• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.900-904
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• 1991

It is important and difficult to control the steam temperature in the once through boiler. Generally, steam temperature of once through boiler not only is controlled by boiler spray water flow, but also is influenced by feed water flow and fuel flow. So we have to make the same gain of fuel flow controller and feed water flow controller. This paper is shown the design and test of steam temperature and feed water flow control system for once through boiler in pusan thermal power plant.

• 연구논문집
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• s.22
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• pp.85-96
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• 1992

A mass flow controller(MFC) is commonly used in the semiconductor industries to control the flow rate of various process gases. The measurement and precise control of the of flow rate the gas are the key for a succesful IC fabrication. To eventually design a reliable MFC, a pre-proto type MFC was built and its flow characteristics were investigated. Most of the functional components of the pre-proto type were built for the present study, but the remainder were adopted from a commercial unit. The flow control characteristics were compared with that of a standard MFC. Major dimensions of an MFC for 0-10 SLM capacity were suggested.

• KIEE International Transaction on Systems and Control
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• v.2D no.2
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• pp.78-91
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• 2002

In the thermal power plant, there are six manipulated variables: main steam flow, feedwater flow, fuel flow, air flow, spray flow, and gas recirculation flow. There are five controlled variables: generator output, main steam pressure, main steam temperature, exhaust gas density, and reheater steam temperature. Therefore, the thermal power plant control system is a multinput and output system. In the control system, the main steam temperature is typically regulated by the fuel flow rate and the spray flow rate, and the reheater steam temperature is regulated by the gas recirculation flow rate. However, strict control of the steam temperature must be maintained to avoid thermal stress. Maintaining the steam temperature can be difficult due to heating value variation to the fuel source, time delay changes in the main steam temperature versus changes in fuel flow rate, difficulty of control of the main steam temperature control and the reheater steam temperature control system owing to the dynamic response characteristics of changes in steam temperature and the reheater steam temperature, and the fluctuation of inner fluid water and steam flow rates during the load-following operation. Up to the present time, the Proportional-Integral-Derivative Controller has been used to operate this system. However, it is very difficult to achieve an optimal PID gain with no experience, since the gain of the PID controller has to be manually tuned by trial and error. This paper focuses on the characteristic comparison of the PID controller and the modified 2-DOF PID Controller (Two-Degrees-Freedom Proportional-Integral-Derivative) on the DCS (Distributed Control System). The method is to design an optimal controller that can be operated on the thermal generating plant in Seoul, Korea. The modified 2-DOF PID controller is designed to enable parameters to fit into the thermal plant during disturbances. To attain an optimal control method, transfer function and operating data from start-up, running, and stop procedures of the thermal plant have been acquired. Through this research, the stable range of a 2-DOF parameter for only this system could be found for the start-up procedure and this parameter could be used for the tuning problem. Also, this paper addressed whether an intelligent tuning method based on immune network algorithms can be used effectively in tuning these controllers.

• Journal of the Semiconductor & Display Technology
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• v.7 no.3
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• pp.55-58
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• 2008

The objective of this research is to design, manufacture and test a mass flow controller capable of measuring compressible as well as incompressible fluid flows based on a 'bucket and stop-watch' method. The basic principle behind such a system is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This device should be able to handle fluid flows in the range of 0.1 ml/min to 10 ml/min within an accuracy of ${\pm}$1%. For the flow meter to be able to compete with established designs, it must be not only comparable in cost and robustness, but also very accurate and reliable as well.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.2
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• pp.63-70
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• 2003

In this paper, an MFC (Mass Flow Controller) which is widely used in many semiconductor manufacturing processes for controlling the mass flow rate of a gas is designed and implemented using the PIC 16F876 of Microchip, Inc. The MFC implemented in this thesis has the form of hybrid-type, i.e., the mixed-type of the analog-type MFC, which has many problems such as low accurary, and digital-type MFC, which use an expensive DSP (Digital Signal Processor) and an ADC (Analog to Digital Convertor) with high precision. The MFC is consists of the sensor unit, the control unit and the actuator unit, and it has used the automatic calibration algorithm and the reference table method for the improvement of the performance.

