Journal of Sensor Science and Technology (센서학회지)
- Volume 5 Issue 6
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- Pages.51-59
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- 1996
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Flow sensor using stress-balanced membrane and thin film thermocouple
스트레스균형이 이루어진 멤버레인 및 박막 열전대를 응용한 유체센서
- Ahn, Yeong-Bae (School of Electronic and Electrical Engineering, Kyungpook Nat'l University) ;
- Kim, Jin-Sup (Dept. of Electronic Engineering, Inje University) ;
- Kim, Myung-Gyoo (School of Electronic and Electrical Engineering, Kyungpook Nat'l University) ;
- Lee, Jong-Hyun (School of Electronic & Electrical Engineering, Kyungpook Nat'l University) ;
- Lee, Jung-Hee (School of Electronic and Electrical Engineering, Kyungpook Nat'l University)
- 안영배 (경북대학교 전자전기공학과) ;
- 김진섭 (인제대학교 전자공학과) ;
- 김명규 (경북대학교 전자전기공학과) ;
- 이종현 (경북대학교 전자전기공학과) ;
- 이정희 (경북대학교 전자전기공학과)
- Published : 1996.11.30
Abstract
A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-
실리콘기판과의 스트레스균형이 이루어진 150 nm-
Keywords