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Study of 3 dimensional wide area continuous laser micro patterning  

Kim, Kyunghan (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials)
Sohn, Hyonkee (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials)
Lee, Jaehoon (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials)
Publication Information
Laser Solutions / v.18, no.4, 2015 , pp. 1-5 More about this Journal
Abstract
For continuous laser micro patterning on three-dimensional free form surface, innovative laser system is developed. The two axis galvanometer is combined with the dynamic focusing unit to increase optical distance. Also, it is synchronized with the 3 axis mechanical system. To determine laser machining sequence, laser CAM system is developed. It can make possible of 3D surface micro patterning under $25{\mu}m$ pattern width. The uniformity of pattern width is about 2.8% and it is validated that focal plane is well conserved by the dynamic focusing unit. Velocity and positional information of 1 axis is stage is fed to the scanner control board by the encoder signal and it makes possible real time synchronization. With this system, possible patterning volume is enlarged from $40{\times}40mm^2$ to $40{\times}120{\times}30mm^3$.
Keywords
3 dimension; wide area; continuos patterning; $Al_2O_3$; synchronization;
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