• Title/Summary/Keyword: Energy extraction

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The surface kinetic properties of $ZrO_2$ Thin Films in dry etching by Inductively Coupled Plasma

  • Yang-Xue, Yang-Xue;Kim, Hwan-Jun;Kim, Dong-Pyo;Um, Doo-Seung;Woo, Jong-Chang;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.105-105
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    • 2009
  • $ZrO_2$ is one of the most attractive high dielectric constant (high-k) materials. As integrated circuit device dimensions continue to be scaled down, high-k materials have been studied more to resolve the problems for replacing the EY31conventional $SiO_2$. $ZrO_2$ has many favorable properties as a high dielectric constant (k= 20~25), wide band gap (5~7 eV) as well as a close thermal expansion coefficient with Si that results in good thermal stability of the $ZrO_2/Si$ structure. In order to get fine-line patterns, plasma etching has been studied more in the fabrication of ultra large-scale integrated circuits. The relation between the etch characteristics of high-k dielectric materials and plasma properties is required to be studied more to match standard processing procedure with low damaged removal process. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ included in the gas due to the effective extraction of oxygen in the form of $BCl_xO_y$ compound In this study, the surface kinetic properties of $ZrO_2$ thin film was investigated in function of Ch addition to $BCl_3/Ar$ gas mixture ratio, RF power and DC-bias power based on substrate temperature. The figure 1 showed the etch rate of $ZrO_2$ thin film as function of gas mixing ratio of $Cl_2/BCl_3/Ar$ dependent on temperature. The chemical state of film was investigated using x-ray photoelectron spectroscopy (XPS). The characteristics of the plasma were estimated using optical emission spectroscopy (OES). Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

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Influence of New Town Development on the Urban Heat Islands - ln the Case of Pan-Gyo Area and Bun-Dang New Town - (신도시 개발이 도시열섬 형성에 미치는 영향 - 분당신도시와 판교지역을 중심으로 -)

  • 송영배
    • Journal of the Korean Institute of Landscape Architecture
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    • v.30 no.4
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    • pp.37-46
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    • 2002
  • The main purpose of this research is to discuss the urban heat island which will be caused by urbanization, especially by the construction of new town on a wide green zone. Over the last ten years, five new towns have been developed around the Seoul metropolitan area. However these new towns become bedroom communities and create traffic problems between Seoul and its surrounding areas because of an increase in population and a lack of roads and other infrastructures. The construction of another such new town is under consideration in the Pan-gyo area. But it is important that Pan-gyo remains a wide green zone. Many studies show that green space can play an important role in improving urban eco-meteorological, ameliorative capability and air hygiene. The objective of this study is to analyze the urban heat islands of Bund-Dang Si which was constructed in 1996 and of the Pan-Gyo area planned as new town. To investigate the local thermal environment and its negative effects caused by change of the land use type and urbanization we used LANDSAT TM images for extraction of urban surface temperature according to change of land use over 15 years. These data were analyzed together with digital land use and topographic data. As a study result, we found that the thermal island of this area from 1985 to 1999 rapidly increased with a difference of mean temperature of more than 12'E. Before construction of Bun-Dang Si the temperature of this area was the same as the forest, but during the new town construction in 1991, an urban heat island developed. The temperature of forest with a size of over 50% of the investigation area was lowest, which leads us to conclude that the forest cools the urban and its surroundings. The mean temperature of the residential and commercial area is more than +4.5$^{\circ}C$ higher then forest, so this method of land use is the main factor increasing the urban heat island. Urban heat islands and green space play an important role in urban wind systems, i.e. Thermal Induced Air Exchange and Structural Wind Circulation, because of their special properties with regard to energy balance between constructed urban and land. The skill to allocate land use types in urban areas is a very important planning device to reduce air pollution and induce the fresh cold air from green space. An urban climatic experiment featuring a numerical wind simulation study to show the air corridor will be published in a following research paper.

