• 제목/요약/키워드: Electrostatic Discharge (ESD)

검색결과 101건 처리시간 0.032초

ESD 보호를 위한 SOI 구조에서의 SCR의 제작 및 그 전기적 특성 분석 (Design and Analysis of SCR on the SOI structure for ESD Protection)

  • 배영석;천대환;권오성;성만영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.10-10
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    • 2010
  • ESD (Electrostatic Discharge) phenomenon occurs in everywhere and especially it damages to semiconductor devices. For ESD protection, there are some devices such as diode, GGNMOS (Gate-Grounded NMOS), SCR (Silicon-Controlled Rectifier), etc. Among them, diode and GGNMOS are usually chosen because of their small size, even though SCR has greater current capability than GGNMOS. In this paper, a novel SCR is proposed on the SOI (Silicon-On-Insulator) structure which has $1{\mu}m$ film thickness. In order to design and confirm the proposed SCR, TSUPREM4 and MEDICI simulators are used, respectively. According to the simulation result, although the proposed SCR has more compact size, it's electrical performance is better than electrical characteristics of conventional GGNMOS.

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정전기 보호를 위한 n형 SCR 소자의 래치업 특성 (Latchup Characteristics of N-Type SCR Device for ESD Protection)

  • 서용진;김길호;이우선
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1372-1373
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    • 2006
  • An electrostatic discharge (ESD) protection device, so called, N-type SCR with P-type MOSFET pass structure (NSCR_PPS), was analyzed for high voltage I/O applications. A conventional NSCR_PPS device shows typical SCR-like characteristics with extremely low snapback holding voltage, which may cause latchup problem during normal operation. However, a modified NSCR_PPS device with proper junction/channel engineering demonstrates highly latchup immune current- voltage characteristics.

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우주 플라즈마 환경에서 저궤도 위성 시스템 설계에 관한 고찰 (Study on the design of LEO Satellite System in Space Plasma Environment)

  • 임성빈;홍상표;김태윤;장재웅;최석원
    • 항공우주기술
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    • 제7권2호
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    • pp.67-75
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    • 2008
  • 본 논문에서는 우주 플라즈마 환경에서 정전기의 충전/방전 미카니즘 및 이에 대한 시스템 영향과 저궤도 위성 시스템의 설계규격에 대하여 고찰하였다. 우주의 플라즈마 환경에서 위성시스템에 대한 정전기 방전의 문제는 시스템 개발초기에 주의 깊게 다루어져야 한다. 일반적으로 정전기 방전과 관련한 시스템 설계는 전자파양립 성 규격에 나타나 있으며, 이들 규격에는 접지, 본딩, 차폐, 전도성 코팅, 전기적인 인터페이스 설계 등이 있다. 우주환경에서 충전은 위성체 표면위의 각각의 위치에 차등전위를 증가시키게 된다. 만약 이러한 충전이 스레쉬홀드까지 지속된다면, 경우에 따라서 위성 시스템에 심각한 영향을 줄 수 있다. 이러한 현상은 임무, 전기적/기계적 구성, 전원 및 궤도환경에 따라 결정된다. 그러므로 관련된 규격은 시스템 설계 및 운용환경에 맞게 테일로어링(tailoring) 되어야 하며, 시스템의 안전성을 위한 설계에 주의를 기울여야 한다.

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Effects of Electrostatic Discharge Stress on Current-Voltage and Reverse Recovery Time of Fast Power Diode

  • Bouangeune, Daoheung;Choi, Sang-Sik;Cho, Deok-Ho;Shim, Kyu-Hwan;Chang, Sung-Yong;Leem, See-Jong;Choi, Chel-Jong
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제14권4호
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    • pp.495-502
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    • 2014
  • Fast recovery diodes (FRDs) were developed using the $p^{{+}{+}}/n^-/n^{{+}{+}}$ epitaxial layers grown by low temperature epitaxy technology. We investigated the effect of electrostatic discharge (ESD) stresses on their electrical and switching properties using current-voltage (I-V) and reverse recovery time analyses. The FRDs presented a high breakdown voltage, >450 V, and a low reverse leakage current, < $10^{-9}$ A. From the temperature dependence of thermal activation energy, the reverse leakage current was dominated by thermal generation-recombination and diffusion, respectively, at low and high temperature regions. By virtue of the abrupt junction and the Pt drive-in for the controlling of carrier lifetime, the soft reverse recovery behavior could be obtained along with a well-controlled reverse recovery time of 21.12 ns. The FRDs exhibited excellent ESD robustness with negligible degradations in the I-V and the reverse recovery characteristics up to ${\pm}5.5$ kV of HBM and ${\pm}3.5$ kV of IEC61000-4-2 shocks. Likewise, transmission line pulse (TLP) analysis reveals that the FRDs can handle the maximum peak pulse current, $I_{pp,max}$, up to 30 A in the forward mode and down to - 24 A in the reverse mode. The robust ESD property can improve the long term reliability of various power applications such as automobile and switching mode power supply.

