• 제목/요약/키워드: Fusion Filling

검색결과 31건 처리시간 0.028초

Effect of a Multi-Step Gap-Filling Process to Improve Adhesion between Low-K Films and Metal Patterns

  • Lee, Woojin;Kim, Tae Hyung;Choa, Yong-Ho
    • 한국재료학회지
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    • 제26권8호
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    • pp.427-429
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    • 2016
  • A multi-step deposition process for the gap-filling of submicrometer trenches using dimethyldimethoxysilane (DMDMOS), $(CH_3)_2Si(OCH_3)_2$, and $C_xH_yO_z$ by plasma enhanced chemical vapor deposition (PECVD) is presented. The multi-step process consisted of pre-treatment, deposition, and post-treatment in each deposition step. We obtained low-k films with superior gap-filling properties on the trench patterns without voids or delamination. The newly developed technique for the gap-filling of submicrometer features will have a great impact on inter metal dielectric (IMD) and shallow trench isolation (STI) processes for the next generation of microelectronic devices. Moreover, this bottom up gap-fill mode is expected to be universally for other chemical vapor deposition systems.

사출금형의 러너시스템 형상에 따른 충전불균형 유동해석 모델 (Flow Analysis of Filling Imbalance according to Runner Shapes in Injection Mold)

  • 장민규;고승우;김영민;노병수;정영득
    • Design & Manufacturing
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    • 제2권5호
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    • pp.16-20
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    • 2008
  • Almost all injection molds have multi-cavity runner system for mass production, which are designed with geometrically balanced runner system in order to accomplish filling balance between cavity to cavity during processing; However, even though geometrically balanced runner is used, filling imbalances have been observed. In these day, the CAE has been used widely in injection molding. However, CAE with fusion mesh can't indicate such as jetting, flow mark and filling imbalance in multi cavity mold. In this study, we investigated the filling imbalance according to runner shapes by CAE analysis. As a result in CAE, in case of binary branch runner system, filling imbalance was indicated between cavity to cavity, but the flow pattern of each cavity uniformed in unary branch runner system.

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Surface energy assisted gecko-inspired dry adhesives

  • Rahmawan, Yudi;Kim, Tae-Il;Kim, Seong-Jin;Lee, Kwang-Ryeol;Moon, Myoung-Woon;Suh, Kahp-Yang
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.449-449
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    • 2011
  • We reported the direct effect of intrinsic surface energy of dry adhesive material to the Van der Waals and capillary forces contributions of the total adhesion force in an artificial gecko-inspired adhesion system. To mimic the gecko foot we fabricated tilted nanohairy structures using both lithography and ion beam treatment. The nanohairy structures were replicated from Si wafer mold using UV curable polymeric materials. The control of nanohairs slanting angles was based on the uniform linear argon ion irradiation to the nanohairy polymeric surface. The surface energy was studied utilizing subsequent conventional oxygen ion treatment on the nanohairy structures which resulted in gradient surface energy. Our shear adhesion test results were found in good agreement with the accepted Van der Waals and capillary forces theory in the gecko adhesion system. Surface energy would give a direct impact to the effective Hamaker constant in Van der Waals force and the filling angle (${\varphi}$) of water meniscus in capillary force contributions of gecko inspired adhesion system. With the increasing surface energy, the effective Hamaker constant also increased but the filling angle decreased, resulting in a competition between the two forces. Using a simple mathematical model, we compared our experimental results to show the quantitative contributions of Van der Waals and capillary forces in a single adhesion system on both hydrophobic and hydrophilic surfaces. We found that the Van der Waals force contributes about 82.75% and 89.97% to the total adhesion force on hydrophilic and hydrophobic test surfaces, respectively, while the remaining contribution was occupied by capillary force. We also showed that it is possible to design ultrahigh dry adhesive with adhesion strength of more than 10 times higher than apparent gecko adhesion force by controlling the surface energy and the slanting angle induced-contact line of dry adhesive the materials.

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저온 주조법을 응용한 Al-Zn-Mg-Cu 합금의 반응고 성형 (Semi-Solid Forming of Al-Zn-Mg-Cu Alloy Applying Low-Temperature Casting Process)

  • 김정민;김기태;정운재
    • 한국주조공학회지
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    • 제22권2호
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    • pp.82-88
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    • 2002
  • Al-5.5Zn-2.5Mg-l.5Cu semi-solid slurry was prepared by cooling the liquid metal with a low superheat to a solid and liquid co-existing temperature. Relatively round solid particles could be obtained in the slurry through the simple process. The prepared slurry was deformed into the metallic mold by a press and the mechanical properties of obtained specimens were investigated. Mold filling ability of the alloy slurry was also investigated and compared with that of A356 alloy. Al-Zn-Mg-Cu alloy showed lower mold filling ability than A356 alloy probably because small amount of eutectic phase is present and the heat of fusion generated during solidification is smaller than that of A356 alloy.

