• 전기학회논문지
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• 제63권2호
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• pp.250-256
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• 2014

In this study, we deposited and investigated ${\mu}c$-Si:H thin films prepared by Plasma Enhanced Chemical Vapor Deposition(PECVD) system. To deposition silicon thin films, we controlled $SiH_4$ gas concentration, RF input power, and heater temperature. According to the experiments, the more $SiH_4$ gas concentration increased, deposition rate also increased but crystalline property decreased at the same conditions. In the RF input power case, deposition rate and crystalline property increased together when the input power increased from 100[W] to 300[W]. If RF input power was 300[W], deposition rate has reached saturation point. In the heater temperature, deposition rate increased when heater temperature increased. Crystalline property maintained a certain level until heater temperature was $250[^{\circ}C]$. And then it was a suddenly increased. Multistep method has been proposed to improve the quality of ${\mu}c$-Si:H thin film. $SiH_4$ gas was injected with a time interval. According to the experiments, crystallite ratio improve about 20~60[%] and photo conductivity increased up to six times.

• 센서학회지
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• 제8권2호
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• pp.115-123
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• 1999

PSG(800nm)/$Si_3N_4$ (150nm)로 구성된 유전체 membrane 윗면에 heater와 감지전극을 등일면상에 동시에 형성하였다. 제작된 소자의 전체 면적은 $3.78{\times}3.78mm^2$이고, diaphragm의 면적은 $1.5{\times}1.5mm^2$이며, 감지막치 면적은 $0.24{\times}0.24mm^2$였다. 그리고 diaphragm내의 열분포 분석을 유한요소법을 이용하여 수행하였으며, 실제로 제작된 소자의 열분포와 비교하였다. 소비전력은 동작온도 $350^{\circ}C$에서 약 85mW였다. Sn 금속막을 상온과 $232^{\circ}C$의 두 가지 기판온도에서 열증착하였고, 이를 $650^{\circ}C$의 산소분위기에서 3시간 열산화함으로써 $SnO_2$ 감지막을 형성하였다. 그리고 이를 SEM과 XRD로 특성을 분석하였다. 제작된 소자에 대해서 온도 및 습도에 대한 감지막의 영향 및 부탄가스에 대한 반응특성도 조사하였다.

• 디지털산업정보학회논문지
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• 제13권4호
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• pp.41-48
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• 2017

It is necessary to develop an LED traffic light lens having a snow removal function capable of clearly providing a traffic signal to the driver even when a traffic light is blurred due to heavy snow and wind in the winter season. This study is focused on the research and development of the traffic light lens in the process of developing the LED traffic light with the snow removal function. In the developed traffic light lens, instead of attaching the film heater, the coated nichrome wire was wound into a coil shape and inserted directly into the groove in the lens. The developed heater system facilitates the insertion of the heating wire with high elasticity into a curved lens and can provide a sufficient heat without deformation of the PC lens. The proposed traffic lights were tested in various external environments and the test results showed that complete snow removal is possible without tunnel effect.

• 대한기계학회논문집A
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• 제29권4호
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• pp.526-533
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• 2005

Reliability problem in inkjet printhead, one of MEMS devices, is also very important. To eject an ink drop, the temperature of heater must be high so that ink contacting with surface reaches above $280^{o}C$ on the instant. Its heater is embedded in the thin multi-layer in which several materials are deposited. MEMS processes are the main sources of residual stresses development. Residual stress is one of the factors reducing the reliability of MEMS devices. We measured residual stresses of single layers that consist of multilayer. FE analysis is performed using design of experiment(DOE). Transient analysis for heat transfer is performed to get a temperature distribution. And then static analysis is performed with the temperature distribution obtained by heat transfer analysis and the measured residual stresses to get a stress distribution in the structure. Although the residual stress is bigger than thermal stress, thermal stress is more influential on fatigue life.

