• 한국결정성장학회지
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• 제20권5호
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• pp.221-226
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• 2010

메칠멜캅탄($CH_3SH$) 가스를 검출하는 수정진동자(QCM) 가스센서를 QCM의 전극에 $TiO_2$ 나노입자와 전해질 폴리머를 증착하여 제조하였다. LBL-SA법에 의해 제조된 $TiO_2$/PSS 박막은 높은 비표면적을 나타내었고, 가스센서의 감도를 증가시켰다. 1.0 ppm의 농도를 갖는 메칠멜캅탄에 노출된 TEA 혹은 $TiO_2$/PSS 막이 증착된 QCM의 주파수 변이는 각각 약 9 Hz, 2 Hz 였다. ($TiO_2$/PSS) 박막의 증착수가 늘어남에 따라 제조된 박막의 비표면적이 증가하게 되어 QCM 센서의 주파수 변이도 점차적으로 증가하였다. 추가적으로 메칠멜캅탄 가스의 농도가 0.5 ppm에서 2.0 ppm으로 높아짐에 따라 QCM 센서의 주파수 변화도 증가되었다. 본 연구에서는, ($TiO_2$/PSS) 박막이 증착된 QCM 센서의 표면구조의 변화와 센서 특성을 측정하였다.

• 센서학회지
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• 제15권5호
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• pp.309-316
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• 2006

The $SnO_{2}$ thin film sensors were fabricated by a thermal oxidation method. $SnO_{2}$ thin film sensors were treated in $N_{2}$ atmosphere. The sensors with $O_{2}$ treatment after $N_{2}$ treatment showed 70 % sensitivity for 1 ppm $H_{2}S$ gas, which is higher than the sensors with only $O_{2}$ treatment. The Ni metal was evaporated on Sn thin film on the $Al_{2}O_{3}$ substrate. And the sensor was heated to grow the Sn nanowire in the tube furnace with $N_{2}$ atmosphere. Sn nanowire was thermally oxidized in $O_{2}$ environments. The sensitivity of $SnO_{2}$ nanowire sensor was measured at 500 ppb $H_{2}S$ gas. The selectivity of $SnO_{2}$ nanowire sensor compared with thin film and thick film $SnO_{2}$ was measured for $H_{2}S$, CO, and $NH_{3}$ in this study.

• 한국가스학회지
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• 제13권2호
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• pp.23-29
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• 2009

Pt, Pd, In 등의 촉매금속을 사용하여 아세토나이트릴 유독가스에 대한 감도를 향상시키는 SnO2 가스센스에 대하여 연구하였다. Metal-SnO2 후막은 백금전극이 내장된 알루미나 지지체의 스크린법으로 제작되었다. 본 센서의 특성은 검출가스의 농도의 함수로 반응기내 각센서의 전기적 저항을 측정하여 조사하였으며, 10-50ppm 범위의 유독가스 농도에 대하여 검지 측정하였다. 그 결과 촉매금속의 종류에 따라 센서에서 반응하는 감도가 각각 다르게 선택성을 갖고 있는 것으로 나타났다.

• 한국정보통신학회논문지
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• 제26권9호
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• pp.1347-1356
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• 2022

본 연구에서는 소자의 크기에 따른 코발트-저마늄 박막 기반의 galvanic cell의 특성을 조사하고, 이를 물 접촉 감지에 활용하기 위한 아두이노 기반 사물인터넷 센서 네트워크에의 적용을 제시한다. 본 연구에서 제안하는 코발트 저마늄 박막 기반 galvanic cell은 기존의 압전, 열전 에너지 하베스팅 소자와 다르게, 소자의 손상을 줄 수 있는 기계적인 변형이나 온도 구배를 필요로 하지 않는다는 점에서, 자가발전 센서 네트워크를 구축하는데 있어 더욱 적합한 에너지 하베스팅 소자로 적합하다. 본 연구는 스퍼터링 방식으로 증착된 코발트-저마늄 박막 기반의 galvanic cell을 센서로 활용함으로써 향후 자가발전 센서 네트워크의 실현 가능성에 대해 논의함으로써 향후 연구, 개발될 발전된 형태의 센서 네트워크 구축에 기여할 것으로 기대된다.

