• 한국수소및신에너지학회논문집
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• 제33권5호
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• pp.550-556
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• 2022

In this study, the flow uniformity was analyzed by performing numerical analysis on the 1 kWe internal manifold type solid oxide fuel cell stack according to the channel height of the separator. Also, it was examined by varying the fuel utilization rate and oxygen utilization rate. From the calculation results, we found that as the channel height of the separator decreased, the pressure drop increased exponentially. In addition, it was found that as the channel height of the separator decreased, the gas flow resistance inside the unit cell increased, and the flow resistance increased the pressure drop, thereby improving the flow uniformity inside the stack. Finally, the calculation results showed that as the fuel and oxygen utilization increased, the flow uniformity also improved.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.415-420
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• 2009

Selective Catalytic Reduction(SCR) has been used for the reduction of $NO_x$ in a steam supply boiler. Recently, the reduction of $NO_x$ becomes an important research field because of its negative effect on an environment. Shape optimization of circular poles installed in the chamber, which is located in upstream of a SCR, has been performed using response surface method and three-dimensional Navier-Stokes analysis to enhance gas flow uniformity. Three design parameters, diameter, arranging angle and stretching ratio of circular poles, are considered in the present study. Throughout the shape optimization of a circular pole, gas flow uniformity is successfully increased by decreasing local recirculation flow in a square duct chamber. Recirculation flow observed in the corner of the square duct can be reduced by proper installation of a guide vane or a blunt body. Detailed flow characteristics are also analyzed and discussed.

• 한국결정성장학회지
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• 제13권5호
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• pp.247-253
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• 2003

본 연구에서는 반응기의 유입 확대부의 형상이 반응기 내의 유동 및 증착특성에 미치는 영향을 연구하기 위하여 수평형 MOCVD 반응기에서 TMGa와 $AsH_3$로부터의 GaAs 증착에 관한 수치적 연구를 수행하였다. 두 개의 기하학적인자(확대각, 확대부 형상)가 증착률, 증착률 균일도. 유속 균일도, 압력강하에 미치는 영향을 연구하였다 웨이퍼 위에서의 증착률 균일도, 평균증착률, 유속 균일도를 고려한 결과, 직선형 확대부의 최적 확대각은 $50^{\circ}$∼$55^{\circ}$이며 포물선형 확대부의경우, $40^{\circ}$∼$45^{\circ}$이다. 또한 확대부의 확대각의 변화는 평균증착률 보다 증착률의 균일도에 큰 영향을 미치고 있음을 알 수 있으며 직선확대부보다 포물선형의 확대부에서 더 민감하게 나타남을 알 수 있었다.

• 반도체디스플레이기술학회지
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• 제9권4호
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• pp.39-43
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• 2010

According to recent changes in industry for the semiconductor device, a gap between patterns in wafer is getting narrow. And this narrow gap makes a failure of uniform deposition between center and edge on the wafer. In this paper, for solving this problem, we analyze and manipulate the gas flow inside of the HDP CVD chamber by using CFD(Computational Fluid Dynamics). This simulation includes design manipulations in heights of the chamber and shape of center nozzle in the upper side of the chamber. The result of simulation shows 1.28 uniformity which is lower 3% than original uniformity.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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• pp.1147-1150
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• 2003

When a braun tube becomes wider, one of the major problems to be experienced is the non-uniform coating along the four diagonal directions on its surface. This non-uniformity in the coating thickness has a deep relation with the fluid flow on the surface of a braun tube. In order to control the fluid flow properly, we install the plate to block fluid flow at the corner of a braun tube. In the present study, we investigate the effects of the geometry of plate to control the fluid flow and coating uniformity and determine the optimal shape of plate to improve the quality of coating uniformity.

