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http://dx.doi.org/10.5369/JSST.2004.13.1.035

Fabrication and Characteristics of Chromel-Constantan Multijunction Thermal Converter with Evanohm R Alloy Heater  

Lee, Young-Hwa (Department of Material Engineering, Chungnam National University)
Kwon, Sung-Won (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science)
Kim, Kook-Jin (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science)
Park, Se-Il (Division of Electromagnetic Metrology, Korea Research Institute of Standards and Science)
Ihm, Young-Eon (Department of Material Engineering, Chungnam National University)
Publication Information
Journal of Sensor Science and Technology / v.13, no.1, 2004 , pp. 35-40 More about this Journal
Abstract
A thin-film multijunction thermal converter was fabricated through the process using 6 inch silicon wafer semiconductor process and bulk micromachining. Evanohm R alloy and chromel-constantan were used as a heater and thermocouple materials, respectively. The temperature coefficient of resistance of Evanohm R heater was about 75.12 ppm/$^{\circ}C$ and the voltage sensitivity of the thermal converter indicated about 5.75 mV/mW in air. The transfer differences, measured by FRDC-DC method in the frequency range from 20 Hz to 10 kHz, showed the value under about 1.36 ppm, 0.83 ppm for the film thickness of 500, 200 nm, respectively. And in case of a 200 nm-thick thermal converter, the AC-DC transfer differences seems to be stabilized below the value of 1 ppm in the frequency range from 1 kHz to 500 kHz.
Keywords
thermal converter; voltage sensitivity; FRDC-DC; AD-DC;
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