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Fabrication of Microstructure Array using the Projection Microstereolithography System  

Choi, Jae-Won (부산대학교 기계기술연구소)
Ha, Young-Myoung (부산대학교 기계기술연구소)
Lee, Seok-Hee (부산대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.8, 2007 , pp. 138-143 More about this Journal
Abstract
Microstereolithography technology is similar to the conventional stereolithography process and enables to fabricate a complex 3D microstructure. This is divided into scanning and projection type according to aiming at precision and fabrication speed. The scanning MSL fabricates each layer using position control of laser spot on the resin surface, whereas the projection MSL fabricates one layer with one exposure using a mask. In the projection MSL, DMD used to generate dynamic pattern consists of $1024{\times}768$ micromirrors which have $13.68{\mu}m$ per side. The fabrication range and resolution are determined by the field of view of the DMD and the magnification of the projection lens. If using the projection lens with high power, very fine microstructures can be fabricated. In this paper, the projection MSL system adapted to a large surface for array-type fabrication is presented. This system covers the meso range, which is defined as the intermediate range between micro and macro, with a resolution of a few ${\mu}m$. The fabrication of array-type microstructures has been demonstrated to verify the performance of implemented system.
Keywords
Array-type micro fabrication; Digital Micromirror Device (DMD); Microstereolithography (MSL);
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Times Cited By KSCI : 1  (Citation Analysis)
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1 Varadan, V. K., Jiang, X. and Varadan, V. V., 'Microstereolithography and other Fabrication Techniques for 3D MEMS,' Wiley, 2001
2 Ikuta, K. and Hirowatari, K., 'Real Three Dimensional Micro Fabrication Using Stereo Lithography and Metal Molding,' Proceedings of IEEE MEMS'93, pp. 42-47, 1993
3 Bertsch, A., Zissi, S., Jezequel, J. Y, Corbel, S. and Andre, J. C., 'Microstereophotolithography using a liquid crystal display as dynamic mask-generator,' Microsystem Technologies, Vol. 3, No. 2, pp. 42-47, 1997   DOI
4 Choi, J. W., Ha, Y. M., Won, M. H., Choi, K. H. and Lee, S. H., 'Fabrication of 3-Dimensional Microstructures using Dynamic Image Projection,' Proceeding of the 1st International Conference on Precision Engineering and Micro/Nano Technology in Asia, pp. 472-476, 2005
5 Choi, J. W., Ha, Y. M., Lee, S. H. and Choi, K. H., 'Fabrication of 3-Dimensional Microstructures using Digital Micromirror Device,' Journal of KSPE, Vol. 23, No. 11, pp. 116-125, 2006   과학기술학회마을
6 Bertsch, A., Bernhard, P., Vogt, C. and Renaud, P., 'Rapid prototyping of small size objects,' Rapid Prototyping Journal, Vol. 6, No.4, pp. 259-266, 2000   DOI   ScienceOn
7 Limaye, A. S., 'Design and Analysis of a Mask Projection Micro-stereolithography System,' M.S. Thesis, Georgia Institute of Technology, 2004
8 Sun, C., Fang, N., Wu, D. M. and Zhang, X., 'Projection micro-stereolithography using digital micro-mirror dynamic mask,' Sensors and Actuators A: Physical, Vol. 121, Issue 1, pp. 113-120, 2005   DOI   ScienceOn
9 Ikuta, K., Ogota, T., Tsubio, M. and Kojima, S. 'Development of mass productive micro stereo lithography,' Proceedings of the 8th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'96), pp. 301-306, 1996
10 Choi, J. W., 'Development of Projection-based Microstereolithography Apparatus Adapted to Large Surface and Microstructure Fabrication for Human Body Application,' Ph. D. Dissertation, Pusan National University, 2007
11 Zhang, X., Jiang, X. N. and Sun, C., 'Microstereolithography of polymeric and ceramic microstructures,' Sensors and Actuators A, Vol. 77, pp. 149-156. 1999   DOI   ScienceOn
12 Lee, I. H. and Cho, D. W., 'An Investigation on Photopolymer Solidification Considering Laser Irradiation Energy in Micro-stereolithography,' Microsystem Technologies, Vol. 10, No.8, pp. 592-598, 2004   DOI