Bidirectional Transient Voltage Suppression Diodes for the Protection of High Speed Data Line from Electrostatic Discharge Shocks

  • Bouangeune, Daoheung;Choi, Sang-Sig;Choi, Chel-Jong;Cho, Deok-Ho;Shim, Kyu-Hwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제14권1호
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    • pp.1-7
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    • 2014
  • A bidirectional transient voltage suppression (TVS) diode consisting of specially designed $p^--n^{{+}+}-p^-$ multi-junctions was developed using low temperature (LT) epitaxy and fabrication processes. Its electrostatic discharge (ESD) performance was investigated using I-V, C-V, and various ESD tests including the human body model (HBM), machine model (MM) and IEC 61000-4-2 (IEC) analysis. The symmetrical structure with very sharp and uniform bidirectional multi-junctions yields good symmetrical I-V behavior over a wide range of operating temperature of 300 K-450 K and low capacitance as 6.9 pF at 1 MHz. In addition, a very thin and heavily doped $n^{{+}+}$ layer enabled I-V curves steep rise after breakdown without snapback phenomenon, then resulted in small dynamic resistance as $0.2{\Omega}$, and leakage current completely suppressed down to pA. Manufactured bidirectional TVS diodes were capable of withstanding ${\pm}4.0$ kV of MM and ${\pm}14$ kV of IEC, and exceeding ${\pm}8$ kV of HBM, while maintaining reliable I-V characteristics. Such an excellent ESD performance of low capacitance and dynamic resistance is attributed to the abruptness and very unique profiles designed very precisely in $p^--n^{{+}+}-p^-$ multi-junctions.

Design of SCR-Based ESD Protection Circuit for 3.3 V I/O and 20 V Power Clamp

  • Jung, Jin Woo;Koo, Yong Seo
    • ETRI Journal
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    • 제37권1호
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    • pp.97-106
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    • 2015
  • In this paper, MOS-triggered silicon-controlled rectifier (SCR)-based electrostatic discharge (ESD) protection circuits for mobile application in 3.3 V I/O and SCR-based ESD protection circuits with floating N+/P+ diffusion regions for inverter and light-emitting diode driver applications in 20 V power clamps were designed. The breakdown voltage is induced by a grounded-gate NMOS (ggNMOS) in the MOS-triggered SCR-based ESD protection circuit for 3.3 V I/O. This lowers the breakdown voltage of the SCR by providing a trigger current to the P-well of the SCR. However, the operation resistance is increased compared to SCR, because additional diffusion regions increase the overall resistance of the protection circuit. To overcome this problem, the number of ggNMOS fingers was increased. The ESD protection circuit for the power clamp application at 20 V had a breakdown voltage of 23 V; the product of a high holding voltage by the N+/P+ floating diffusion region. The trigger voltage was improved by the partial insertion of a P-body to narrow the gap between the trigger and holding voltages. The ESD protection circuits for low- and high-voltage applications were designed using $0.18{\mu}m$ Bipolar-CMOS-DMOS technology, with $100{\mu}m$ width. Electrical characteristics and robustness are analyzed by a transmission line pulse measurement and an ESD pulse generator (ESS-6008).