• 한국표면공학회지
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• 제23권3호
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• pp.160-166
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• 1990

The effects of the variation of proedd varibles on the flow patterns and effects of the flow patterns on the deposition rate and uniformity in the Si-epitaxy CVD with SiH4 as the source of Si were studied through the calculation by use of control volume method. The reslts showed that the natural convection was undesirable to the uniformity of deposition rate, whose effects were decreased with the dercrese with the decrese of the pressure in the reactoor and with the increase of the flow rate. However. the excessive increase of flow rate caused the movement of the unreacted gas to the substrate. Therefore it resulted in the non-uniform depositions. The rotation of substrate was apperared to improve the uniformity. The resulte of this study could used in CVD process to design the reator and to find the optimum conditions of the process variables.

• 한국수소및신에너지학회논문집
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• 제24권4호
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• pp.326-333
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• 2013

This paper presents the performance enhancement of a double-inlet centrifugal blower by the shape optimization of an inlet duct. Two design variables, a length of anti circulation vane and an angles of inlet guide, are introduced to improve the inlet flow uniformity leading to the blower performance. Three-dimensional Navier-Stokes equations are used to analyze the blower performance and the internal flow of the blower. From the shape optimization of the inlet duct of the double-inlet centrifugal blower, the optimal positions of each design variable are determined. Throughout the analysis of sensitivity, it is found that the angle of the inlet guide is more effective than the length of the anti-circulation vane to increase flow uniformity at the outlet of the duct. Efficiency and pressure for the optimal inlet duct shape are successfully increased up to 3.55% and 3.2% compared to those of reference blower at the design flow condition, respectively. Detailed flow field inside the blower is also analyzed and compared.

• Nuclear Engineering and Technology
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• 제53권5호
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• pp.1416-1428
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• 2021

Pebble flow characteristics can be significantly affected by the configuration of pebble bed, especially for HTGR pebble beds. How to achieve a desired uniform flow pattern without stagnation is the top priority for reactor design. Pebbles flows inside some specially designed pebble bed with arc-shaped contraction configurations at the bottom, including both concave-inward and convex-outward shapes are explored based on discrete element method. Flow characteristics including pebble retention, residence-time frequency density, flow uniformity as well as axial velocity are investigated. The results show that the traditionally designed pebble bed with cone-shape bottom is not the most preferred structure with respect to flow pattern for reactor design. By improving the contraction configuration, the flow performance can be significantly enhanced. The flow in the convex-shape configuration featured by uniformity, consistency and less stagnation, is much more desirable for pebble bed design. In contrast, when the shape is from convex-forward to concave-inward, the flow shows more nonuniformity and stagnation in the corner although the average cross-section axial velocity is the largest due to the dominant middle pebbles.

• 한국자동차공학회논문집
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• 제15권5호
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• pp.63-71
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• 2007

The conversion efficiency, durability and pressure drop of the automotive exhaust catalysts are dependent on the flow distribution within the substrate. Conventional porous medium approaches assuming monolith resistance based on the one-dimensional laminar flow for simulating the flow through the automotive exhaust catalysts over-predict the flow uniformity in the monolith. In this study, additional pressure loss is also considered by accounting for entrance effects due to the oblique flow incident on the front face of monolith as a consequence of flow separation and recirculation within the diffuser. The incorporation of an additional pressure loss improves the predictions for the maximum flow velocity within the substrate. An numerical study has also been conducted for the three-dimensional unsteady incompressible non-reacting flow inside various dual-monolith catalytic converters for the rapid acceleration/deceleration driving.

• 반도체디스플레이기술학회지
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• 제3권3호
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• pp.37-40
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• 2004

This study presents numerical solutions of three-dimensional laminar flow-field formed by photo resist flow in a slit-coater model. We discuss on the governing equations, laminar viscosities and the computational model applied in our numerical calculation and some results. We prove that the structure of tapered-cavity aid to make uniform pressure-field and boundary effect is an important problem to improve coating uniformity. In view of uniformity improvement, it is necessary to study for the structure of cavity and flow path.