• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
• /
• pp.12-12
• /
• 2008

Ruthenium is one of the noble metals having good thermal and chemical stability, low resistivity, and relatively high work function(4.71eV). Because of these good physical, chemical, and electrical properties, Ru thin films have been extensively studied for various applications in semiconductor devices such as gate electrode for FET, capacitor electrodes for dynamic random access memories(DRAMs) with high-k dielectrics such as $Ta_2O_5$ and (Ba,Sr)$TiO_3$, and capacitor electrode for ferroelectric random access memories(FRAMs) with Pb(Zr,Ti)$O_3$. Additionally, Ru thin films have been studied for copper(Cu) seed layers for Cu electrochemical plating(ECP) in metallization process because of its good adhesion to and immiscibility with Cu. We investigated Ru thin films by thermal ALD with various deposition parameters such as deposition temperature, oxygen flow rate, and source pulse time. Ru thin films were grown by ALD(Lucida D100, NCD Co.) using RuDi as precursor and $O_2$ gas as a reactant at 200~$350^{\circ}C$.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2005년도 추계 학술대회논문집(수송기계편)
• /
• pp.190-193
• /
• 2005

The air filter in engine intake system filters the dirt in the breathing air but also it attenuates the noise although the phenomenon has been regarded negligible. For the analysis of the acoustical performance of air filter, an acoustical model is suggested in this paper. The air filter consists of a porous filter element, which catches the particulate dirt, and a plastic filter box, which supports the filter element. Fibrous structure of the filter element is modeled as a micro-perforated panel using the flow resistivity and porosity. The pleated geometry of the filter element is modeled as two coupled ducts and a mathematical model is developed for the analysis of sound propagation. The filter box Is modeled as a rigid rectangular box. By combining two models, a 4-pole transfer matrix for the air filter is derived. The transmission loss calculated using the transfer matrix of the suggested model is compared with the measured data. Reasonably good agreement is observed. The result can be improved by considering the visco-thermal effect in modeling, in particular at a frequency range near the troughs of TL curve.

• 한국지구물리탐사학회:학술대회논문집
• /
• 한국지구물리탐사학회 2003년도 Proceedings of the international symposium on the fusion technology
• /
• pp.335-339
• /
• 2003

The estimation of seawater intrusion into deep aquifers has been becoming an important subject in terms of site characterization for geological disposal of radioactive waste. Conventional direct-current resistivity methods have been used for ground water explorations and recently have been applied to environmental problems. However, electromagnetic methods are more practical and useful for such a deep investigation. We consider audio-frequency magnetotelluric (AMT) and surface-to-borehole electromagnetic (EM) tomography methods as promising tools for the investigation of deep aquifer. These methods were tested in the Hasunuma area, Chiba Prefecture, Japan. Although the study area is in an urban area, high-quality AMT data were acquired, which was mainly accomplished by night-time data recording and remote-reference data processing. One-dimensional inversion results of the AMT data revealed two extremely conductive zones, which is consistent with the electrical conductivity profile of pore water in core samples. It can be interpreted as the seawater intrusions into both zones. However, the chemical analysis of the groundwater sampled in the deep zone suggests that this groundwater must be fossil seawater that had been confined during sedimentation processes. In addition, the permeability coefficient of the deep layer is very low. Thus the deep conductive zone corresponds to the fossil seawater regarded as being difficult to flow.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
• /
• pp.97-100
• /
• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16%)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vaccum furnace range $500\sim1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho=768.93$ ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

• 한국표면공학회지
• /
• 제45권1호
• /
• pp.1-7
• /
• 2012

Multi-walled carbon nanotube (MWCNT) aluminum composite powders were deposited to form coatings using a high velocity oxygen fuel (HVOF) spraying process. High thermal energy and contact with atmospheric oxygen were supplied as the MWCNT aluminum composite particles were exposed to a gas flow field at high temperature (${\sim}3.0{\times}10^3$ K) during HVOF spraying. As a result, the particles underwent full or partial melting and rapid solidification due to the high thermal energy, and the exposure to oxygen induced the interfacial reaction of MWCNTs within the particle. The electrical and mechanical properties of MWCNT aluminum composite coatings were evaluated based on microstructure analysis. Electrical resistivity, elastic modulus, and micro-hardness, of the MWCNT aluminum composite coatings were higher than those of pure aluminum coating. The contribution of MWCNTs to the aluminum matrix can be attributed to their high electrical conductivity, dispersion hardening and anchoring effects. The relationship among the properties and the interaction of the MWCNTs with the aluminum matrix is discussed.

