• International Journal of Quality Innovation
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• v.8 no.2
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• pp.132-146
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• 2007

Constructing an effective production control policy is the most important issue in wafer fabrication factories. Most of researches focus on the input regulations of wafer fabrication. Although many of these policies have been proven to be effective for wafer fabrication manufacturing, in practical, there is a need to help operators decide which lots should be pulled in the right time and to develop a systematic way to alleviate the long queues at the bottleneck workstation. The purpose of this study is to construct a photolithography workstation dispatching rule (PADR). This dispatching rule considers several characteristics of wafer fabrication and influential factors. Then utilize the weights and threshold values to design a hierarchical priority rule. A simulation model is also constructed to demonstrate the effect of the PADR dispatching rule. The PADR performs better in throughput, yield rate, and mean cycle time than FIFO (First-In-First-Out) and SPT (Shortest Process Time).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1885-1888
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• 2003

As high technology industries such as IT and display have developed, demand for application parts of micro lens and lens array has been extremely increasing. According to these trends, many researchers are studying on the fabrication technology for parts of the micro lens by a variety of methods such as MEMS, Lithography, LIGA and so on. In this paper, we have performed researches related to ultra precision micro lens, lens array mold and fabrication of Lenticular lens mold for three-dimensional display by using mechanical micro end-milling and fly-cutting fabrication method. Tools used in this research were a diamond tool of R 150$\mu\textrm{m}$. Cutting conditions set up feed rate, spindle revolution. depth of cut and dwell time as variables. And we analyzed surface quality variation of the processed products according to the cutting conditions, and then carried out experiments to search the optimum conditions. Through this research, we have confirmed that we can fabricate the ultra precision micro lens mold with surface roughness Ra=20nm and the holographic lens mold by using micro end-milling and fly-cutting fabrication method. Furthermore, we demonstrated problems happened in the fabrication of the micro lens and established the foundation of experimental study for formulating its improvement plan.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.138-143
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• 2007

Microstereolithography technology is similar to the conventional stereolithography process and enables to fabricate a complex 3D microstructure. This is divided into scanning and projection type according to aiming at precision and fabrication speed. The scanning MSL fabricates each layer using position control of laser spot on the resin surface, whereas the projection MSL fabricates one layer with one exposure using a mask. In the projection MSL, DMD used to generate dynamic pattern consists of $1024{\times}768$ micromirrors which have $13.68{\mu}m$ per side. The fabrication range and resolution are determined by the field of view of the DMD and the magnification of the projection lens. If using the projection lens with high power, very fine microstructures can be fabricated. In this paper, the projection MSL system adapted to a large surface for array-type fabrication is presented. This system covers the meso range, which is defined as the intermediate range between micro and macro, with a resolution of a few ${\mu}m$. The fabrication of array-type microstructures has been demonstrated to verify the performance of implemented system.

• Composites Research
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• v.31 no.4
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• pp.171-176
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• 2018

We proposed new and easy fabrication method of micro-nano hierarchical structures for synthetic dry adhesives and conducted feasibility tests of alignment characteristics of nano-materials in the microstructures by capillary effect. Candidates of fabrication conditions were selected based on the degree of cure and viscosity of mixtures of multiwall carbon nanotubes (MWCNTs) and polydimethylsiloxane (PDMS), which were measured with respect to the fabrication conditions. Scanning electron microscopy images of cross sections of MWCNT-PDMS microstructures were analyzed. MWCNT alignment in microstructures was better when fabrication temperature and degree of cure at fabricating start were lower, but areal density of MWCNTs was little affected by fabrication conditions.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.75-78
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• 2002

SFFS(Solid Freeform Fabrication System) is commercializing to rapid prototyping concept in world-wide some corporations including the States, have much technological problems yet and need new mode for agile solid freeform fabrication as well as prototyping. In this paper, we design an automatic control algorithm that the cutting path of laser beam, on the SFFS, is controlled with constant speed. The designed algorithm for constant-speed path control is implemented and experimented in the $CAFL^{VM}$ (Computer Aided Fabrication of Lamination for Various Material) system, the new SFFS which is developed in this paper. Its process is an automated fabrication method in which a 3D object is constructed from STL(SToreoLithography) 2D data, derived from CAD 3D image, by sequentially laminating the part cross-sections. The constant-speed path control is started from the STL data. After STL file is modified in data format to be available for control. The fabrication of the 2D part is, with constant speed, conducted from the 23 position data by laser beam. we confirm its high-performance through experiment results from the application into $CAFL^{VM}$ system.

• Journal of Research and Publication Ethics
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• v.1 no.2
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• pp.7-10
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• 2020

Purpose: The experience by a researcher highlighted steps is guided by a specific ethical codes of conduct. The purpose of the current study is to discuss the fabrication and falsification of data as the key ethical misconduct committed by many researchers focus on their causes and impact in the research field. Research design, data and methodology: To obtain suitable textual resource, the current study used content analysis to closely take a look at the fabrication and falsification based on prior research in the realm of publication ethics. As a result, the current authors could collect and understand adequate textual data from appropriate prior resources. Results: The Research misconduct is a common practice in different countries across the world. Based on the findings from this study, data fabrication or falsification have a grievous impact on all the stakeholders of a study. The unethical behavior affects the parties concerned both psychologically and financially. Conclusions: It is, therefore, recommended that researchers should be held accountable. This can be done through different means, including raising awareness of vulnerability to data fabrication and falsification. The government and research institute should also advocate for effective policies guiding research studies across the world.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.10
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• pp.552-557
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• 2015

The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.138-144
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• 2008

Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.205-208
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• 2005

Fabrication of large scaled mirror for the telescope application is the most challenging technology in recent year. Sophisticate technologies and know-how in fabrication and measurement are required to overcome the technological obstacles. KRISS(Korea Research Institute for Standards and Science) is now developing a large scaled mirror fabrication facility and KARI(Korea Aerospace Research Institute) is supporting the development. High precision interferometric test is required during the grinding and polishing of mirror to identify the surface profile precisely. The required fabrication accuracy of the mirror surface profile is $\lambda$/50 ms($\sim$10 nm for visible wave length). Thus the measurement accuracy should be far less than 10 m. To get this requirement, it is necessary to provide vibration free environment for the interferometer system and mirror under test. Thus the vibration responses on the mirror supporting table due to external vibration should be minimized by using a special isolation system. And the responses on the top of the tower, which hold the interferometer during test, should be minimized simultaneously. In this paper, we propose the concept design of vibration suppression system for the KRISS mirror fabrication facility.

• Current Optics and Photonics
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• v.4 no.6
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• pp.509-515
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• 2020

A practical single photon source for fiber-based quantum information processing is still lacking. As a possible 1.55-㎛ quantum-dot single photon source, an InGaAsP/InP-air-aperture micropillar cavity is investigated in terms of fabrication tolerance. By properly modeling the processing uncertainty in layer thickness, layer diameter, surface roughness and the cavity shape distortion, the fabrication imperfection effects on the cavity quality are simulated using a finite-difference time-domain method. It turns out that, the cavity quality is not significantly changing with the processing precision, indicating the robustness against the imperfection of the fabrication processing. Under thickness error of ±2 nm, diameter uncertainty of ±2%, surface roughness of ±2.5 nm, and sidewall inclination of 0.5°, which are all readily available in current material and device fabrication techniques, the cavity quality remains good enough to form highly efficient and coherent 1.55-㎛ single photon sources. It is thus implied that a quantum dot contained InGaAsP/InP-air-aperture micropillar cavity is prospectively a practical candidate for single photon sources applied in a fiber-based quantum information network.