• Journal of Power Electronics
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• v.12 no.5
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• pp.787-799
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• 2012

Real and reactive power flows on a transmission line interact inherently. This situation degrades power flow controller performance when independent real and reactive power flow regulation is required. In this study, a quasi multi-pulse interline power flow controller (IPFC), consisting of eight six-pulse voltage source converters (VSC) switched at the fundamental frequency is proposed to control real and reactive power flows dynamically on a transmission line in response to a sequence of set-point changes formed by unit-step reference values. It is shown that the proposed hybrid fuzzy-PI commanded IPFC shows better decoupling performance than the parameter optimized PI controllers with analytically calculated feed-forward gains for decoupling. Comparative simulation studies are carried out on a 4-machine 4-bus test power system through a number of case studies. While only the fuzzy inference of the proposed control scheme has been modeled in MATLAB, the power system, converter power circuit, control and calculation blocks have been simulated in PSCAD/EMTDC by interfacing these two packages on-line.

• Journal of Electrical Engineering and Technology
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• v.5 no.2
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• pp.197-208
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• 2010

Unified power flow controller (UPFC) is the most reliable device in the FACTS concept. It has the ability to adjust all three control parameters effective in power flow and voltage stability. In this paper, a linearized model of a power system installed with a UPFC has been presented. UPFC has four control loops that by adding an extra signal to one of them, increases dynamic stability and load angle oscillations are damped. In this paper, after open loop eigenvalue (electro mechanical mode) calculations, state-space equations have been used to design damping controller and it has been considered to influence active and reactive power flow durations as the input of damping controller, in addition to the common speed duration of synchronous generators as input damper signal. To increase stability, further Lead-Lag and LQR controllers, a novel on-line adaptive controller has been used analytically to identify power system parameters. Closed-loop calculations of the electro mechanical mode verify the improvement of system pole placement after controller designing. Suitable operation of adaptive controller to decrease rotor speed oscillations against input mechanical torque disturbances is confirmed by the simulation results.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1120-1125
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• 2007

Experimental study on the control of randomly disturbing system is conducted. External and internal disturbances are imposed to the system in combined manner. A vertical propeller system exposed horizontal weak turbulent air flow is chosen as an experimental model. The aim of the control system is to maintain the angular position of vertical propeller in parallel to air flow. Trajectory Tracking Stochastic Controller (TTSC) is designed to ensure system's stability while following system command. The Trajectory Tracking Stochastic Controller is composed of two controller, one is stochastic controller to suppress internal random noise and the other one is trajectory-tracking controller to follow the command having random noise. The proposed hybrid controller, TTSC, shows remarkable performance in pitch control of vertical propeller system in wind-tunnel test

• Journal of Industrial Technology
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• v.22 no.A
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• pp.89-94
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• 2002

In this paper, a Exhaust Flow Controller (EFC) technology for uniform application of film coater and developer device is introduced that spread and remove photo resister at semiconductor manufacturing process. Because developed EFC device uses differential pressure sensing method as a differential flow meter and embodied smart A/D conversion by using a one chip microprocessor and devised by feedback Servo control, It has shown excellent performance and stability evaluation, as maximum 2000L/min flow, capability of installation to actual semiconductor equipment.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1295-1299
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• 2003

The Mass Flow Controller(MFC) has become crucial in semiconductor manufacturing equipments. It is an important element because the quality and the yield of a semiconductor process are decided by the accurate flow control of gas. Therefore, the demand for the high speed and the highly accurate control of MFCs has been requested. It is hard to find an article of the control algorithm applied to MFCs. But, it is known that commercially available MFCs have PID control algorithms. Particularly, when the system detects the flow by way of heat transfer, MFC control problem contains the time delay and the nonlinearity. In this presentation, MFC control algorithm with the superior performance to the conventional PID algorithm is discussed and the superiority is demonstrated through the experiment. Fuzzy controller was utilized in order to compensate the nonlinearity and the time delay, and the performance is compared with that of a product currently available in the market. The control system, in this presentation, consists of a personal computer, the data acquisition board and the control algorithm carried out by LabWindows/CVI program on the PC. In addition, the method of estimating an actual flow from sensor output containing the time delay and the nonlinearity is presented. In conclusion, according to the result of the experiment, the proposed algorithm shows better accuracy and is faster than the conventional controller.