• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.268.2-268.2
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• 2013

Nanogap interdigitated electrodes (NIDEs) can serve as an alternative platform for the biomolecular detection [1]. In this work, the NIDEs were adopted in a simple and sensitive detection of Pneumococcal surface protein A (PspA). The NIDEs were fabricated by the combination of photo and chemical lithography. Photolithographically-defined initial gap of about 200 nm was narrowed down to a few tens of nanometers by surface-initiated growth of the initial electrodes (chemical lithography) [2]. Bare silicon oxide surface between the electrodes was chemically modified to immobilize capturing antibodies and, after exposure to the samples, the device was immersed in a solution containing the probe-antibody-conjugated Au nanoparticles (Au NPs). The conductance change accompanied with the Au NP immobilization was interpreted as the existence of PspA. Detection limit of the measurements and further improvement of the detection efficiency were discussed with the results from I-V analysis, scanning electron microscopy, and atomic force microscopy.

• Applied Science and Convergence Technology
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• v.26 no.6
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• pp.179-183
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• 2017

The direct growth method is simplified manufacturing process used to avoid damages and contaminants from the graphene transfer process. In this paper, graphene nano-walls (GNWs) were direct synthesized using electron cyclotron resonance (ECR) plasma by varying the $CH_4/H_2$ gas flow rate on the copper foil at low temperature (without substrate heater). Investigations were carried out of the changes in the morphology and characteristic of GNWs due to the relative intensity of hydrocarbon radical and molecule in the ECR plasma. The results of these investigations were then discussed.

• Journal of Welding and Joining
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• v.17 no.2
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• pp.104-111
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• 1999

The interfacial microstructure and bond strength were examined for WC-Co/Cu/SM45C steel join using a nickel-plated copper in vacuum at 1323K for 0.6ks∼3.6ks. After bonding, microstructure in bonding interface was observed by OM(Optical Microscopy), SEM(Scanning Electron Microscopy) and EPMA(Eelectron Probe Micro Analyzer). The oil cooling was carried out at 353K, the cooling rate in air and furnace was 22K/s and 4.4K/s. respectively. It was found that dendritic widths increased with the content of cobalt and bonding times at 1323K. As a whole, bond strength values at the same bonding condition decreased in this order: WC-13wt.%Co/SM45Csteel. WC-8wt.%Co/SM45Csteel and WC-4wt.%Co/SM45Csteel. The bond strength of WC-13wt.%Co/S45C steel joint in oil cooling was 273MPa. This value was greatly higher than those of 125MPa in furnace cooling and 93MPa in air cooling at 1323K for 0.6ks. The bond strength values were found to be closely associated with the content of cobalt in WC-Co and cooling rate.

• Korean Journal of Materials Research
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• v.19 no.6
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• pp.344-348
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• 2009

The electrolyte effects of the electroplating solution in Cu films grown by ElectroPlating Deposition(EPD) were investigated. The electroplated Cu films were deposited on the Cu(20 nm)/Ti (20 nm)/p-type Si(100) substrate. Potentiostatic electrodeposition was carried out using three terminal methods: 1) an Ag/AgCl reference electrode, 2) a platinum plate as a counter electrode, and 3) a seed layer as a working electrode. In this study, we changed the concentration of a plating electrolyte that was composed of $CuSO_4$, $H_2SO_4$ and HCl. The resistivity was measured with a four-point probe and the material properties were investigated by using XRD(X-ray Diffraction), an AFM(Atomic Force Microscope), a FE-SEM(Field Emission Scanning Electron Microscope) and an XPS(X-ray Photoelectron Spectroscopy). From the results, we concluded that the increase of the concentration of electrolytes led to the increase of the film density and the decrease of the electrical resistivity of the electroplated Cu film.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Korean Journal of Metals and Materials
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• v.50 no.8
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• pp.557-562
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• 2012

Self-organized ruthenium (Ru) dots were fabricated by $400^{\circ}C$ RTA (rapid thermal annealing) and ALD (atomic layer deposition). The dots were produced under the $400^{\circ}C$ RTA conditions for 10, 30 and 60 seconds on all Si(100)/200 nm-SiO2, glass, and glass/fluorine-doped tin oxide (FTO) substrates. Electrical sheet resistance, and surface microstructure were examined using a 4-point probe and FE-SEM (field emission scanning electron microscopy). Ru dots were observed when a 30 nm-Ru layer on a Si(100)/200 nm-SiO2 substrate was annealed for 10, 30 and 60 seconds, whereas the dots were only observed on a glass substrate when a 50 nm-Ru layer was annealed on glass. For a glass/FTO substrate, RTA <30 seconds was needed for 30 nm Ru thick films. Those dots can increase the effective surface area for silicon and glass substrates by up to 5-44%, and by 300% for the FTO substrate with a < $20^{\circ}$ wetting angle.

