• Journal of the Microelectronics and Packaging Society
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• v.29 no.1
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• pp.43-47
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• 2022

In this study, we demonstrated an eco-friendly thin-metallic-film-based heater which can be operated in water. Based on the materials stability, Mo was selected as the heating element to secure long-term stability. Using a magnetron sputtering, 40 nm-thick Mo layers were deposited onto a glass substrate, followed by the deposition of 60-nm-thick ZnO layer to prevent oxidation during the heater fabrication process. Then, PVB (Polyvinyl Butyral) was applied on top of ZnO layer and an additional glass substrate was placed, which were heated at 150℃ for 2 hr. The PVB was cured with strong adhesion by the processing condition. We operated the Glass/Mo/ZnO/Glass heater in water, and it was shown that the water temperature reached 50℃ within 2 minutes, with a minimal resistance change of the heater. Finally, the heaters exhibit a semi-transparency, and this aesthetic advantage is expected to contribute to the added value of the heater.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.4
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• pp.483-493
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• 2006

A model for a pressure drop of water vapor flow across tube banks in a horizontal tube absorber of an absorption chiller/heater using LiBr solution as a working fluid has been developed based on a commercial 20RT(70kW) absorption chiller/heater. The numerical results show that the characteristic of the pressure drop in the shell side of the horizontal tube absorber is completely different from that in a conventional shell and tube heat exchanger. Especially, solution film thickness has significant influence on the vapor pressure drop in the horizontal tube absorber. In addition, the effects by the tube diameters, the longitudinal pitch to diameter ratio, and Reynolds number of the vapor flow, on the vapor pressure drop have been studied to evaluate the compactness of tube absorber. It was found that the vapor pressure drop decreases as tube diameter increases, the longitudinal pitch to diameter ratio increases, and Reynolds number of the vapor flow decreases. A comparison of the present study results with well-established experimental and numerical results showed a good overall agreement.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.178-182
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• 2008

Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.

• Journal of Sensor Science and Technology
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• v.13 no.1
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• pp.35-40
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• 2004

A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/$^{\circ}C$ and the voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.9
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• pp.1267-1275
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• 2002

An experimental study was performed to investigate adiabatic wall temperature and heat transfer coefficient around a module cooled by forced air flow. The flow angle of attack to the module were 0$^{\circ}$and 45$^{\circ}$. In the first method, inlet air flow(1~7m/s) and input power.(3, 5, 7W) were varied after a heated module was placed on an adiabatic floor(320$\times$550$\times$1㎣). An adiabatic wall temperature was determinated to use liquid crystal film. In the second method to determinate heat transfer coefficient, inlet air flow(1~7m/s) and the heat flux of rubber heater(0.031~0.062W/$m^2$) were varied after an adiabatic module was placed on rubber heater covering up an adiabatic floor. Additional information is visualized by an oil-film method of the surface flow on the floor and the module. Plots of $T_{ad}$ and $h_{ad}$ show marked effects of flow development from the module and dispersion of thermal wake near the module. Certain key features of the data set obtained by this investigation may serve as a benchmark for thermal-design codes based on CFD.

• Journal of Aerospace System Engineering
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• v.14 no.2
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• pp.28-35
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• 2020

In this paper, we present a design for a retraction-type actuator (ReACT) that has the characteristics of both thermomechanical metamaterials and displacement amplification mechanisms. The ReACT consists of an actuating bar, a diamond-shaped displacement amplification (DA) structure, and a slot for loading thin-film heaters formed through the actuating bar. When power is supplied to the thin film heater, the actuating bars contacting the heater thermally expand, and the diamond-shaped DA structures retract in the longitudinal direction. The performance characteristics of the ReACT, such as temperature distribution and retracting displacement, were calculated with thermomechanical analysis methods using the finite element method (FEM). Subsequently, the ReACTs were fabricated using a polymer-based 3D printer that can easily execute complex structures, and the performance of the ReACT was evaluated through repeated tests under various temperature conditions. The results of the performance evaluation were compared with the results of the FEM analysis.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.13-19
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• 2006

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.

• Journal of the Korean Society for Heat Treatment
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• v.36 no.3
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• pp.115-120
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• 2023

ZnO/Cu/ZnO (ZCZ) thin film deposited on the glass substrate with DC and RF magnetron sputtering was rapid thermal annealed (RTA) and then effect of thermal temperature on the opto-electical and transparent heater properties of the films were considered. The visible transmittance and electrical resistivity are depends on the annealing temperature. The electrical resistivity decreased from 1.68 × 10^-3 Ωcm to 1.18 × 10^-3 Ωcm and the films annealed at 400℃ show a higher transmittance of 78.5%. In a heat radiation test, when a bias voltage of 20 V is applied to the ZCZ film annealed at 400℃, its steady state temperature is about 70.7℃. In a repetition test, the steady state temperature is reached within 15s for all of the bias voltages.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.261-264
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• 1995

The response speed enhancement in picosecond photoconductor made from RF planar magnetron sputtered hydrogenated amorphous germanium thin film is discussed. Pulsed laser annealing technique was used to fabricate the highly conductive ohmic contacts and to remove the shallow deflects in the deposited photoconductive film using the different laser powers. Measured V-I curve showed -5 times bigger conductance in photoconductive gap than the one used by the conventional vacuum annealing method using strip heater.

• 한국초전도학회:학술대회논문집
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• v.13
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• pp.55-55
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• 2003