06847[eV] at 24[ppm] and $U_a$ = 0.06842[eV] at 32[ppm], of NOx gas molecules concentration on the MWCNT gas sensors surface with using the Arrhenius plots. As a result, the saturation phenomena is occurred by NOx gas injection of concentration for 32[ppm].

Review of Metal Oxide-based Formaldehyde Gas Sensor to Measure Indoor Air Quality (실내 대기질 진단을 위한 금속산화물 기반 폼알데하이드 가스센서 연구 동향)

  • Kim, Yoon Hwa;Koo, Won-Tae;Jang, Ji-Soo;Kim, Il-Doo
    • Journal of Sensor Science and Technology
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    • v.28 no.6
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    • pp.377-384
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    • 2019
  • People currently spend more than 80% of their time indoors; therefore, the management of indoor air quality has become an important issue. The contamination of indoor air can cause sick house syndrome and various environmental diseases such as atopy and nephropathy. Formaldehyde gas, which is the main contaminant of indoor air, is lethal even with microscopic exposure; however, it is commonly used as an adhesive and waterproofing agent for indoor building materials. Therefore, there is a need for a gas sensor capable of detecting trace amounts of formaldehyde gas. In this review, we summarize recent studies on metal oxide-based semiconductor gas sensors for formaldehyde gas detection, methods to improve the gas-sensing properties of metal oxides of various dimensions, and the effects of catalysts for the detection of parts-per-billion level gases. Through this, we discuss the necessary characteristics of the metal oxidebased semiconductors for gas sensors for the development of next-generation sensors.

Humidity Dependence Removal Technology in Oxide Semiconductor Gas Sensors (산화물 반도체 가스 센서의 습도 의존성 제거 기술)

  • Jiho Park;Ji-Wook Yoon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.4
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    • pp.347-357
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    • 2024
  • Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.