Journal of the Korean Physical Society

Korean Physical Society (한국물리학회)
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Nickel Doping on Cobalt Oxide Thin Film Using by Sputtering Process-a Route for Surface Modification for p-type Metal Oxide Gas Sensors

  • Kang, Jun-gu (School of Advanced Materials Sciences & Engineering, Sungkyunkwan University) ;
  • Park, Joon-Shik (Smart Sensor Research Center, Korea Electrical Technology Institute (KETI)) ;
  • An, Byeong-Seon (School of Advanced Materials Sciences & Engineering, Sungkyunkwan University) ;
  • Yang, Cheol-Woong (School of Advanced Materials Sciences & Engineering, Sungkyunkwan University) ;
  • Lee, Hoo-Jeong (School of Advanced Materials Sciences & Engineering, Sungkyunkwan University)
  • Received : 2018.10.29
  • Accepted : 2018.11.07
  • Published : 2018.12.30
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Abstract

This study proposes a route for surface modification for p-type cobalt oxide-based gas sensors. We deposit a thin layer of Ni on the Co oxide film by sputtering process and annealed at $350^{\circ}C$ for 15 min in air, which changes a typical sputtered film surface into one interlaced with a high density of hemispherical nanoparticles. Our in-depth materials characterization using transmission electron microscopy discloses that the microstructure evolution is the result of an extensive inter-diffusion of Co and Ni, and that the nanoparticles are nickel oxide dissolving some Co. Sensor performance measurement unfolds that the surface modification results in a significant sensitivity enhancement, nearly 200% increase for toluene (at $250^{\circ}C$) and CO (at $200^{\circ}C$) gases in comparison with the undoped samples.

Keywords

Acknowledgement

Supported by : KEIT, KIAT, Ministry of Science, ICT and NST

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