소자 시뮬레이션을 이용한 ESD 보호용 NMOS 트랜지스터의 항복특성 분석 (Analysis on the breakdown characteristics of ESD-protection NMOS transistors based on device simulations)

  • 최진영;임주섭
    • 전자공학회논문지D
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    • 제34D권11호
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    • pp.37-47
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    • 1997
  • Utilizing 2-dimensional device simulations incorporating lattic eheating models, we analyzed in detail the DC breakdown characterisics of NMOS trasistors with different structures, which are commonly used as ESD protection transistors. The mechanism leading to device failure resulting from electrostatic discharge was explained by analyzing the 1st and 2nd breakdown characteristics of LDD devices. Also a criteria for more robust designs of NMOS transistor structures against ESD was suggested by examining the characteristics changes with changes in structural parameters such as the LDD doping concentration, the drain junction depth, the distance between source/drain contacts, and the source junction area.

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Design of Gate-Ground-NMOS-Based ESD Protection Circuits with Low Trigger Voltage, Low Leakage Current, and Fast Turn-On

  • Koo, Yong-Seo;Kim, Kwang-Soo;Park, Shi-Hong;Kim, Kwi-Dong;Kwon, Jong-Kee
    • ETRI Journal
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    • 제31권6호
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    • pp.725-731
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    • 2009
  • In this paper, electrostatic discharge (ESD) protection circuits with an advanced substrate-triggered NMOS and a gate-substrate-triggered NMOS are proposed to provide low trigger voltage, low leakage current, and fast turn-on speed. The proposed ESD protection devices are designed using 0.13 ${\mu}m$ CMOS technology. The experimental results show that the proposed substrate-triggered NMOS using a bipolar transistor has a low trigger voltage of 5.98 V and a fast turn-on time of 37 ns. The proposed gate-substrate-triggered NMOS has a lower trigger voltage of 5.35 V and low leakage current of 80 pA.

Highly Robust AHHVSCR-Based ESD Protection Circuit

  • Song, Bo Bae;Koo, Yong Seo
    • ETRI Journal
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    • 제38권2호
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    • pp.272-279
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    • 2016
  • In this paper, a new structure for an advanced high holding voltage silicon controlled rectifier (AHHVSCR) is proposed. The proposed new structure specifically for an AHHVSCR-based electrostatic discharge (ESD) protection circuit can protect integrated circuits from ESD stress. The new structure involves the insertion of a PMOS into an AHHVSCR so as to prevent a state of latch-up from occurring due to a low holding voltage. We use a TACD simulation to conduct a comparative analysis of three types of circuit - (i) an AHHVSCR-based ESD protection circuit having the proposed new structure (that is, a PMOS inserted into the AHHVSCR), (ii) a standard AHHVSCR-based ESD protection circuit, and (iii) a standard HHVSCR-based ESD protection circuit. A circuit having the proposed new structure is fabricated using $0.18{\mu}m$ Bipolar-CMOS-DMOS technology. The fabricated circuit is also evaluated using Transmission-Line Pulse measurements to confirm its electrical characteristics, and human-body model and machine model tests are used to confirm its robustness. The fabricated circuit has a holding voltage of 18.78 V and a second breakdown current of more than 8 A.

ESD 보호를 위한 LVTSCR의 래치업 차폐회로 (The Latchup Shutdown Circuit of LVTSCR to Protect the ESD)

  • 정민철;윤지영;유장우;성만영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.178-179
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    • 2005
  • ESD(Electrostatic Discharge) 보호에 응용되는 소자는 ESD가 발생했을 때, 빠르게 턴-온되어 외부로부터 EOS(Electric OverStress)를 차단함으로서 집적회로 내부의 코어를 보호해 주어야 한다. 이러한 기능에 충실한 LVTSCR(Low-Voltage Silicon Controlled Rectifier)은 트리거링 전압을 기존의 SCR보다 낮추어 ESD에 대해 민감한 반응을 할 수 있도록 개선한 소자이다. 그러나 트리거링 전압을 낮추면서 래치업 전압 또한 낮아지는 특성이 trade-off 관계로 맞물려 있어, LVTSCR의 단점인 낮은 래치업 전압을 효과적으로 다루는 것이 큰 이슈가 되고 있다. 본 논문에서는 LVTSCR의 ESD 보호에 대한 응용시 발생 가능한 래치업을 차폐하는 회로적 방법을 제시하였다. 제시된 새로운 구조의 차폐회로는 LVTSCR에서 래치업이 발생했을 때, 천이 전류를 감지하여 래치업이 발생되는 소자에 대한 전원을 스스로 차폐시켜 래치업에 대한 안정성을 시뮬레이션으로 검증하였다.

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