Effects of the root conditioning treatments after Nd:YAG laser irradiation on in vitro human gingival fibroblast attachment to root surfaces (Nd:YAG 레이저조사 후 치근의 처치방법들이 치근면 치은섬유아세포부착에 미치는 영향에 관한 연구)

  • Moon, Hye-Seong;Lim, Kee-Jung;Kim, Byung-Ock;Han, Kyung-Yoon
    • Journal of Periodontal and Implant Science
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    • v.26 no.3
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    • pp.701-713
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    • 1996
  • The purpose of this study was to evaluate the biocompatibility of the Nd:YAG lased root surface followed by root planing and/or tetracyline-HCI(T.C.-HCI) conditioning. $30,4mm{\times}4mm$ root segments were obtained from unerupted third molars and 21, periodontally involved root segments. The treatment groups were as follows : (1) healthy root cementum surface groups : 1) control(non-treated group), 2) lased only, 3) lased/root planed, and 4) lased/T.C.-HCI. (2) diseased root cementum surface groups : 1) control(root planed only), 2) lased/root planed, and 3) lased/root planed/T.C.-HCI. The specimens were treated with a Nd:YAG laser using a $320{\mu}m$ noncontact optic fiber handpiece with an energy setting of 1.5W($114.6J/cm^2$), 2.0W($152.9J/cm^2$), 5.0W($382J/cm^2$) for one minute. The fiber was held perpendicular to the petri dish(NUNC) 2cm apart in an attempt to expose the entire root segments equally. Human gingival fibroblasts were cultured from explants of normal interdental gingival tissue obtained during third morlar extraction. The attachment assay was performed with third-generation fibroblasts. The numbers of gingival fibroblasts attached to the root surface were counted on each specimen under the light microscope, and were statistically analyzed by the oneway ANOVA followed by Tukey's test in SPSS/PC+programs. The results were as follows : 1) In healthy root cementum surfaces, lased/root planed groups exhibited a significantly increased fibroblast attachment compared to controls, lased only, and lased/T.C.-HCI groups(p<0.05), 2) In diseased root cementum surfaces, laser treatment followed by root planing and/or T.C.HCl groups exhibited a increased tendency of fibroblast attachment compared to root planed only group. The results suggest that laser treatment followed by root planing and/or T.C.-HCl would appear necessary so as to render the root surface biocompatible.

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Standardization Studies for the Oriental Mineral Medicine (광물성 약재(광물약)의 표준화에 관한 연구)

  • Kim, Seon-Ok;Park, Maeng-Eon
    • Economic and Environmental Geology
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    • v.48 no.3
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    • pp.187-197
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    • 2015
  • Oriental mineral medicines are single or mixture of more than one mineral species or rock/fossil which are used to treat disease. Mineral medicines remove harmful or useless substances to decrease toxicity and secondary effects, and cause the manufacture of medical compounds with increased efficacy. The extraction test is an accepted in vitro system to predict the bioaccessibility of major and minor elements from mineral medicine. It incorporates gastrointerstinal tract parameters representative of a human body that including stomach and small intestinal pH which are the same as digestion condition. The bioaccessibility of a mineral medicine is the fraction that is soluble in the gastrointestinal environment and is available for absorption. Reaction path modeling in the human body can predict digestion with gastric fluid as well as absorption in the small intestine, existence in body fluids and reaction progress of the exhaust process according to pH conditions in body. Also reaction path modeling can predict bioavailability, which is equal to existence rate in the body and the form and amount of a medicine in the body after intake. The study results from predicating the existence form mineral medicines in the body, and proving the effective ingredient using bioaccessibitily and human risk assessment, suggest these that should be necessary data for new medicine development.

Role of Electrode Reaction of Electrolyte in Electrokinetic-Fenton Process for Phenanthrene Removal (동전기-펜턴 공정에서 전해질의 전극반응이 처리효율에 미치는 영향)

  • Park Ji-Yeon;Kim Sang-Joon;Lee You-Jin;Yang Ji-Won
    • Journal of Soil and Groundwater Environment
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    • v.11 no.1
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    • pp.7-13
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    • 2006
  • The effects of electrolytes were investigated on the removal efficiency when several different electrolytes were used to change the electrode reaction in an electrokinetic (EK)-Fenton process to remediate phenanthrene-contaminated soil. Electrical potential gradient decreased initially due to the ion entrance into soil and then increased due to the ion extraction from soil under the electric field. Accumulated electroosmotic flow was $NaCl>KH_2PO_4>MgSO_4$ at the same concentration because the ionic strength of $MgSO_4$ was the highest and $Mg(OH)_2$ formed near the cathode reservoir plugged up soil pore to inhibit water flow. When hydrogen peroxide was contained in electrolyte solution, removal efficiency increased by Fenton reaction. When NaCl was used as an electrolyte compound, chlorine ($Cl_2$) was generated at the anode and dissolved to form hypochlorous acid (HClO), which increased phenanthrene removal. Therefore, the electrode reaction of electrolyte in the anode reservoir as well as its transport into soil should be considered to improve removal efficiency of EK-Fenton process.