• 센서학회지
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• 제25권4호
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• pp.271-274
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• 2016

The reliability and reproducibility of gas sensors are very important for real applications. The influence of nanofiber length and sensing film thickness on the reliability and response of gas sensing characteristics was investigated. For this, the length of $SnO_2$ nanofibers was controlled by tuning ultrasonic treatment and the different thicknesses of sensing films were prepared by manipulating the amount of slurry deposition. The sensor prepared from long nanofibers (length: ${\sim}3.6{\mu}m$) showed the significant fluctuation of gas sensing characteristics when the film becomes thinner than $18{\mu}m$, while that prepared from short nanofibers (length: ${\sim}0.9{\mu}m$) showed reproducible sensor response and resistance regardless of film thickness. Moreover, the shortening of nanofibers enhanced the gas response ~2 times, which can be explained by the increase of chemiresistive fiber-to-fiber contacts. The reproducibility, gas response, and selectivity of $SnO_2$ nanofiber gas sensor could be controlled by tuning nanofiber length, film thickness, and catalyst loading.

• Bulletin of the Korean Chemical Society
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• 제30권10호
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• pp.2387-2392
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• 2009

A composite film of multi-walled carbon nanotube (MWCNT)/sol-gel-derived zinc oxide(ZnO)/Nafion has been utilized as an efficient immobilization matrix for the construction of a highly sensitive and stable tris(2,2'-bipyridyl) ruthenium(II) (Ru(${bpy)_3}^{2+})$ electrogenerated chemiluminescence (ECL) sensor. The electrochemical and ECL behaviors of Ru(${bpy)_3}^{2+})$ ion-exchanged into the composite film were strongly dependent upon the sol-gel preparation condition, the amount of MWCNT incorporated into the ZnO/Nafion composite film, and the buffer solution pH. The synergistic effect of MWCNTs and ZnO in the composite films increased not only the sensitivity but also the long-term stability of the ECL sensor. The present ECL sensor based on the MWCNT/ZnO/Nafion gave a linear response ($R^2$ = 0.999) for tripropylamine concentration from 500 nM to 1.0 mM with a remarkable detection limit (S/N = 3) of 15 nM. The present ECL sensor showed outstanding long-term stability (94% initial signal retained for 5 weeks). Since the present ECL sensor exhibits large response towards NADH, it could be applied as a transduction platform for the ECL biosensor in which the NADH is produced from the dehydrogenase-based enzymatic reaction in the presence of NA$D^+$ cofactor.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권5호
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• pp.289-293
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• 2000

This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

• 한국자동차공학회논문집
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• 제11권6호
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• pp.134-140
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• 2003

The film sensor is used for measuring pressure distribution at planar area, especially at a small space or gap. The present paper deals with the development of film type sensors and system for pressure distribution measuring. The developed system is consist of (1)film sensor with 40/sup */40 array, (2)PCI interface card with maximum sampling rate of 100㎐, and (3)software for data processing and real-time display. The contact pressure test of wiper blade and front glass of vehicle was performed with wiper blade by 40cm. Generally spring force of wiper arm is designed at 0.7∼1kN. Test results of total force was 9.4N and 7.1N in each driver and passenger toward. The paper suggested possibility for base definition in wiper design. A windshield wiper blade experiment revealed that the system successfully measured the contact force distribution during static state, showing the usefulness of the developed system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1372-1374
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• 2001

This paper describes fabrication and characteristics of metal thin-film pressure sensor for working at high temperature. The proposed pressure sensor consists of a chrom thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097 $\sim$ 1.21 mV/V kgf/$cm^2$ in the temperature range of 25 $\sim$ $200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• Journal of the Korean Physical Society
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• 제73권12호
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• pp.1867-1872
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• 2018

This study proposes a route for surface modification for p-type cobalt oxide-based gas sensors. We deposit a thin layer of Ni on the Co oxide film by sputtering process and annealed at $350^{\circ}C$ for 15 min in air, which changes a typical sputtered film surface into one interlaced with a high density of hemispherical nanoparticles. Our in-depth materials characterization using transmission electron microscopy discloses that the microstructure evolution is the result of an extensive inter-diffusion of Co and Ni, and that the nanoparticles are nickel oxide dissolving some Co. Sensor performance measurement unfolds that the surface modification results in a significant sensitivity enhancement, nearly 200% increase for toluene (at $250^{\circ}C$) and CO (at $200^{\circ}C$) gases in comparison with the undoped samples.