Copper Seed Layer 형성 및 도금 첨가제에 따른 Copper Via Filling (Formation of Copper Seed Layers and Copper Via Filling with Various Additives)

  • 이현주;지창욱;우성민;최만호;황윤회;이재호;김양도
    • 한국재료학회지
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    • 제22권7호
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    • pp.335-341
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    • 2012
  • Recently, the demand for the miniaturization of printed circuit boards has been increasing, as electronic devices have been sharply downsized. Conventional multi-layered PCBs are limited in terms their use with higher packaging densities. Therefore, a build-up process has been adopted as a new multi-layered PCB manufacturing process. In this process, via-holes are used to connect each conductive layer. After the connection of the interlayers created by electro copper plating, the via-holes are filled with a conductive paste. In this study, a desmear treatment, electroless plating and electroplating were carried out to investigate the optimum processing conditions for Cu via filling on a PCB. The desmear treatment involved swelling, etching, reduction, and an acid dip. A seed layer was formed on the via surface by electroless Cu plating. For Cu via filling, the electroplating of Cu from an acid sulfate bath containing typical additives such as PEG(polyethylene glycol), chloride ions, bis-(3-sodiumsulfopropyl disulfide) (SPS), and Janus Green B(JGB) was carried out. The desmear treatment clearly removes laser drilling residue and improves the surface roughness, which is necessary to ensure good adhesion of the Cu. A homogeneous and thick Cu seed layer was deposited on the samples after the desmear treatment. The 2,2'-Dipyridyl additive significantly improves the seed layer quality. SPS, PEG, and JGB additives are necessary to ensure defect-free bottom-up super filling.

연료전지자동차용 초경량 복합재료 탱크의 수소 충전 특성 연구 (Study of the Characteristics of Hydrogen-Gas Filling Process of Ultra-Light Composite Tanks for Fuel-Cell Vehicles)

  • 유계형;김종열;이택수;이중희
    • 대한기계학회논문집A
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    • 제35권7호
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    • pp.813-819
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    • 2011
  • 본 연구에서는 연료전지자동차의 초경량 복합재료 수소 탱크에 대한 수소 충전 특성을 파악하고, 충전 조건에 따른 수소 탱크의 안전성을 확인하기 위해 플라스틱 라이너를 사용하는 Type 4 수소 탱크와 알루미늄 라이너를 사용하는 Type 3 수소 탱크에 대해 수소 충전 시, 수소 탱크 내부의 가스 온도 및 압력 변화, 라이너 및 복합재료 층의 온도 변화 등을 측정하여 그 특성을 고찰하였다. 그 결과 충전 속도가 증가함에 따라 탱크 내부 가스의 온도가 증가하였고, 탱크 내부 가스의 온도 분포가 다르게 나타났다.

실리콘 마이크로 몰드와 유리의 열-재흐름 현상을 이용한 초소수성 유리 표면 제작 및 젖음 특성 평가 (Fabrication and Characterization of Superhydrophobic Glass Surfaces Using Silicon Micro-mold and Thermal-reflow Process)

  • 김승준;공정호;이동윤;김종만
    • 대한금속재료학회지
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    • 제50권8호
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    • pp.591-597
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    • 2012
  • This paper presents regularly micro-textured glass surfaces ensuring the superhydrophobic properties in the Cassie-Baxter regime. The proposed surfaces were fabricated simply and efficiently by filling the glass material into a silicon micro-mold with periodic micro-cavities based on a thermal-reflow process, resulting in a successful demonstration of the textured glass surface with periodically-arrayed micro-pillar structures. The static and dynamic wetting properties of the micro-textured glass surfaces were characterized by measuring the static contact angle (SCA) and contact angle hysteresis (CAH), respectively. In addition, the surface wettability was estimated theoretically based on Wenzel and Cassie-Baxter wetting theories, and compared with the experimental ones. Through the experimental and theoretical observations, it was clearly confirmed that the proposed micro-textured glass surfaces showed the slippery superhydrophobic behaviors in the Cassie-Baxter wetting mode.