• Journal of Advanced Marine Engineering and Technology
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• 제28권2호
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• pp.243-251
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• 2004

Absorption chiller/heater can utilize the unused energy of the daily life waste heat, the industry waste heat. the solar energy and the earth energy. These can contribute to energy savings. But the absorption chiller/heater has a demerit that the size of absorption chiller/heater is larger than that of the vapor compression type based on same capacity. In this study. the experimental apparatus of an absorber is manufactured as a plate. which is newly applied in an absorber. The experimental apparatus is composed of a plate type absorber. which can increase the heat exchange area per unit volume and thus facilitating to deeply investigate more detail features instead of that done by the existing type. i.e.. horizontal tube bundle type. The characteristics of heat transfer and refrigeration capacity are studied experimentally. The absorption enhancement by using surfactant is closely examined through the experiment and comparative figures are presented in quantitative and qualitative analysis.

• Journal of Advanced Marine Engineering and Technology
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• 제30권5호
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• pp.597-607
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• 2006

This paper presents a numerical simulation of the behavior of the LiBr solution droplets and falling films in horizontal tube banks of absorber. The model developed here accounts for the details of the droplets formation and impact process for absorption on horizontal tubes including the heat transfer from solution film to the tube wall. Especially. the characteristic of unsteady behavior of solution flow has been investigated. Flow visualization studies shown that the solution droplets and falling films have some of the complex characteristics. It is found that. with the numerical conditions similar to the operating condition of an actual absorption chiller/heater, the outlet solution temperature and heat flux from solution film to the tube wall have a stable periodic behavior with time. The solution droplets and falling films in horizontal tube banks of absorber is a periodic unsteady flow. The results from this model are compared with previous experimental observation taken with a high-speed digital video camera and shown good agreement.

• Transactions on Electrical and Electronic Materials
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• 제13권1호
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• 센서학회지
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• 제5권6호
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• pp.51-59
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• 1996

실리콘기판과의 스트레스균형이 이루어진 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ 다이아프레임위에 백금 박막히터 및 Bi-Sb 열전대배열을 형성하여 히터에서 실리콘기판으로 전달되는 열량의 차단효과가 현저히 개선된 유체센서를 제작하였다. 백금 박막히터는 유전체 다이아프레임의 열차단 효과때문에 비선형 전류-전압 특성을 나타내었고, 이 히터의 저항온도계수는 약 $0.00378\;/^{\circ}C$였으며, 또한 Bi-Sb 열전대의 Seebeck계수는 약 $97\;{\mu}V/K$였다. 기체의 열전도도가 증가할수록 유체센서가 나타내는 열기전력은 감소하였으며, 히터온도가 증가하거나 히터와 열전대사이의 거리가 감소할수록 센서의 감도는 증가하였다. 히터전압을 약 2.5V로 하였을 때 유체센서의 $N_{2}$유량에 대한 감도는 약 $1.27\;mV{\cdot}(sccm)^{-1/2}$였고, 열응답시간은 약 0.13 초였다.

• 한국안전학회지
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• 제15권1호
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• pp.66-71
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• 2000

This paper presents a development of an electric hole cutter for agricultural polyethylen film. Mechanical hole cutter with blades and electrical hole cutters are being tried in products now. But Mechanical hole cutter systems have a few faults. So the hole cutter systems using electrical heater have mainly been developed and optimized. Computer aided engineering was introduced for the purpose of electric heated hole cutter being developed, because it helped reduce the unnecessary tests. Three types of heated cups were surveyed with MSC/Nastran, and the type of model C was most effective in heat transfer.

• 한국진공학회지
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• 제2권4호
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• pp.480-485
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• 1993

Factros considered building the magnetron sputtering system for TFT LCD (thin film transistor liquid crystal display0 metallization were thin film thichnes uniformity, temperature uniformity and the pressure gradient of sputtering gas flow in vacuum chamber, base pressure, and the stability fo the carrier moving . The system was consisted of a deposition chamber, a pre-heating chamber, a RF-precleaning chamber and a load/unload lock chamber. The system was designed to handle a substrate with dimension of 400$\times$400mm. The temperautre uniformity of a heater table developed showed $250 ^{\circ}C\pm$5% accuracyon the substrate glass. A base pressure of 1.8 $\times$10-7 torr was obtained after 24 hours pumping with a cryo pump. After an aluminum target was installed in a sputtering source and the film wa sdeposited on the glass, the uniformity, reflectivity and sheet resistance of the deposited film were measured.