• 한국공작기계학회논문집
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• 제16권6호
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• pp.153-158
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• 2007

The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1288-1293
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• 2007

The present study covers the design and analysis of a thermionic scanning electron microscope (SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. In the design process, the dimension and capacity of the SEM components need to be optimally determined with the aid of finite element analyses. Considering the geometry of the filament, a three-dimensional (3D) finite element analysis is utilized. Through the analysis, the beam emission characteristics and relevant trajectories are predicted from which a systematic design of the electron optical system is enabled. The validity of the proposed 3D analysis is also discussed by comparing the directional beam spot radius. As a result, a prototype of a thermionic SEM is successfully developed with a relatively short time and low investment costs, which proves the adoptability of the proposed 3D analysis.

• 전력전자학회논문지
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• 제19권4호
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• pp.303-311
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• 2014

This paper shows the test result of 2MVA BESS(Battery Energy Storage System) with wind-turbine in micro-grid of the Gapado. To implement of micro-grid with BESS, characteristics of generator and customer load in grid are considered. Also, to operate of 2-parallel PCU(Power Conversion Unit) in BESS, the droop control is adopted with operating mode of grid independent. Performances of BESS with wind-turbine were verified by analysis of power quality such as voltage harmonics, ratio of voltage and frequency regulation, and by measurement of waveform such as output voltage and current.

• 한국레이저가공학회지
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• 제18권4호
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• pp.1-5
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• 2015

For continuous laser micro patterning on three-dimensional free form surface, innovative laser system is developed. The two axis galvanometer is combined with the dynamic focusing unit to increase optical distance. Also, it is synchronized with the 3 axis mechanical system. To determine laser machining sequence, laser CAM system is developed. It can make possible of 3D surface micro patterning under $25{\mu}m$ pattern width. The uniformity of pattern width is about 2.8% and it is validated that focal plane is well conserved by the dynamic focusing unit. Velocity and positional information of 1 axis is stage is fed to the scanner control board by the encoder signal and it makes possible real time synchronization. With this system, possible patterning volume is enlarged from $40{\times}40mm^2$ to $40{\times}120{\times}30mm^3$.

• 전자공학회논문지 IE
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• 제43권3호
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• pp.34-40
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• 2006

일반적으로 유체나 연료 공급 장치는 모터를 제어하기 위한 특별한 센서가 필요하고, 센서를 부착하기 위한 보조 장치와 부착하기 위한 공간이 필요하다. 또한 신호선 및 기타 배선 등이 필요하여 어려운 점이 따르게 된다. 본 논문에서는, 불편함과 문제점을 해결하기 위하여 홀센서를 이용한 제어시스템을 제안하였고, 시스템의 제어원리는 모터 동작 단계에 따라 전류흐름에 차이가 발생한다는 것을 이용하였다. 또한 제어 시스템이 우수할 뿐만 아니라 센서 설치에 따른 고장을 줄일 수 있었고, 재료비 및 인건비를 절감할 수 있다. Auto-Pumping 시스템은 Soft-Ware적응용을 통해 모든 유체 공급 시스템에 적용할 수 있으며, 차후에 시스템을 이용한 여러 종류의 장치를 개발할 수 있으리라 본다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.890-893
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• 2004

The ultra precision machining in industrial field are increased day by day. The diamond turning has been used generally, but now is faced with limitation of use, because of higher requirement of production field. The electron beam lithography is alternative in machining area as semiconductor production. For EB lithography, 5 axis vacuum stage is required to duplicate small and large patterns on wafer. The stage is composed of 2 rotational axis and 3 translational axis with 5 DC servo motors. The positioning repeatability and resolution of Z axis feed unit are 3.21$\mu$m and 0.5 $\mu$m/step enough to apply to lithography.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.831-834
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• 2000

Characteristics of organic light-emitting diodes(OLEDs) were studied with devices made by PECCP[poly(3,6-N-2-ethylhexyl carbazolyl cyanoterephthalidene)] Langmuir-Blodget(LB) films. The emissive organic material was synthesized and named PECCP, which has a strong electron donor group and an electron accepter group in main chain repeated unit. The LB technique was employed to investigate the identification of the recombination zone in the ITO/PECCP LB films/Alq$_3$/Al structure by varying the LB film thickness. PECCP was considered as an emissive layer and Alq$_3$was used as an electron-transport layer. We measured current-voltage(I-V) characteristics, UV/visible absorption, PL spectrum, and EL spectrum of those devises.

• 한국기계가공학회지
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• 제15권1호
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• pp.1-7
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• 2016

In the dentistry field, an ultrasonic surgery unit is widely used in bone cutting and scaling to reduce operation time and minimize hemorrhage. The purpose of this study was to evaluate bone cutting and the effect of a specimen's temperature on the two-type ultrasonic surgery unit using a handpiece moving system(HMS). A HMS, which can cut the bone, was developed to perform the experimental procedure with precision of motion control. Bone specimens were prepared from a combination of epoxy-hardener and cortical bone of bovine leg. Through the bone-cutting experiment, the cutting depth was evaluated by not only scanning electron microscopy, but also Vernier calipers. Also, the temperature distribution was measured by a thermo-graphic camera. This study may be applied methodically in various experimental evaluations on a performance test by a HMS.

• 한국축산식품학회지
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• 제24권3호
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• pp.273-276
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• 2004

The objective of this study was to investigate the microstructure of folic acid-contained yogurt. Folic acids (25 and 50%) were added to milk preparation prior to pasteurization, then starter culture was added. The microstructure of yogurt containing folic acid was determined by the size of cluster of casein micelle using scanning electron microscopy and transmission electron microscopy. The cluster of casein micelle in yogurt containing folic acid were showed larger size than in control (p<0.05). In addition of 50% of folic acid, cluster of casein micelle per unit area was exhibited the highest number among tested yogurts. From these results, folic acid concentration of yogurt may be affected by mouth-feel of yogurt texture as well as the aggregation of casein micelle.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.52-61
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• 2023

We designed a novel ultra-miniaturized microcolumn structure having an stigmator to significantly improve throughput per unit time, which is the biggest disadvantage of microcolumns. We adopted the structure of the stigmator in the form of an electrostatic octupole electrode, and used an electrostatic quadrupole deflector with a relatively simple structure considering the increase in wiring due to the introduction of the stigmator. We have dramatically reduced the effect of astigmatism that occurs when the electron beam probe is scanned to the periphery of the target by introducing the stigmator between the control electrode and the deflector. As our numerical analysis simulation results, the field of view obtained as a result of this study is about 46.3% improved compared to our previous study, and the electron beam probe size of less than 10 nm was achieved in the entire field of view.