Effective Pre-rating Method Based on Users' Dichotomous Preferences and Average Ratings Fusion for Recommender Systems

  • Cheng, Shulin;Wang, Wanyan;Yang, Shan;Cheng, Xiufang
    • Journal of Information Processing Systems
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    • 제17권3호
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    • pp.462-472
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    • 2021
  • With an increase in the scale of recommender systems, users' rating data tend to be extremely sparse. Some methods have been utilized to alleviate this problem; nevertheless, it has not been satisfactorily solved yet. Therefore, we propose an effective pre-rating method based on users' dichotomous preferences and average ratings fusion. First, based on a user-item ratings matrix, a new user-item preference matrix was constructed to analyze and model user preferences. The items were then divided into two categories based on a parameterized dynamic threshold. The missing ratings for items that the user was not interested in were directly filled with the lowest user rating; otherwise, fusion ratings were utilized to fill the missing ratings. Further, an optimized parameter λ was introduced to adjust their weights. Finally, we verified our method on a standard dataset. The experimental results show that our method can effectively reduce the prediction error and improve the recommendation quality. As for its application, our method is effective, but not complicated.

스크린 프린팅 공법을 통한 방사선 무연 차폐 시트에 관한 연구 (The Study on Filling Factor of Radiation Shielding Lead-free Sheet Via Screen Printing Method)

  • 강상식;정아림;이수민;양승우;김교태;허예지;박지군
    • 한국방사선학회논문지
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    • 제12권6호
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    • pp.713-718
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    • 2018
  • 많은 선행 연구에서는 무연 차폐재를 제작하기 위하여 몬테카를로 시뮬레이션을 통해 방사선 차폐 능력과 경량화에 대한 가능성을 제시하고 있다. 하지만, 이는 바인더 및 미세 기공에 대한 구현이 어렵기에 제품화 공정에 필요한 정보를 충분히 제공하지 못하는 실정이다. 이에 본 연구에서는 제품화 공정에 요구되는 겔 페이스트에 대한 정보를 사전에 제공하기 위하여 스크린 프린팅 공법을 활용하여 충전율에 따른 방사선 차폐 능력에 대한 결과를 제시하였다. 본 연구에서는 방사선 차폐 능력을 평가하기 위해 IEC 61331-1: 2014와 KS A 4025에 부합하도록 실험 환경을 설계하였으며, 방사선 조사 조건은 KS A 4021 규격을 준용하여 총 여과 2.0 mmAl로 여과된 100 kVp를 이용하였다. 본 연구 결과, TVL를 기준으로 Pb $1270{\mu}m$, $BaSO_4$ $3035{\mu}m$, $Bi_2O_3$ $1849{\mu}m$, $WO_3$ $2631{\mu}m$에서 근사한 값으로 분석되었다. 또한, 충전율은 $BaSO_4$ 38.6%, $Bi_2O_3$ 27.1%, $WO_3$ 30.15%로 분석되었다. 하지만, 차후 저온고압 성형을 적용한다면 충전율을 높이면서도 기공률을 낮춤으로서 방사선 차폐 능력의 개선이 충분히 가능할 것으로 기대된다.

Discharge Characteristics of Large-Area High-Power RF Ion Source for Neutral Beam Injector on Fusion Devices

  • Chang, Doo-Hee;Park, Min;Jeong, Seung Ho;Kim, Tae-Seong;Lee, Kwang Won;In, Sang Ryul
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.241.1-241.1
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    • 2014
  • The large-area high-power radio-frequency (RF) driven ion sources based on the negative hydrogen (deuterium) ion beam extraction are the major components of neutral beam injection (NBI) systems in future large-scale fusion devices such as an ITER and DEMO. Positive hydrogen (deuterium) RF ion sources were the major components of the second NBI system on ASDEX-U tokamak. A test large-area high-power RF ion source (LAHP-RaFIS) has been developed for steady-state operation at the Korea Atomic Energy Research Institute (KAERI) to extract the positive ions, which can be used for the NBI heating and current drive systems in the present fusion devices, and to extract the negative ions for negative ion-based plasma heating and for future fusion devices such as a Fusion Neutron Source and Korea-DEMO. The test RF ion source consists of a driver region, including a helical antenna and a discharge chamber, and an expansion region. RF power can be transferred at up to 10 kW with a fixed frequency of 2 MHz through an optimized RF matching system. An actively water-cooled Faraday shield is located inside the driver region of the ion source for the stable and steady-state operations of RF discharge. The characteristics and uniformities of the plasma parameter in the RF ion source were measured at the lowest area of the expansion bucket using two RF-compensated electrostatic probes along the direction of the short- and long-dimensions of the expansion region. The plasma parameters in the expansion region were characterized by the variation of loaded RF power (voltage) and filling gas pressure.

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