• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.2
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• pp.252-261
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• 2014

A Bayesian network (BN) based fault diagnosis framework for semiconductor etching equipment is presented. Suggested framework contains data preprocessing, data synchronization, time series modeling, and BN inference, and the established BNs show the cause and effect relationship in the equipment module level. Statistically significant state variable identification (SVID) data of etch equipment are preselected using principal component analysis (PCA) and derivative dynamic time warping (DDTW) is employed for data synchronization. Elman's recurrent neural networks (ERNNs) for individual SVID parameters are constructed, and the predicted errors of ERNNs are then used for assigning prior conditional probability in BN inference of the fault diagnosis. For the demonstration of the proposed methodology, 300 mm etch equipment model is reconstructed in subsystem levels, and several fault diagnosis scenarios are considered. BNs for the equipment fault diagnosis consists of three layers of nodes, such as root cause (RC), module (M), and data parameter (DP), and the constructed BN illustrates how the observed fault is related with possible root causes. Four out of five different types of fault scenarios are successfully diagnosed with the proposed inference methodology.

• International Journal of Fuzzy Logic and Intelligent Systems
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• v.9 no.2
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• pp.99-104
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• 2009

The turn-to-turn short is one major fault of the motor faults of BLDC motors and can appear frequently. When the fault happens, the motor can be operated without breakdown, but it is necessary to maintain the motor for continuous working. In past research, several methods have been applied to detect winding faults. The representative approaches have been focusing on current signals, which can give important information to extract features and to detect faults. In this study, current sensors were installed to measure signals for fault detection of BLDC motors. In this study, the Park's vector method was used to extract the features and to isolate the faults from the current measured by sensors. Because this method can consider the three-phase current values, it is useful to detect features from one-phase and three-phase faults. After extracting two-dimensional features, the final feature was generated by using the two-dimensional values using the distance equation. The values were used in fuzzy similarity to isolate the faults. Fuzzy similarity is an available tool to diagnose the fault without model generation and the fault was converted to the percentage value that can be considered as possibility of the fault.

• Proceedings of the KIEE Conference
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• 2008.04a
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• pp.228-229
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• 2008

This paper presents stochastic methodology based fault diction and diagnosis algorithm for induction motor systems. First, we construct probability distribution model from healthy motors and then probability distribution for faulty motors is recursively calculated by means of the proposed probability estimation. We measure motor current with hall sensors as system state. The estimated probability is compared to the model to generate a residue signal which is utilized for fault detection and diagnosis, that is, where a fault is occurred. We carry out real-time induction motor experiment to evaluate efficiency and reliability of the proposed approach.

• Proceedings of the KIEE Conference
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• 2008.04b
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• pp.171-173
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• 2008

This paper presents stochastic methodology based fault diction and diagnosis algorithm for induction motor systems. First, we construct probability distribution model from healthy motors and then probability distribution for faulty motors is recursively calculated by means of the proposed probability estimation. We measure motor current with hall sensors as system state. The estimated probability is compared to the model to generate a residue signal which is utilized for fault detection and diagnosis, that is, where a fault is occurred. We carry out real-time induction motor experiment to evaluate efficiency and reliability of the proposed approach.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1503-1504
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• 2008

This paper presents stochastic methodology based fault diction and diagnosis algorithm for induction motor systems. First, we construct probability distribution model from healthy motors and then probability distribution for faulty motors is recursively calculated by means of the proposed probability estimation. We measure motor current with hall sensors as system state. The estimated probability is compared to the model to generate a residue signal which is utilized for fault detection and diagnosis, that is, where a fault is occurred. We carry out real-time induction motor experiment to evaluate efficiency and reliability of the proposed approach.

