• Title/Summary/Keyword: FIB process

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Analysis of Residual Stresses at Manufacturing Precesses for Microaccelerometer Sensors (미소가속도계 센서의 제조공정에서 잔류응력 해석)

  • 김옥삼
    • Journal of Advanced Marine Engineering and Technology
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    • v.25 no.3
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    • pp.631-635
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    • 2001
  • The major problems associated with the manufacturing processes of the microaccelerometer based on the tunneling current concept is the residual stress. This paper deals with finite element analysis of residual stress causing pop up phenomenon which are induced in micromachining processes for a microaccelerometers sensor using silicon on insulator(SOI) wafer. After heating the tunnel gap up to $100^{\circ}C$and get it through cooling process and the additional beam up to $80^{\circ}C$get it through the cooling process. We learn the residual stress of each shape and compare the results with each other, after heating the tunnel gap up to $400^{\circ}Cduring$ the Pt deposition process. The equivalent stresses produced during the heating process of focused ion beam(FIB) cut was also to be about $0.02~0.25Pa/^{\circ}C$and cooling process the gradient of residual stresses of about $8.4\{times}10^2Pa/{\mu}m$ still at cantilever beam and connected part of paddle. We want to seek after the real cause of this pop up phenomenon and diminish this by change manufacturing processes of microaccelerometer sensors.

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Stabilization of Nanoemulsion Using PEG-free Surfactant (PEG-free 계면활성제를 사용한 Nanoemulsion의 안정화)

  • Kim, Huiju;Jung, Taek Kyu;Kim, Ja Young;Yoon, Kyung-Sup
    • Journal of the Korean Applied Science and Technology
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    • v.36 no.2
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    • pp.434-447
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    • 2019
  • Polyethylene glycol (PEG) is widely used in cosmetics as a surfactant, detergent and emulsifier. During the manufacturing process, 1,4-dioxane, which is toxic to humans, can be produced as a by-product by dimerization of ethylene oxide. As consumers' interest in cosmetic ingredients has increased, the need for safe emulsion research without PEG ingredients in the personal care market has increased. With increasing consumer interest in cosmetic ingredients, the need for safer emulsion research without the PEG ingredient in the personal care market has increased. In this study, we aimed to develop and stabilize nanoemulsion formulation without PEG. Response Surface Methodology (RSM) was used to develop optimized nanoemulsion formulations. Surfactant content (2~4%), oil content (4~8%) and polyol content (12~24%) were set as independent variables as a result of preliminary experiments for determining independent variables and ranges. The particle size, zeta potential, turbidity, and polydispersity index of the formulation were measured as response variables. As a result of measurement of the prepared nanoemulsion by FIB (Focused ion beam), spherical particles were found to have a size distribution of 100 to 200 nm. The stability of each formulation was evaluated for 30 days at each temperature ($4^{\circ}C$, $25^{\circ}C$, and $45^{\circ}C$). The optimal formulation considering the optimum particle size, turbidity, polydispersity index and zeta potential was found to be surfactant (2%), oil (8%) and polyol (24%).

Stabilization of Tocopheryl Acetate of Swollen Micelle by Poloxamer (Poloxamer를 이용한 Swollen Micelle의 Tocopheryl Acetate 안정화)

  • Kim, Mi-Seon;Yoon, Kyung-Sup
    • Journal of the Korean Applied Science and Technology
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    • v.36 no.2
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    • pp.609-622
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    • 2019
  • When the surfactant is dissolved in an aqueous solution, it forms aggregate called micelles (<20 nm) in the solution, and micelles can form the solubilized formulation by supporting the active ingredient therein. Swollen micelles are formulations capable of carrying larger amounts of active ingredient than conventional solubilized formulations at 50~100 nm. Unlike liposomes or nanoemulsions, which require a separate process such as high pressure emulsification, Swollen micelle is a more efficient method of solubilization and particle formation from a productive point of view. In this study, stabilization experiments on swollen micelle formulations were carried out using poloxamer 407, and then optimized formulation experiments for tocopheryl acetate components were performed using Response Surface Methodology (RSM). Tocopheryl acetate, a surfactant that affects solubilization and an active substance, were set as a factor and the correlation between them was confirmed. As the evaluation method, stability and particle size distribution and size were confirmed by temperature and time, and the structure and shape of the swollen micelle carrying the active ingredient were confirmed by FIB. These results show that poloxamer 407 0.500%, octyldodeceth-16 0.387% and tocopheryl acetate 0.945% are the most optimized prescriptions for swollen micelle stabilized with tocopheryl acetate.

