• 한국입자에어로졸학회지
• /
• 제13권2호
• /
• pp.53-63
• /
• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• 한국언어정보학회지:언어와정보
• /
• 제6권2호
• /
• pp.15-32
• /
• 2002

These analyses can be roughly classified into two groups: the first argue that the delimiter -to is polysemous so that it delivers either additive or concessive meaning; the second contend that it is monosemous and only conveys emphatic or concessive meaning. The current analysis mainly focuses on its two roles with regard to focus and its meaning. On the basis of the findings, a different analysis is proposed that it serves as an indicator of the presence of a type of focus which is hosted mainly by the expression it attaches to. Furthermore, it is solely responsible for the additive force, and the seemingly relevant emphatic or concessive import is derivable from an emphatic or concessive illocutionary operator which is associated with the focus indicated by -to.

• 대한기계학회논문집B
• /
• 제23권10호
• /
• pp.1240-1247
• /
• 1999

Particle motion through a disk type critical orifice placed in a 3.0cm diameter chamber has been studied numerically. In the simulation, the velocity field is solved using Pantankar's SIMPLER algorithm for the compressible flow and convergence of the computation is confirmed if the mass source at each control volume is smaller than $10^{-7}$. The particle motion in the flow field is solved in Lagrangian method. The particle trajectories showed that the particles injected away from the center line are expanded rapidly. At lower pressures, this expansion phenomena are more dominant. At lower pressures, the clear difference in particle and air speed is showed all the way down to the exit plan. It was found that particles with Stokes number of ca.2.5 tend to focus close to the center line very well except the particles travelling near the wall. However, particles with Stokes number greater than ca.2.5 show a tendency to cross the center line.

• Journal of Information Processing Systems
• /
• 제16권2호
• /
• pp.460-477
• /
• 2020

As one of the most significant challenges in the virtual data center, the virtual data center embedding has attracted extensive attention from researchers. The existing research works mainly focus on how to design algorithms to increase operating revenue. However, they ignore the energy consumption issue of the physical data center in virtual data center embedding. In this paper, we focus on studying the energy-aware virtual data center embedding problem. Specifically, we first propose an energy consumption model. It includes the energy consumption models of the virtual machine node and the virtual switch node, aiming to quantitatively measure the energy consumption in virtual data center embedding. Based on such a model, we propose two algorithms regarding virtual data center embedding: one is heuristic, and the other is based on particle swarm optimization. The second algorithm provides a better solution to virtual data center embedding by leveraging the evolution process of particle swarm optimization. Finally, experiment results show that our proposed algorithms can effectively save energy while guaranteeing the embedding success rate.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.108-108
• /
• 2010

We have generated Ne-Xe plasma in dense plasma focus device with hypocycloidal pinch for extreme ultraviolet (EUV) lithography and investigated an electron temperature. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ne-Xe(30%) gas in accordance with pressure. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature of the hypocycloidal pinch plasma focus could be obtained by the optical emission spectroscopy (OES). The electron temperature has been measured by Boltzmann plot. The light intensity is proportion to the Bolzman factor. We have been measured the electron temperature by observation of relative Ne-Xe intensity. The EUV emission signal whose wavelength is about 6~16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD) and the line intensity has been detected by using a HR4000CG Composite-grating Spectrometer.

• 대한기계학회논문집B
• /
• 제32권8호
• /
• pp.589-596
• /
• 2008

An orifice type of aerodynamic lens is generally used to focus nanoparticles. However, it is impossible to focus particles smaller than 10nm in air due to flow instability of fluid in a lens. In this study, we propose a new converging-diverging type of the aerodynamic lens capable of focusing particles of 5-50nm in air. Designing factors of the lens configurations is also extracted and explained in detail through a numerical simulation. It was demonstrated that the aerosols are delivered from the entrance to the downstream of the lens system with 90% transmission efficiency. The final beam diameters are shown to be more or less 1mm in the range of particle size.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.220-220
• /
• 2011

The Ne-Xe plasmas in dense plasma-focus device with coaxial electrodes were generated for extreme ultraviolet (EUV) lithography. The influence of gas mixture ratio, Ne-Xe (1, 10, 15, 20, 25, 30, 50%) mixture gas, on EUV emission measurement, EUV intensity and electron temperature in the coaxially focused plasma were investigated. An input voltage of 4.5 kV was applied to the capacitor bank of 1.53mF and the diode chamber was filled with Ne-Xe mixture gas at a prescribed pressure. The inner surface of the cylindrical cathode was lined by an acetal insulator. The anode was made of tin metal. The EUV emission signal of the wavelength in the range of 6~16 nm has been detected by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission line was also detected by the composite-grating spectrometer of the working wavelength range of 200~1100 nm (HR 4000CG). The electron temperature is obtained by the optical emission spectroscopy (OES) and measured by the Boltzmann plot with the assumption of local thermodynamic equilibrium (LTE).

• Radiation Oncology Journal
• /
• 제30권1호
• /
• pp.1-13
• /
• 2012

In the previous review, the physical aspect of heavy particles, with a focus on the carbon beam was introduced. Particle beam therapy has many potential advantages for cancer treatment without increasing severe side effects in normal tissue, these kinds of radiation have different biologic characteristics and have advantages over using conventional photon beam radiation during treatment. The relative biological effectiveness (RBE) is used for many biological, clinical endpoints among different radiation types and is the only convenient way to transfer the clinical experience in radiotherapy with photons to another type of radiation therapy. However, the RBE varies dependent on the energy of the beam, the fractionation, cell types, oxygenation status, and the biological endpoint studied. Thus this review describes the concerns about RBE related to particle beam to increase interests of the Korean radiation oncologists' society.

• Journal of Electrochemical Science and Technology
• /
• 제5권3호
• /
• pp.65-72
• /
• 2014

The use of nanoscale electrocatalysts is a promising strategy for achieving high catalyst activity due to their large surface area. However, catalyst activity is not directly correlated to particle size. To understand this discrepancy, many studies have been conducted, but a full understanding has still not been achieved, despite the importance of particle size effects in designing an active catalyst. In this review, we focus on the discussion of particle size effects on the oxygen reduction reaction, and also discussed the nanoscale design beyond the nanoparticle to the meso and macroscale design.

• 한국전기전자재료학회논문지
• /
• 제11권5호
• /
• pp.384-393
• /
• 1998

A mixed powder of electrolyte and matrix support materials with a proper proportion was used for the fabrication of an electrolyte matrix sheet. The purpose of this study is to reduce the large change in MCFC cell thickness occurring in the initial start-up period when separate sheets of electrolyte and support are used. A focus was put on how small the carbonate particles could be made. The particle size of the carbonate powder was controlled by ball milling and the distribution was measured using a particle size analyser. The thickness change was reduced to 20% by this approach, which could be compared to 27% observed in a conventional cell. The thickness changes of electrolyte matrix have linear relation sizes of carbonate powders.