Studies on the Preservation of Korean Ginseng by Irradiation -I. Effect of Gamma Irradiation on the Physicochemical Properties of Ginseng Powder- (방사선조사(放射線照射)에 의한 인삼저장(人蔘貯藏)에 관(關)한 연구(硏究) -제(第) 1 보(報) : 감마선(線) 조사(照射)가 인삼분말제품(人蔘粉末製品)의 이화학적(理化學的) 성질(性質)에 미치는 영향(影響)-)

  • Sung, Hyun-Soon;Park, Myung-Han;Lee, Kwang-Seung;Cho, Han-Ok
    • Korean Journal of Food Science and Technology
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    • v.14 no.2
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    • pp.136-140
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    • 1982
  • In order to evaluate the feasibility for the sterilization of Korean red and white ginseng powder by irradiation, red and white ginseng powder (120 mesh) was irradiated by 0.1, 0.3, 0.5, 0.7, 1.0 and 2.0 Mrad with $^{60}Co$ irradiator (dose rate: 4000 rad/h). Extraction rate of crude saponins by buthanol and by 50% ethanol were slightly increased according to the irradiation dose (buthanol ex. 1.7%, 50% ethanol ex. 2.6% at 1.0 Mrad irradiation. There are no remarkable changes in HPLC patterns of crude saponins by radiation. It was found that irradiation up to 1 Mrad on Korean ginseng products have no significant effect on proximate component, reducing sugar and amino nitrogen of ginseng powder and on the color density of ginseng extract with 50% ethanol. Irradiation up to 1 Mrad could be utilized for the sterilization of Korean ginseng powder whithout changes of physicochemical properties.

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Production of Biodiesel and Nutrient Removal of Municipal Wastewater using a Small Scale Raceway Pond (미세조류 옥외 배양시스템을 이용한 바이오디젤 생산 및 도시하수 영양 염류 제거)

  • Kang, Zion;Kim, Byung-Hyuk;Oh, Hee-Mock;Kim, Hee-Sik
    • Microbiology and Biotechnology Letters
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    • v.41 no.2
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    • pp.207-214
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    • 2013
  • A concerted effort to develop alternative forms of energy is underway due to fossil fuel shortages and its deleterious effects. Recently, bioenergy from microalgae has gained prominence and the use of municipal wastewater as a low cost alternative for a nutrient source has significant advantages. In this study, we have employed municipal wastewater directly after primary treatment (primary settling basin) in a small scale raceway pond (SSRP) for microalgal growth. Indigenous microalgae in the wastewater were encouraged to grow in the SSRP under optimal conditions. The mean removal efficiencies of TN, TP, and $NH_3-N$ after 6 days were 77.77%, 63.55%, and 89.02%, respectively. The average lipid content of the microalgae was 19.51% of dry cell weight, and linolenate and linoleate (18:n) were the predominant fatty acids. The 18S rRNA gene analysis and microscopic observations of the indigenous microalgae community revealed the presence of Chlorella vulgaris and Scenedesmus obliquus as the dominant microalgae. These results indicate that untreated municipal wastewater, serving as an excellent nitrogen and phosphate source for microalgal growth, could be treated using microalgae in open raceway ponds. Moreover, microalgal biomass could be further profitable by the extraction of biodiesel.