• The Journal of the Korea institute of electronic communication sciences
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• v.11 no.1
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• pp.59-64
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• 2016

This paper aims at the prototype-making of the intelligent switchgear with arc fault diagnosis function required to prevent the electrical fire. The main control unit of the intelligent switchgear consists of a single-phase power management device and a arc fault diagnosis device. The prototype of the single-phase power management device and the prototype of the arc fault diagnosis device in this paper. In the device, the cooperation function with the arc fault diagnosis device is developed to transmit the cause of the electrical fire to the remote server system.

• IEMEK Journal of Embedded Systems and Applications
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• v.19 no.1
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• pp.57-64
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• 2024

In the industrial field, robots are used to increase productivity by replacing labors with dangerous, difficult, and hard tasks. However, failures of individual industrial robots in the entire production process may cause product defects or malfunctions, and may cause dangerous disasters in the case of manufacturing parts used in automobiles and aircrafts. Although requirements for early diagnosis of industrial robot failures are steadily increasing, there are many limitations in early detection. This paper introduces methods for diagnosing robot failures using sound-based data and deep learning. This paper also analyzes, compares, and evaluates the performance of failure diagnosis using various deep learning technologies. Furthermore, in order to improve the performance of the fault diagnosis system using deep learning technology, we propose a method to increase the accuracy of fault diagnosis based on an inference window. When adopting the inference window of deep learning, the accuracy of the failure diagnosis was increased up to 94%.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.11
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• pp.1758-1764
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• 2012

A large number of wire rope has been used in various inderstiries as Cranes and Elevators from expanding the scale of the industrial market. But now, the management of wire rope is used as manually operated by rope replacement from over time or after the accident.It is caused to major accidents as well as economic losses and personal injury. Therefore its time to need periodic fault diagnosis of wire rope or supply of real-time monitoring system. Currently, there are several methods has been reported for fault diagnosis method of the wire rope, to find out the feature point from extracting method is becoming more common compared to time wave and model-based system. This method has implemented a deterministic modeling like the observer and neural network through considering the state of the system as a deterministic signal. However, the out-put of real system has probability characteristics, and if it is used as a current method on this system, the performance will be decreased at the real time. And if the random noise is occurred from unstable measure/experiment environment in wire rope system, diagnostic criterion becomes unclear and accuracy of diagnosis becomes blurred. Thus, more sophisticated techniques are required rather than deterministic fault diagnosis algorithm. In this paper, we developed the fault diagnosis of the wire rope using probability density estimation techniques algorithm. At first, The steady-state wire rope fault signal detection is defined as the probability model through probability distribution estimate. Wire rope defects signal is detected by a hall sensor in real-time, it is estimated by proposed probability estimation algorithm. we judge whether wire rope has defection or not using the error value from comparing two probability distribution.

• The Journal of the Korea institute of electronic communication sciences
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• v.5 no.4
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• pp.443-449
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• 2010

Current testing is an effective method which offers higher fault detection and diagnosis capabilities than voltage testing. Since current testing requires much longer testing time than voltage testing, it is important to note that a fault is untestable if the two nodes have same values at all times. In this paper, we present an object oriented fault detection scheme for various fault models using current testing. Experimental results for ISCAS benchmark circuits show the effectiveness of the proposed method in reducing the number of faults and its usefulness in various fault models.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.51 no.6
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• pp.241-251
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• 2002

The effect of sensor faults in direct torque control(DTC) based induction motor drives is analyzed and a new Instrument fault detection isolation scheme(IFDIS) is proposed. The proposed IFDIS, which operated in real-time, detects and isolates the incipient fault(s) of speed sensor and current sensors that provide the feedback information. The scheme consists of an adaptive gain scheduling observer as a residual generator and a special sequential test logic unit. The observer provides not only the estimate of stator flux, a key variable in DTC system, but also the estimates of stator current and rotor speed that are useful for fault detection. With the test logic, the IFDIS has the functionality of fault isolation that only multiple estimator based IFDIS schemes can have. Simulation results for various type of sensor faults show the detection and isolation performance of the IFDIS and the applicability of this scheme to fault tolerant control system design.