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A Study on Switching Characteristics of 1,200V Trench Gate Field stop IGBT Process Variables (1,200V 급 Trench Gate Field stop IGBT 공정변수에 따른 스위칭 특성 연구)

  • Jo, Chang Hyeon;Kim, Dea Hee;Ahn, Byoung Sup;Kang, Ey Goo
    • Journal of IKEEE
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    • v.25 no.2
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    • pp.350-355
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    • 2021
  • IGBT is a power semiconductor device that contains both MOSFET and BJT structures, and it has fast switching speed of MOSFET, high breakdown voltage and high current of BJT characteristics. IGBT is a device that targets the requirements of an ideal power semiconductor device with high breakdown voltage, low VCE-SAT, fast switching speed and high reliability. In this paper, we analyzed Gate oxide thickness, Trench Gate Width, and P+Emitter width, which are the top process parameters of 1,200V Trench Gate Field Stop IGBT, and suggested the optimized top process parameters. Using the Synopsys T-CAD Simulator, we designed IGBT devices with electrical characteristics that has breakdown voltage of 1,470 V, VCE-SAT 2.17 V, Eon 0.361 mJ and Eoff 1.152 mJ.

Analysis on Subthreshold Swing of Asymmetric Junctionless Double Gate MOSFET for Parameters for Gaussian Function (가우스 함수의 파라미터에 따른 비대칭형 무접합 이중 게이트 MOSFET의 문턱전압 이하 스윙 분석)

  • Jung, Hakkee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.35 no.3
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    • pp.255-263
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    • 2022
  • The subthreshold swing (SS) of an asymmetric junctionless double gate (AJLDG) MOSFET is analyzed by the use of Gaussian function. In the asymmetric structure, the thickness of the top/bottom oxide film and the flat-band voltages of top gate (Vfbf) and bottom gate (Vfbb) could be made differently, so the change in the SS for these factors is analyzed with the projected range and standard projected deviation which are parameters for the Gaussian function. An analytical subthreshold swing model is presented from the Poisson's equation, and it is shown that this model is in a good agreement with the numerical model. As a result, the SS changes linearly according to the geometric mean of the top and bottom oxide film thicknesses, and if the projected range is less than half of the silicon thickness, the SS decreases as the top gate oxide film is smaller. Conversely, if the projected range is bigger than a half of the silicon thickness, the SS decreases as the bottom gate oxide film is smaller. In addition, the SS decreases as Vfbb-Vfbf increases when the projected range is near the top gate, and the SS decreases as Vfbb-Vfbf decreases when the projected range is near the bottom gate. It is necessary that one should pay attention to the selection of the top/bottom oxide thickness and the gate metal in order to reduce the SS when designing an AJLDG MOSFET.

Effect of Channel and Gate Structures on Electrical Characteristics of Oxide Thin-Film Transistors (Channel과 gate 구조에 따른 산화물 박막트랜지스터의 전기적 특성 연구)

  • Kong, Heesung;Cho, Kyoungah;Kim, Jaybum;Lim, Junhyung;Kim, Sangsig
    • Journal of IKEEE
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    • v.26 no.3
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    • pp.500-505
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    • 2022
  • In this study, we designed oxide thin-film transistors (TFTs) with dual gate and tri layered split channels, and investigated the structural effect of the TFTs on the electrical characteristics. The dual gates played a key role in increasing the driving current, and the channel structure of tri layers and split form contributed to the increase in the carrier mobility. The tri layered channels consisting of the a-ITGZO and two ITO layers inserted between the gate dielectric and a-ITGZO led to the increase in the on-current by using ITO layers with high conductivity, and the split channels lowered series resistance of the channels. Compared with the mobility (15 cm2/V·s) of the single gate a-ITGZO TFT, the mobility (134 cm2/V·s) of the dual gate tri-layer split channel TFT was remarkably enhanced by the structural effect.

Analysis of issues in gate recess etching in the InAlAs/InGaAs HEMT manufacturing process

  • Byoung-Gue Min;Jong-Min Lee;Hyung Sup Yoon;Woo-Jin Chang;Jong-Yul Park;Dong Min Kang;Sung-Jae Chang;Hyun-Wook Jung
    • ETRI Journal
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    • v.45 no.1
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    • pp.171-179
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    • 2023
  • We have developed an InAlAs/InGaAs metamorphic high electron mobility transistor device fabrication process where the gate length can be tuned within the range of 0.13㎛-0.16㎛ to suit the intended application. The core processes are a two-step electron-beam lithography process using a three-layer resist and gate recess etching process using citric acid. An electron-beam lithography process was developed to fabricate a T-shaped gate electrode with a fine gate foot and a relatively large gate head. This was realized through the use of three-layered resist and two-step electron beam exposure and development. Citric acid-based gate recess etching is a wet etching, so it is very important to secure etching uniformity and process reproducibility. The device layout was designed by considering the electrochemical reaction involved in recess etching, and a reproducible gate recess etching process was developed by finding optimized etching conditions. Using the developed gate electrode process technology, we were able to successfully manufacture various monolithic microwave integrated circuits, including low noise amplifiers that can be used in the 28 GHz to 94 GHz frequency range.

