• 대한기계학회논문집A
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• 제37권2호
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• pp.213-218
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• 2013

초음파 가공(Ultrasonic Machining:USM)은 새로운 기계가공기술 분야 중의 하나이다. 초음파 가공 과정은 비열, 비화학, 그리고 비전도의 방법이기 때문에 공작물 재료의 물리적, 화학적 변화가 없다. 이러한 특성으로 인해 초음파 가공기술은 유리, 세라믹 등과 같은 취성재료의 가공에 적합하다. 그러나 단점으로는 초음파 진동을 이용하여 취성재료를 가공하는 경우 크랙이 빈번하게 발생한다. 본 논문에서는 유리와 세라믹의 미세 구멍가공에서 다구찌 방법을 이용하여 크랙발생을 최소화하는 최적의 가공조건을 얻고자 하였다. 이를 통해 공작물의 입구 및 출구에서 발생하는 크랙 현상을 감소시켰다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.229-230
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• 2006

Shape memory alloy, Nitinol is used for medical stent, artificial human joint, antenna of artificial satellite, fire door, temperature sensor...etc. It is important for some nitinol product high precision and clean surface. In this study, we experiment about deburring of edge and surface of nitinol work piece with micro electrolytic-deburring. We made an observation in case electric currents are $1A{\sim}4A$, above 5A and each machining times.

• 한국기계가공학회지
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• 제14권4호
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• pp.160-166
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• 2015

Ultrasonic machining (USM) has been considered a new, cutting-edge technology that presents no heating or electrochemical effects, with low surface damage and small residual stresses on brittle workpieces. However, nowadays, many researchers are paying careful attention to the disadvantages of USM, such as low productivity and tool wear. On the other hand, in this study, a high-performance rotary ultrasonic drilling (RUD) spindle is designed and assembled. In this system, the core technology is the design of an ultrasonic vibration horn for the spindle using finite element analysis (FEA). The maximum spindle speed of RUM is 9,600 rpm, and the highest harmonic displacement is $5.4{\mu}m$ noted at the frequency of 40 kHz. Through various drilling experiments on glass workpieces using a CVD diamond-coated drill, the cutting force and cracking of the hole entrance and exit side in the glass have been greatly reduced by this system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.739-742
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• 2002

This paper described on the fabrication of microstructures by DRIE(deep reactive ion etching). SOI(Si-on-insulator) electric devices with buried cavities are fabricated by SDB technology and electrochemical etch-stop. The cavity was fabricated the upper handling wafer by Si anisotropic etch technique. SDB process was performed to seal the fabricated cavity under vacuum condition at -760 mmHg. In the SDB process, captured air and moisture inside of the cavities were removed by making channels towards outside. After annealing($1000^{\circ}C$, 60 min.), The SDB SOI structure was thinned by electrochemical etch-stop. Finally, it was fabricated microstructures by DRIE as well as an accurate thickness control and a good flatness.

• 융복합기술연구소 논문집
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• 제3권2호
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• pp.39-43
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• 2013

Titanium has been used to satisfy various applications such as bio engineering, aerospace, electronics, automobile. Recently, micro fabrication technologies of metals such as titanium have been required to satisfy many conditions in various fields. To satisfy these demands, micro electrochemical process using laser marking can be an alternative method because it is one of the precision machining and efficient process. Micro electrochemical process using laser marking needs to accomplish form of the oxidized recast layer on metal surface by laser marking. The laser beam marking conditions such as average power, pulse repetition rate and marking speed should be properly selected to form oxidized recast layer. So, the characteristics of titanium surface according to laser marking conditions was investigated through SEM(scanning electron microscope), EDS(energy dispersive spectrometer) and surface roughness analysis.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.75-80
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• 2008

The fabrication of complex three-dimensional electrodes for micro electrical discharge machining (micro-EDM) is an important issue in the field of micromachining Localized electrochemical deposition (LECD) is a simple and inexpensive technique for fabricating micro-EDM electrodes. This study presents a new process for manufacturing electrodes with complex cross-sections using masks of different shapes, In this process, a non-conductive mask is placed between an anode and cathode that are immersed in a plating solution of acidified copper sulfate. The LECD is achieved by applying a pulsed voltage between the anode and cathode, which are separated by a small distance. In this setup, the cathode is placed above the anode and the mask, so that the deposited electrode can be used directly for EDM without changing the tool orientation. We found that the microstructure of the deposited electrode is influenced by the concentration of the plating solution and organic additives. Moreover, the values of the voltage, frequency, and duty cycle of the pulsed input have significant effects on the microstructure of the fabricated electrode. Finally, the optimum values of the voltage, frequency, and duty cycle were determined for the most effective fabrication of complex-shaped electrodes.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.142-144
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• 2014

