Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Gas sensing characteristics of thin film SnO2 sensors with different pretreatments

예비 처리 방법에 따른 박막 SnO2 센서의 가스 감응 특성

  • Yun, Kwang-Hyun (Department of Materials Science and Metallurgy, Kyungpook National University) ;
  • Kim, Jong-Won (Department of Nano-sience and Technology, Kyungpook National University) ;
  • Rue, Gi-Hong (School of Electrical Engineering and Computer Science, Kyungpook National University) ;
  • Huh, Jeung-Soo (Department of Materials Science and Metallurgy, Kyungpook National University)
  • 윤광현 (경북대학교 금속공학과) ;
  • 김종원 (경북대학교 나노과학기술과) ;
  • 류기홍 (경북대학교 전자전기컴퓨터학부) ;
  • 허증수 (경북대학교 금속공학과)
  • Published : 2006.09.30
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Abstract

The $SnO_{2}$ thin film sensors were fabricated by a thermal oxidation method. $SnO_{2}$ thin film sensors were treated in $N_{2}$ atmosphere. The sensors with $O_{2}$ treatment after $N_{2}$ treatment showed 70 % sensitivity for 1 ppm $H_{2}S$ gas, which is higher than the sensors with only $O_{2}$ treatment. The Ni metal was evaporated on Sn thin film on the $Al_{2}O_{3}$ substrate. And the sensor was heated to grow the Sn nanowire in the tube furnace with $N_{2}$ atmosphere. Sn nanowire was thermally oxidized in $O_{2}$ environments. The sensitivity of $SnO_{2}$ nanowire sensor was measured at 500 ppb $H_{2}S$ gas. The selectivity of $SnO_{2}$ nanowire sensor compared with thin film and thick film $SnO_{2}$ was measured for $H_{2}S$, CO, and $NH_{3}$ in this study.

Keywords

References

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