Numerical Study on Operating Factors Affecting Performance of Surfactant-Enhanced Aquifer Remediation Process (계면활성제 증진 대수층 복원 프로세스에 영향을 미치는 운영 인자들에 대한 수치 연구)

  • Lee, Kun-Sang
    • Journal of Korean Society of Environmental Engineers
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    • v.32 no.7
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    • pp.690-698
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    • 2010
  • Contamination of groundwater resources by organic chemicals has become an issue of increasing environmental concern. Surfactant-enhanced aquifer remediation (SEAR) is widely recognized as one of the most promising techniques to remediate organic contaminations in-situ. Solutions of surfactant or surfactant with polymer are used to dramatically expedite the process, which in turn, may reduce the treatment time of a site compared to use of water alone. In the design of surfactant-based technologies for remediation of organic contaminated aquifers, it is very important to have a considerable analysis using extensive numerical simulations prior to full-scale implementation. This study investigated the formation and flow of microemulsions during SEAR of organic-contaminated aquifer using the finite difference model UTCHEM, a three-dimensional, multicomponent, multiphase, compositional model. The remediation process variables considered in this study were the sequence of injection fluids, the injection and extraction rate, the concentrations of polymer in surfactant slug and chase water, and the duration of surfactant injection. For each variable, temporal changes in injection and production wells and spatial distributions of relative saturations in the organic phase were compared. Cleanup time and cumulative organic recovery were also quantified. The study would provide useful information to design strategies for the remediation of nonaqueous phase liquid-contaminated aquifers.

Study of the New Structure of Inter-Poly Dielectric Film of Flash EEPROM (Flash EEPROM의 Inter-Poly Dielectric 막의 새로운 구조에 관한 연구)

  • Shin, Bong-Jo;Park, Keun-Hyung
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.10
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    • pp.9-16
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    • 1999
  • When the conventional IPD (inter-poly-dielctrics) layer with ONO(oxide-nitride-oxide) structure was used in the Flash EEPROM cell, its data retention characteristics were significanfly degraded because the top oxide of the ONO layer was etched off due to the cleaning process used in the gate oxidation process for the peripheral MOSFETs. When the IPD layer with the ONON(oxide-nitride-oxide-nitride) was used there, however, its data retention characteristics were much improved because the top nitride of the ONON layer protected the top oxide from being etched in the cleaning process. For the modelling of the data retention characteristics of the Flash EEPROM cell with the ONON IPD layer, the decrease of the threshold voltage cue to the charge loss during the bake was here given by the empirical relation ${\Delta}V_t\; = \;{\beta}t^me^{-ea/kT}$ and the values of the ${\beta}$=184.7, m=0.224, Ea=0.31 eV were obtained with the experimental measurements. The activation energy of 0.31eV implies that the decrease of the threshold voltage by the back was dur to the movement of the trapped electrons inside the inter-oxide nitride layer. On the other hand, the results of the computer simulation using the model were found to be well consistent with the results of the electrical measurements when the thermal budget of the bake was not high. However, the latter was larger then the former in the case of the high thermal budger, This seems to be due to the leakage current generated by the extraction of the electrons with the bake which were injected into the inter-oxide niride later and were trapped there during the programming, and played the role to prevent the leakage current. To prevent the generation of the leakage current, it is required that the inter-oxide nitride layer and the top oxide layer be made as thin and as thick as possible, respectively.

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Effect of Asterina pectinifera Extracts on the Activation of Immune Cells (별불가사리 추출물의 면역세포 활성화 효과)

  • Chae, Su-Yeon;Kim, Mi-Jung;Kim, Do-Soon;Park, Jung-Eun;Jo, Sung-Kee;Yee, Sung-Tae
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.36 no.3
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    • pp.269-275
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    • 2007
  • In this experiment, the effects of Asterina pectinifera extracts on the activation of immune cells were studied. An immune cell activating factor was partially purified from starfish, Asterina pectinifera, by means of physiological saline extraction, acetone precipitation and heating inactivation. Starfish extracts increased the proliferation of spleen cells and induced the production of IL-6 and $IFN-{\gamma}$ by spleen cells. Also, it increased the proliferation of purified B cells and production of IgM and IgG in the presence of Asterina pectinifera extracts. Starfish extract self-induced NO synthesis in mouse macrophage cell line (RAW264.7). When cell lines was treated with extracts, the mRNA expression of inducible NO synthetase (iNOS), $TNF-{\alpha}$, IL-6, and GM-CSF were markedly increased in RT-PCR analysis. Therefore starfish extract can self-activate spleen cells, B cells and macrophages. These results might be useful in further studies into a possible immune activating agent from the starfish, Asterina pectinifera, for the development of functional foods and drugs.