전해가공(ECM)과 방전가공(EDM) 공정은 독특한 출력이 가능한 두 가지 이점이 있다. 방전가공과 전해가공은 보다 효과적이면서 거대하고, 미세한 나노 특성과 재료 가공의 정확한 3차원 복잡 형상 가공의 대안을 제공해준다. 본고에서는 학술적이고 산업적인 연구와 응용에 있어서 기예를 반영한 전해가공과 방전가공 공정의 기술적인 진전을 간략히 기술하였다.

• 한국산학기술학회논문지
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• 제12권12호
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• pp.5412-5419
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• 2011

산업의 발달에 따른 각종기기 장치들의 고속화, 소형화, 정밀화로 인해 고속 스핀들의 필요성은 점점 커지고 있다. 또한 공기동압베어링은 스테이지 모션에 대해서 무마찰 실현을 위해서 웨이퍼 생산용 광학 리소그래피 분야에도 적용된다. 공기동압베어링은 마찰에 의한 동력손실과 열 발생이 적어 고속회전에 유리하고 고정밀 회전이 가능하기 때문에 고속 고정밀 스핀들 시스템 및 하드 디스크 드라이브에 사용될 수 있다. 본 연구에서는 축 하중 지지를 위해 헤링본 홈 형상을 가지는 공기동압베어링의 성능에 대한 수치해석을 수행하였다. 또한 본 연구에서는 공기동압베어링을 제작하기 위해서 기존의 기계 가공방법과는 다른 비접촉식 초정밀 가공 방법인 마이크로 전기화학가공에 의한 방법으로 마이크로 그루브 가공을 수행하였고, 수치해석 프로그램을 이용하여 전극의 간극, 전해용액 농도, 가공시간 등 이론적인 수치를 시뮬레이션 하였다.

• 열처리공학회지
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• 제17권3호
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• pp.173-179
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• 2004

In this study, the influence of heat treatment and Ca contents on the electrochemical behavior was investigated. Mg-Ca alloys, i.e., Mg-0.22wt%Ca, Mg-0.56wt%Ca, Mg-1.31wt%Ca are prepared by ingot metallurgy. As-cast Mg-Ca alloys exhibited better electrochemical properties than pure Mg. Especially, Mg-0.22wt%Ca alloy improves its anode efficiency up to 62% and lowers the OCP up to -1.72VSCE. Microstructure and XRD patterns of Mg-Ca alloys show that additive Ca element is mainly solid-solutioned. While, the others show the microstructure and XRD pattern with large $Mg_2Ca$ at grain boundary. To assess the effect of heat treatment on the as-cast Mg-alloy, the specimens were heat treated at $200^{\circ}C$ for 2 hours under $CO_2$ gas atmosphere. Although corrosion properties of Mg-Ca alloys are somewhat deteriorated by heat treatment at $200^{\circ}C$ Mg-0.22wt%Ca alloy with uniformly distributed nano-sized $Mg_2Ca$ phase in ${\alpha}$-Mg matrix show still better corrosion properties than pure Mg specimen.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1277-1280
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• 2005

A high-aspect-ratio and high-resolution stainless steel shadow mask for organic thin-film transistors (OTFTs) circuit has been fabricated by a new method which combines photochemical machining, micro-electrical discharge machining (micro-EDM), and electrochemical etching (ECE). First, connection lines and source-drain holes are roughly machined by photochemical etching, and then the part of source and drain holes is finished by the combination of micro-EDM and ECE processes. Using this method a $100\;\mu{m}$ thick stainless steel (AISI 304) shadow mask for inverter can be fabricated with the channel length of $30\;\mu{m}\;and\;10\;\mu{m}\;respectively.\;The\;width\;of\;connection line\;is\;150\;\mu{m}$. The aspect ratio of the wall is about 5 and 15, respectively. Metal lines and source-drain electrodes of OTFTs were successfully deposited through the fabricated shadow mask.