Interfacial Reaction of Ag Bump/Cu Land Interface for B2it Flash Memory Card Substrate (B2it 플래시 메모리 카드용 기판의 Ag 범프/Cu 랜드 접합 계면반응)

  • Hong, Won-Sik;Cha, Sang-Suk
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.67-73
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    • 2012
  • After flash memory card(FMC) was manufactured by $B^2it$ process, interfacial reaction of silver bump with thermal stress was studied. To investigate bonding reliability of Ag bump, thermal shock and thermal stress tests were conducted and then examined on the crack between Cu land and Ag bump interface. Diffusion reaction of Ag bump/Cu land interface was analyzed using SEM, EDS and FIB. The Ag-Cu alloy layer due to the interfacial reaction was formed at the Ag/Cu interface. As the diffusivity of Ag ${\rightarrow}$ Cu is faster than Cu ${\rightarrow}$ Ag, a lot of (Cu, Ag) alloy layers were observed at the Cu layer than Ag. These alloy layers contributed to increase the Cu-Ag bonding strength and its reliability.

An investigation on dicing 28-nm node Cu/low-k wafer with a Picosecond Pulse Laser

  • Hsu, Hsiang-Chen;Chu, Li-Ming;Liu, Baojun;Fu, Chih-Chiang
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.4
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    • pp.63-68
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    • 2014
  • For a nanoscale Cu/low-k wafer, inter-layer dielectric (ILD) and metal layers peelings, cracks, chipping, and delamination are the most common dicing defects by traditional diamond blade saw process. Sidewall void in sawing street is one of the key factors to bring about cracks and chipping. The aim of this research is to evaluate laser grooving & mechanical sawing parameters to eliminate sidewall void and avoid top-side chipping as well as peeling. An ultra-fast pico-second (ps) laser is applied to groove/singulate the 28-nanometer node wafer with Cu/low-k dielectric. A series of comprehensive parametric study on the recipes of input laser power, repetition rate, grooving speed, defocus amount and street index has been conducted to improve the quality of dicing process. The effects of the laser kerf geometry, grooving edge quality and defects are evaluated by using scanning electron microscopy (SEM) and focused ion beam (FIB). Experimental results have shown that the laser grooving technique is capable to improve the quality and yield issues on Cu/low-k wafer dicing process.

Production and Properties of Amorphous TiCuNi Powders by Mechanical Alloying and Spark Plasma Sintering

  • Kim, J.C.;Kang, E.H.;Kwon, Y.S.;Kim, J.S.;Chang, Si-Young
    • Journal of Powder Materials
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    • v.17 no.1
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    • pp.36-43
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    • 2010
  • In present work, amorphous TiCuNi powders were fabricated by mechanical alloying process. Amorphization and crystallization behaviors of the TiCuNi powders during high-energy ball milling and subsequent microstructure changes were studied by X-ray diffraction and transmission electron microscope. TEM samples were prepared by the focused ion beam technique. The morphology of powders prepared with different milling times was observed by field-emission scanning electron microscope and optical microscope. The powders developed a fine, layered, homogeneous structure with milling times. The crystallization behavior showed that glass transition, $T_g$, onset crystallization, $T_x$, and super cooled liquid range ${\Delta}T=T_x-T_g$ were 628, 755 and 127K, respectively. The as-prepared amorphous TiCuNi powders were consolidated by spark plasma sintering process. Full densified TiCuNi samples were successfully produced by the spark plasma sintering process. Crystallization of the MA powders happened during sintering at 733K.