• Corrosion Science and Technology
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• v.18 no.5
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• pp.175-181
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• 2019

A failed spent fuel rod with 53,000 MWd/tU from a nuclear power plant was characterized, and the fission products and oxygen layer in the pellet-clad mechanical interaction region were observed using an EPMA (Electron Probe Micro-Analyzer). A sound fuel rod burned under similar conditions was used to compare and analyze, the results of the failed fuel rod. In the failed fuel rod, the oxide layer represented $10{\mu}m$ of the boundary of the cladding, and $35{\mu}m$ of the region outside the cladding. By comparison, in the sound fuel rod, the oxide layer was $8{\mu}m$, observed in the cladding boundary region. The cladding inner surface corrosion and the resulting fuel-cladding bonding were investigated using an EPMA. Zirconium existed in the bonding layer of the (U, Zr)O compound beyond the pellet cladding interaction gap of $20{\mu}m$, and composition of UZr2O3 was observed in the failed fuel rod. This paper presents the results of the EPMA examination of a spent fuel specimen, and a technique to analyze fission products in the pellet-clad mechanical interaction region.

• Applied Microscopy
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• v.48 no.4
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• pp.117-121
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• 2018

The multiple length scale analysis of previously designed Fe-Mn-Al-C based low-density model alloys reveals the difference in ordered ${\kappa}-carbide$, $(Fe,Mn)_3AlC_x$, between Fe-25Mn-16Al-5.2C (at%) alloy and Fe-3Mn-10Al-1.2C (at%) alloy. For the former alloy composition consisting of fully austenite grains, ${\kappa}-carbide$ showed majorly cuboidal and minorly pancake morphology and its chemical composition was not changed through aging for 24 h and 168 h at $600^{\circ}C$. Meanwhile, for the isothermally annealed ferritic alloy system for 1 hr at 500 and $600^{\circ}C$, the dramatic change in the chemical composition of needle-shape ${\kappa}-carbide$, $(Fe,Mn)_3(Fe,Al)C_x$, was found. Here we address that the compositional fluctuations in the vicinity of the carbides are significantly controlled by abutting phase, either austenite or ferrite. Namely, the cooperative ordering of carbon and Al is an important factor contributing to carbide formation in the high-Mn and high-Al alloyed austenitic steel, while the carbon and Mn for the low-Mn and high Al alloyed ferritic steel.

• Journal of the Semiconductor & Display Technology
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• v.17 no.2
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• pp.71-75
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• 2018

In this study, we prepared OLED cell with ITO (Indium Tin Oxide) films grown on the glass substrate by facing targets sputtering. Before fabrication of OLED cells, we investigated properties of ITO films deposited at various sputtering conditions. To investigate properties of as-prepared films, we employed four-point probe, UV-VIS spectrometer, X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), hall-effect measurement. As a results, as-prepared ITO films have high transmittance of over 85 % in the visible range (300-800 nm) and a resistivity of under $10^{-4}$ (${\Omega}-cm$). Their resistivity increased as a function of oxygen gas flow and substrate temperature. OLED cell with ITO films were fabricated by thermal evpoeartor. Properties of OLEDs cell referring to properties of ITO films.

• The Bulletin of The Korean Astronomical Society
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• v.43 no.2
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• pp.47.3-47.3
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• 2018

The Korea Astronomy and Space Science Institute (KASI) plans to develop a coronagraph in collaboration with the National Aeronautics and Space Administration (NASA), to be installed on the International Space Station (ISS). It uses multiple filters to obtain simultaneous measurements of electron density, temperature, and velocity within a single instrument. The primary science goal is to understand the physical conditions in the solar wind acceleration region, and the secondary goal is to enable and validate the next generation of space weather science models. The planned launch in 2022 provides great potential for synergy with other solar space missions such as Solar Orbiter and Parker Solar Probe.