Analysis of the Gate Bias Effects of the Cascode Structure for Class-E CMOS Power Amplifier (CMOS Class-E 전력증폭기의 Cascode 구조에 대한 게이트바이어스 효과 분석)

  • Seo, Donghwan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.28 no.6
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    • pp.435-443
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    • 2017
  • In this study, we analyzed the effects of the common-gate transistor bias of a switching mode CMOS power amplifier. Although the most earier works occured on the transistor sizes of the cascode structure, we showed that the gate bias of the common-gate transistor also influences the overall efficiency of the power amplifier. To investigate the effect of the gate bias, we analyzed the DC power consumption according to the gate bias and hence the efficiency of the power amplifier. From the analyzed results, the optimized gate bias for the maximum efficiency is lower than the supply voltage of the power amplifier. We also found that an excessively low gate bias may degrade the output power and efficiency owing to the effects of the on-resistance of the cascode structure. To verify the analyzed results, we designed a 1.9 GHz switching mode power amplifier using $0.18{\mu}m$ RF CMOS technology. As predicted in the analysis, the maximum efficiency is obtained at 2.5 V, while the supply voltage of power amplifier is 3.3 V. The measured maximum efficiency is 31.5 % with an output power of 29.1 dBm. From the measureed results, we successfully verified the analysis.

Breakdown voltage improvement of LDMOS using Trench Gate structure (Trench Gate 구조를 이용한 LDMOS의 항복전압 개선)

  • Kim, Hyoung-Woo;Yoo, Seung-Jin;Chung, Sang-Koo
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1938-1940
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    • 1999
  • Trench-Gate structures are proposed to improve the breakdown voltage of LDMOS as well as the second breakdown under forward biased gate. Two dimensional device simulator PISCES II has been used to explain the effects of the drift layer thickness on the breakdown voltage of the conventional LDMOS and Trench Gate LDMOS in terms of potential contour lines. The Trench Gate structure has shown improvements in the breakdown voltage by about 44% and 84% for $V_G$=0 V and $V_G$=15 V respectively.

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Simulations of Gate Driving Schemes for Large Size, High Quality TFT-LCD (대면적 고화질 TFT-LCD용 게이트 Driving에 관한 Simulation)

  • Jung, Soon-Shin;Yun, Young-Jun;Kim, Tae-Hyung;Choi, Jong-Sun
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1809-1811
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    • 1999
  • In recent years, attempts have been made to greatly improve the display quality of active-matrix liquid crystal display devices, and many techniques have been proposed to solve such problems as gate delay, feed-through voltage and image sticking. Gate delay is one of the biggest limiting factors for large-screen-size, high-resolution thin-film transistor liquid crystal display (TFT/LCD) design. Many driving method proposed for TFT/LCD progress. Thus we developed gate driving signal generator. Since Pixel-Design Array Simulation Tool (PDAST) can simulate the gate, data and pixel voltages of a certain pixel on TFT array at any time and at any location on an array, the effect of the driving signals of gate lines on the pixel operations can be effectively analyzed.

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Estimation of Hydraulic States Caused by Gate Expansion in Asan Bay (아산만 방조제 배수갑문 확장사업에 따른 주변해역 수리현상 변화 검토)

  • Park, Byong-Jun;Lee, Sang-Hwa
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.20 no.2
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    • pp.184-193
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    • 2008
  • The gate expansion was planed to increase discharge capacity of gate structure at sea dike in Asan Bay. So it was estimated for changing of hydraulic states in Pyeongteak Harbor Zone caused by gate expansion, using Delft3D, FLOW-3D and hydraulic physical scale model testing. In result, the influence of gate expansion was indicated to be weak.

A Dual Gate AlGaN/GaN High Electron Mobility Transistor with High Breakdown Voltages (높은 항복 전압 특성을 가지는 이중 게이트 AlGaN/GaN 고 전자 이동도 트랜지스터)

  • Ha Min-Woo;Lee Seung-Chul;Her Jin-Cherl;Seo Kwang-Seok;Han Min-Koo
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.1
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    • pp.18-22
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    • 2005
  • We have proposed and fabricated a dual gate AlGaN/GaN high electron mobility transistor (HEMT), which exhibits the low leakage current and the high breakdown voltage for the high voltage switching applications. The additional gate between the main gate and the drain is specially designed in order to decrease the electric field concentration at the drain-side of the main gate. The leakage current of the proposed HEMT is decreased considerably and the breakdown voltage increases without sacrificing any other electric characteristics such as the transconductance and the drain current. The experimental results show that the breakdown voltage and the leakage current of proposed HEMT are 362 V and 75 nA while those of the conventional HEMT are 196 V and 428 nA, respectively.

혼합된 PVP-PVA 유기 게이트 절연막이 유기 박막 트랜지스터의 전기적 특성에 미치는 영향에 대한 연구

  • Jo, Byeong-Geun;Kim, Gi-Jung;No, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.42-42
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    • 2009
  • To make up for the disadvantages of PVA gate, we blend PVP(20% wt) with PVA(5% wt) as a gate material. The best ratio for the mixture was 5:5, PVP-PVA blended gate used MIM structure showed better performance in leakage current and capacitance. PVP-PVA blended gate was fabricated by spin-coating process and pentacene was used as an organic TFT channel layer by thermal evaporation. Overall OTFT performance has also increased as PVP-PVA blended gate has relatively lower leakage current and higher capacitance than pure PVA gate has.

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