Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
권호 표지

Study of 3 dimensional wide area continuous laser micro patterning

3차원 대면적 연속 마이크로 레이저 패터닝을 위한 연구

  • Kim, Kyunghan (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials) ;
  • Sohn, Hyonkee (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials) ;
  • Lee, Jaehoon (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials)
  • 김경한 (한국기계연구원 광응용기계연구실) ;
  • 손현기 (한국기계연구원 광응용기계연구실) ;
  • 이제훈 (한국기계연구원 광응용기계연구실)
  • Received : 2015.12.08
  • Accepted : 2015.12.21
  • Published : 2015.12.31
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Abstract

For continuous laser micro patterning on three-dimensional free form surface, innovative laser system is developed. The two axis galvanometer is combined with the dynamic focusing unit to increase optical distance. Also, it is synchronized with the 3 axis mechanical system. To determine laser machining sequence, laser CAM system is developed. It can make possible of 3D surface micro patterning under $25{\mu}m$ pattern width. The uniformity of pattern width is about 2.8% and it is validated that focal plane is well conserved by the dynamic focusing unit. Velocity and positional information of 1 axis is stage is fed to the scanner control board by the encoder signal and it makes possible real time synchronization. With this system, possible patterning volume is enlarged from $40{\times}40mm^2$ to $40{\times}120{\times}30mm^3$.

Keywords

References

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