Fabrication of Nano-Size Specimens for Tensile Test Employing Nano-Indentation Device (나노 인장시험을 위한 압축 시험기용 인장시편 제작에 관한 연구)

  • Lim, Tae Woo;Yang, Dong-Yol
    • Journal of the Korean Society for Precision Engineering
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    • v.32 no.10
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    • pp.911-916
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    • 2015
  • In the nano/micro scale, material properties are dependent on the size-scale of a structure. However, conventional micro-scale tensile tests have limitations to obtain reliable values of nano-scale material properties owing to residual stress and elastic slippage in the gripping/aligning process. The indenter-driven nano-scale tensile test provides prominent advantages simple testing device, high-quality nano-scale metallic specimen with negligible residual stress. In this paper, two-types of specimens (a specimen with multi-testing parts and a specimen with a single-testing part) are discussed. Focused ion beam (FIB) is employed to fabricate a nano-scale specimen from a thin nickel film. Using the specimen with a single-testing part, we obtained a nano-scale stress-strain curve of electroplated nickel film.

Interpreting Conservativeness in Design Criteria for Flexural Strengthening of RC Structures Using Externally Bonded FRP

  • Kansara, Kunal D.;Ibell, Tim J.;Darby, Antony P.;Evernden, Mark
    • International Journal of Concrete Structures and Materials
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    • v.4 no.1
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    • pp.25-36
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    • 2010
  • This paper presents the influence of various flexural strengthening design criteria specified by three important design guidelines (ACI440, TR55, FIB14) on the resulting strength, ductility and conservativeness of FRP strengthened RC elements. Various generalised mathematical relations in non-dimensional form are presented that can be employed to develop design aids for the FRP-strengthening process. A design methodology is prescribed based on these equations enabling the designer to optimally and intuitively incorporate sufficient ductility while designing for strength. In order to better interpret conservativeness within design codes, four distinct levels of embedded conservativeness are identified, which cover the entire range of sources of conservativeness. Finally, a detailed parametric study is presented, using the proposed design equations and methodology, to determine the influence of each of these four levels of conservativeness on final design solutions. Specific criteria that are useful while calibrating design guidelines are also presented.

Study on the bainitic microstructure in low carbon HSLA steels (저탄소.저합금 강의 베이나이트 미세 구조 연구)

  • Kang, J.S.;Ahn, S.S.;Yoo, J.Y.;Park, C.G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.154-157
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    • 2007
  • The austenite phase observed in low carbon HSLA steels is well known to be decomposed to various bainitic microstructures, such as granular bainite, acicular ferrite and bainitic ferrite during continuous cooling process. These bainitic microstructures have been usually identified by using either scanning electron microscope (SEM) or transmission electron microscope (TEM). However, SEM and TEM images do no exactly coincide, because of the quite different sample preparation method in SEM and TEM observations. These conventional analysis method is, thus, not suitable for characterization of the complex bainitic microstructure. In this study, focused ion beam (FIB) technique was applied to make site-specific TEM specimens and to identify the 3-dimensional grain morphologies of the bainitic microstructure. The morphological feature and grain boundary characteristics of each bainitic microstructure were exactly identified.

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Structure and Electron Emission Properties of CN Nanostructures Obtained by HIP Apparatus (HIP에 의해 합성된 CN nanostructures의 구조 및 전계방출 특성)

  • 오정근;이양두;문승일;양석현;이윤희;김남수;주병권
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.8
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    • pp.723-730
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    • 2003
  • The CN(carbon nitrogen) nanofibers were formed by HIP(high isostatic pressure) process. From the field emission measurement, CN nanofibers shows an excellent characteristics of emitter, better than CNTs and carbon nanofibers. The structures obtained can be divided into three groups : bamboo-like fibers, corrugated structures and bead necklace-like fib res. Emission properties of CN nanofibers were investigated for spacing, between anode and cathode, variation. Turn-on fields was 1.4 v/$\mu\textrm{m}$. The time reliability and light emission test were carried out for about 100 hours. We suggest that CN nanofibers can be possibly applied to the high brightness flat lamp because of low turn-on field and time reliability