The investigation of ITO thin film prepared by Facing Targets Sputtering (FTS) by Bending (대향 타겟식 스퍼터링으로 증착한 ITO 박막의 Bending에 의한 특성 분석)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2007.11a
- /
- pp.438-439
- /
- 2007