Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 7 Issue 3
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- Pages.55-58
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- 2008
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- 1738-2270(pISSN)
An experimental study of Incompressible time based mass flow controller
비압축성 시간식 질량유량계의 특성에 관한 연구
- Chang, Young-Chul (School of Mechatronics Engineering, Korea University of Technology and Education)
- 장영철 (한국기술교육대학교 메카트로닉스공학부)
- Published : 2008.09.30
Abstract
The objective of this research is to design, manufacture and test a mass flow controller capable of measuring compressible as well as incompressible fluid flows based on a 'bucket and stop-watch' method. The basic principle behind such a system is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This device should be able to handle fluid flows in the range of 0.1 ml/min to 10 ml/min within an accuracy of