• 대한디지털의료영상학회논문지
• /
• 제12권2호
• /
• pp.145-150
• /
• 2010

Thick films of carbon fiber were prepared by a heating element of plan shape made in Darin co., We have investigated surface morphology of the specimen depending on heat-treatment temperatures. Scanning electron microscope(SEM) image of carbon fiber thick films of the specimen heat treated shows a grain growth at $1200^{\circ}C$ and becomes a poly-crystallization at $1350^{\circ}C$. The variation of resistivity at the thermally annealed specimen above $600^{\circ}C$ depends on type of the substrates. It may be due to a variation of film thickness and a difference of interfacial phenomena. A heating element of features was affected significantly by skin blood and quantity of heat of the body physiological function. After radiation of farinfrared for plate heating element, the function of biometric physiological is considered of skin blood flow and calorie which greatly affects on individuals. Electromagnetic wave was not influence on the body.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2006년도 춘계학술대회논문집
• /
• pp.114-117
• /
• 2006

The air filter in engine intake system has a function of filtrating the dirt in the scavenging air as well as attenuating the noise. The noise attenuation within the air cleaner filter, however, has been regarded as negligible by the field engineers. In this paper, for the analysis of the acoustical performance of air filter, an acoustical model was suggested and the characteristics of air filter system were investigated. Fibrous structure of the filter element was modeled as a micro-perforated panel using the flow resistivity and porosity. The pleated geometry of the filter element was modeled as two coupled ducts that have permeable walls, in which each duct area was assumed being constant. Using such simplified geometry, a mathematical model was developed for the sound propagation within a narrow duct system. Visco-thermal effect was considered in modeling the sound propagation through such tubes; the filter box was modeled as a rigid rectangular box. By combining two models, a four-pole transfer matrix was derived. For the validation purpose, transmission loss was measured for a plastic rectangular box containing an air filter. A noticeable effect of the air filter element was observed by including the filter into the box. Comparing the predicted and measured data, we found that the predicted TL agrees well with experimental results, in particular, in magnitude and frequency at TL troughs.

• 한국초전도ㆍ저온공학회논문지
• /
• 제16권1호
• /
• pp.1-5
• /
• 2014

We calculated the resonance tunneling energy band in the BCS gap for Type-II superconductor in which periodic potential is generated by external magnetic flux. In this model, penetrating magnetic flux was assumed to be in a fixed lattice state which is not moving by an external force. We observed the existence of two subbands when we used the same parameters as for the $Nd_{1.85}Ce_{0.15}CuO_X$ thin film experiment. The voltages at which the regions of negative differential resistivity (NDR) started after the resonant tunneling ended were in a good agreement with the experimental data in the field region of 1 T - 2.2 T, but not in the high field regions. Discrepancy occurred in the high field region is considered to be caused by that the potential barrier could not be maintained because the current induced by resonant tunneling exceeds the superconducting critical current. In order to have better agreement in the low field region, more concrete designing of the potential rather than a simple square well used in the calculation might be needed. Based on this result, we can predict an occurrence of the electromagnetic radiation of as much difference of energy caused by the 2nd order resonant tunneling in which electrons transit from the 2nd band to the 1st band in the potential wells.

• Computers and Concrete
• /
• 제7권1호
• /
• pp.53-62
• /
• 2010

Dredged silt from reservoirs in southern Taiwan was sintered to make lightweight aggregates (LWA), which were then used to produce high-performance lightweight aggregate concrete (HPLWC). The HPLWC was manufactured using different amounts of mixing water (140, 150, and 160 $kg/m^3$) and LWA of different particle densities (700, 1100, and 1500 $kg/m^3$) at different W/b ratios (0.28, 0.32, and 0.4). Results show that the lightweight aggregates of dredged silt taken in southern Taiwan perform better than the general lightweight aggregates. In addition, the HPLWC possessed high workability with a slump of 230-270 mm, and a slump flow of 450-610 mm, high compressive strength of over 40 MPa after 28 days of curing, good strength efficiency of cement exceeding $0.1MPa/kg/m^3$, low thermal conductivity of 0.4-0.8 $kcal/mh^{\circ}C$, shrinkage of less than $4.8{\times}10^{-4}$, and high electrical resistivity of above 40 $k{\Omega}-cm$. The above findings prove that HPLWC made from dredged silt can help enhance durability of concrete and provide and an ecological alternative use of dredged silt.

• 한국막학회:학술대회논문집
• /
• 한국막학회 1999년도 The 7th Summer Workshop of the Membrane Society of Korea
• /
• pp.115-115
• /
• 1999

In this work a new process was developed for the sulfonation of the chemicallly stable engineering polymer polyethersulfone as membrane materials for electrodialysis or a flow battery applications. Commercially available polyethersulfone polymer was partially sulfonated using a CSA sulfonating agent in a dichloromethane solvent, which sulfonated polyethersulfone with various sulfonation levels have been prepared. Sulfonated polyethersulfone (SPES) membranes with different ion capacities were prepared for the purpose of identifying cation exchange membrane properties, in an attempt to find a low cost replacement for Nafion, which most of the perfluorinated membranes, known to exhibit a prolonged service life, are expensive and difficult to process. The following features were determined: the degree of sulfonation, water uptake, thermal analysis, and electrochemical properties such as ion exchange capacities, resistivity, selectivity of ion permeation. The surface of the cation exchange membranes, decomposed with the H202-treatment, were observed by using scanning electron microscope. The area resistivities of SPES mebranes in 5N-NaOH decreased from $2,150{\;}{\Omega}-cm2$ to less than $15{\Omega}-cm2$ as the ion exchange capacity (IEC) increased from 0.62 to 1.73 millieequivlants per dry gram(meq/dg).eq/dg).