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http://dx.doi.org/10.6117/kmeps.2022.29.1.043

A Study on Glass/Mo/ZnO/Glass Thin-film-heaters for Water Heating  

Kim, Jiwoo (School of Advanced Materials Engineering, Dong-Eui University)
Choi, Dooho (School of Advanced Materials Engineering, Dong-Eui University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.29, no.1, 2022 , pp. 43-47 More about this Journal
Abstract
In this study, we demonstrated an eco-friendly thin-metallic-film-based heater which can be operated in water. Based on the materials stability, Mo was selected as the heating element to secure long-term stability. Using a magnetron sputtering, 40 nm-thick Mo layers were deposited onto a glass substrate, followed by the deposition of 60-nm-thick ZnO layer to prevent oxidation during the heater fabrication process. Then, PVB (Polyvinyl Butyral) was applied on top of ZnO layer and an additional glass substrate was placed, which were heated at 150℃ for 2 hr. The PVB was cured with strong adhesion by the processing condition. We operated the Glass/Mo/ZnO/Glass heater in water, and it was shown that the water temperature reached 50℃ within 2 minutes, with a minimal resistance change of the heater. Finally, the heaters exhibit a semi-transparency, and this aesthetic advantage is expected to contribute to the added value of the heater.
Keywords
Thin films; conductive electrodes; corrosion resistance; Joule heating;
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