• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.2
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• pp.310-317
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• 2013

In this paper, the contact pressure of the wafer and polishing pad for final polishing process for 300 mm-wafer were investigated through numerical analysis using FEM tool, ANSYS. The distribution of the contact pressure is one of main parameters which affects on the flatness and surface roughness of polished wafers. Two types of polishing head, a hard type head with ceramic disk and a soft type head with air bag were considered. The effects of the deformation and initial shape of table on the contact pressure were also examined. Both heads and tables were modeled as 3D finite element model from solid model, and the material properties of polishing pads and rubber plate for the air-bag head were obtained from tensile tests. The contact pressure deviation on wafer surface was smaller with air bag head than hard type head even when the table had form errors such as convex or concave. From this 3D analysis, it could be concluded that the air-bag head has better uniformity of the contact pressure on wafer. Also, the effects of inner diameter of air bag and radial clearance between wafer and retainer were investigated as view point of contact pressure concentration on the edge of wafer.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1689-1699
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• 1990

Sendzimir rolling mill is widely used for rolling hard materials such as stainless steel due to its small work roll diameter and shape controllability using two effective actuators, AS-U-Roll crown adjustment and lst. intermediate roll shifting. However, in comparison with 4-high or 6-high mills, it is noteasy to get good strip or excellent flatness because Z-mill has small diameter of work rolls which are easily deformed by load. A new mathematical model based on the method of dividing roll and strip into multo-portions was used to develop strip profile prediction software. Using the developed software, several influencing factors related to rolled strip profile for Z-Mill were tested analytically and characterized for the effective shape control. The effects of adjusting shape control actuators of Z-Mill on strip profile were also examined and discussed in detail.

• Nuclear Engineering and Technology
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• v.50 no.8
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• pp.1330-1338
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• 2018

High-density UMo/Zr monolithic nuclear fuel plates have a promising application prospect in high flux research and test reactors. The solid state welding method called co-rolling is used for their fabrication. Hot co-rolling simulations for the composite blanks of UMo/Zr monolithic nuclear fuel plates are performed. The effects of coupon sizes and mechanical property parameters on the contact pressures between the to-be-bonded surfaces are investigated and analyzed. The numerical simulation results indicate that 1) the maximum contact pressures between the fuel coupon and the Zircaloy cover exist near the central line along the plate length direction; as a whole the contact pressures decrease toward the edges in the plate width direction; and lower contact pressures appear at a large zone near the coupon corner, where de-bonding is easy to take place in the in-pile irradiation environments; 2) the maximum contact pressures between the fuel coupon and the Zircaloy parts increase with the initial coupon thickness; after reaching a certain thickness value, the contact pressures hardly change, which was mainly induced by the complex deformation mechanism and special mechanical constitutive relation of fuel coupon; 3) softer fuel coupon will result in lower contact pressures and form interfaces being more out-of-flatness.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.2
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• pp.31-43
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• 2019

In this study, polymer elastic bumps were fabricated for the flexible electronic package flip chip bonding and the viscoelastic and viscoplastic behavior of the polymer elastic bumps according to the temperature and load were analyzed using FEM and experiments. The polymer elastic bump is easy to deform by the bonding load, and it is confirmed that the bump height flatness problem is easily compensated and the stress concentration on thin chip is reduced remarkably. We also develop a spiral cap type and spoke cap type polymer elastic bump of $200{\mu}m$ diameter to complement Au metal cap crack phenomenon caused by excessive deformation of polymer elastic bump. The proposed polymer elastic bumps could reduce stress of metal wiring during bump deformation compared to metal cap bump, which is completely covered with metal wiring because the metal wiring on these bumps is partially patterned and easily deformable pattern. The spoke cap bump shows the lowest stress concentration in the metal wiring while maintaining the low contact resistance because the contact area between bump and pad was wider than that of the spiral cap bump.

• Transactions of the KSME C: Technology and Education
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• v.3 no.4
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• pp.265-271
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• 2015

The bonding process should be achieved in vacuum environment to avoid air bubble. In this study, we studied about pressure uniformity that became an issue in thermo compression bonding usually. Uniform press is realized by the method that use air spring and metal form spring. The concept of uniform press using air spring is removed except pressing direction in the press processing so angle between the vector of pressure surface and the pressure axis is parallel automatically. Air spring compensate the errors of machining and assembly. Metal form compensate the thermal deformation and flatness error.

• Journal of the Korean Society of Costume
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• v.54 no.1
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• pp.109-123
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• 2004

In this study, the fashion trend after the 1990s and the characteristics of fashion in the postmodernistic viewpoint that mainly effected fashion were observed, and the characteristics of fashion illustration expression was observed in the viewpoint of its link. It can be seen that mutually close characteristics are mutually linked. As the result of this study, the characteristics of fashion illustration can be categorized into three areas. and the sub-concepts are as following. The first category is the pursuit of feminine beauty of individual multi-dimension. This includes- 1) retro feminine beauty; 2) fetishistic and ecstatic feminine beauty; 3) mixed composition genderless (mixed composition style. ageless style and raceless style): and 4) beauty of body deconstruction and reconstruction (deformation due to partial transformation, change into animalization, mechanization and spirituelization. and beautification of crudeness). The second is the intentional deviation of expression and production technique. This includes-1) deviation from traditional perspective; 2) deviation from composition concept: and 3) breaking away from the existing material and expression technique of material. The third is the pursuit of authority-rejection form of expression. This is an area that should be noticed in the fashion illustration expression of the 1990s, as it shows the most diverse phenomenon. The sub-concepts of this category include- 1) separation of art 2) minimalism (minimalism in structure and production method); 3) flatness; 4) completion of incompletion; 5) accidentalism; 6) sportive;7) absence of figure; 8) intentional childishness 9) story development; 10) techno mechanism and cyber character; and 11) animation style.

• Steel and Composite Structures
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• v.32 no.5
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• pp.571-582
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• 2019

This study aimed to assess the feasibility on the wide and long 9%Ni steel plate for use in the LNG storage inner tank shell. First, 5-m-wide and 15-m-long 9%Ni steel plates were test manufactured from a steel mill and specimens taken from the plates were tested for strength, toughness, and flatness to verify their performance based on international standards and design specifications. Second, plates with a thickness of 10 mm and 25 mm, a width of 4.8~5.0 m, and a length of 15 m were test fabricated by subjecting to pretreatment, beveling, and roll bending resulting in a final width of 4.5~4.8 m and a length of 14.8m with fabrication errors identical to conventional plates. Third, welded specimens obtained via shield metal arc welding used for vertical welding of inner tank shell and submerged arc welding used for horizontal welding were also tested for strength, toughness and ductility. Fourth, verification of shell plate material and fabrication was followed by test erection using two 25-mm-thick, 4.5-m-wide and 14.8-m-long 9%Ni steel plates. No undesirable welding failure or deformation was found. Finally, parametric design using wide and long 9%Ni steel plates was carried out, and a simplified design method to determine the plate thickness along the shell height was proposed. The cost analysis based on the parametric design resulted in about 2% increase of steel weight; however, the construction cost was reduced about 6% due to large reduction in welding work.