• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.268-268
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• 2012

Adsorption and desorption of toluene from bare and $TiO_2$-coated silica with a mean pore size of 15 nm was studied using breakthrough curves and temperature programmed desorption. Thicknesses of $TiO_2$ films prepared by atomic layer deposition on silica were < 2 nm, and ~ 5 nm, respectively. For toluene adsorption, both dry and humid conditions were used. $TiO_2$-thin film significantly improved toluene adsorption capacity of silica under dry condition, whereas desorption of toluene from the surface as a consequence of displacement by water vapor was more pronounced for $TiO_2$-coated samples with respect to the result of bare ones. In the TPD experiments, silica with a thinner $TiO_2$ film (thickness < 2 nm) showed the highest reactivity for toluene oxidation to $CO_2$ in the absence and presence of water. We show that the toluene adsorption and oxidation reactivity of silica can be controlled by varying thickness of $TiO_2$ thin films.

• 전기학회논문지
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• 제56권6호
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• pp.1080-1086
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• 2007

The aim of this paper is to establish the optimum fabrication condition of specimens, using the Vapor Deposition Polymerization Method(VDPM), which is one of modesto prepare functional organic thin films using a dry process, and to develop a thin film type humidity sensor which has good humidity sensitive characteristics. The inner part of the film became denser and roughness of the film surface eased as curing temperature increased so that thickness of the film could be made uniform. This also shows the appropriate curing temperature was $250^{\circ}C$. The basic structure of the humidity sensor is a parallel capacitor which consists of three layers of Aluminum/Polyimide/Aluminum. The result of SEM and AFM measurement shows that the thickness of PI thin films decreased and the refraction increased as curing temperature increased, which indicates that a capacitance-type humidity sensor utilizing polyimide thin film is fabricated on a glass substrate. The characteristics of fabricated samples were measured under various conditions, and the samples had linear characteristics in the range of 20-80 %RH, independent of temperature change, and low hysteresis characteristic.

• 전자공학회논문지A
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• 제29A권9호
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• pp.29-35
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• 1992

Dielectric thin film of N/O (Si$_{3}N_[4}/SIO_{2}$) for high density stacked dynamic-RAM cell was formed by LPCVD and oxidation(Dry & pyrogenic oxidation methods) of the top Si$_{3}N_[4}$ film. The thickness, structure and composition of this film were measured by ellipsometer, high frequency C-V meter, high resolution TEM, AES, and SIMS. The thickness limit of Si$_{3}N_[4}$ film in making thin N/O structure layer was 7nm. In this experiment, the film with thinner than 7nm was not thick enough as oxygen diffusion barrier, and oxygen punched through the film and interfacial oxidation occurred at the phase boundary between Si$_{3}N_[4}$ and polycrystalline silicon electrode.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.1128-1133
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• 2008

Drying process in the thin film layer of sludge with the thickness less than a few millimeters has been investigated using the simple one-dimensional model. Thin film drying is usually used to dry the viscous materials like sewage sludge. The thin film layer of sludge is dried on the metallic surface through which thermal energy is supplied to the layer during drying. In order to solve the equations, the mass transfer rate on the drying surface should be determined. The mass flux of evaporated water vapor on the surface is estimated with the formulation given in the literature. The effect of heating temperature, film thickness, and air velocity on drying has been examined to figure out the drying characteristics of the sludge layer.

• 대한안과학회지
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• 제59권12호
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• pp.1103-1107
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• 2018

목적: 건성안 환자에서 조절펄스광선조사가 미치는 임상 효과 및 눈물막지질층 두께 변화에 대하여 알아보고자 하였다. 대상과 방법: 건성안에 대한 주관적인 불편감을 호소하는 환자 중 마이봄샘기능부전 소견을 보이며, 눈물막파괴시간이 10초 이하인 25명을 대상으로 후향적 연구를 시행하였다. 모든 대상자에 대한 조절펄스광선조사는 시술 당일, 15일, 45일 총 3회에 걸쳐 시행되었으며, 시술 전후 눈물막파괴시간, 쉬르머검사, 안구표면염색점수, 안구표면질환지수(Ocular Surface Disease Index, OSDI) 및 눈물막 지질층의 두께를 측정하여 비교 분석하였다. 결과: 조절펄스광선조사 시술 후 눈물막파괴시간은 $3.7{\pm}1.2$초에서 $4.4{\pm}2.1$초로 증가되어 통계적으로 유의한 차이를 보였으며(p=0.03), 쉬르머 검사 및 안구표면염색 점수 결과는 통계적으로 유의한 차이를 보였다(p<0.01, p=0.01). OSDI는 $39.5{\pm}17.5$점에서 $30.4{\pm}18.7$점으로 통계적으로 유의한 향상을 보였다(p=0.01). 눈물막지질층 두께는 통계적으로 유의한 변화를 보이지 않았다(p=0.49). 결론: 조절펄스광선조사 시술은 눈물막파괴시간, 쉬르머검사, 안구표면염색점수 및 주관적인 건성안 증상을 개선시키는 효과적인 치료 방법이라 생각된다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.816-818
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• 1998

In this paper Polyimide(PI) thin film are fabricated by vapor deposition polymerization(VDP) of dry process which are easy to control the film's thickness and hard to pollute due to volatile solvent. The FT-IR spectrum show that PAA thin films fabricated by VDP are changed to PI thin film by thermal curing. From AFM(Atomic Force Microscopy) experimental as the higher curing temperature. the thin film thickness decreases and roughness decresse.

• International Journal of Fluid Machinery and Systems
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• 제9권1호
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• pp.57-65
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• 2016

By high speed Liquid Droplet Impingement (LDI) on material, fluid systems are seriously damaged, therefore, it is important for the solution of the erosion problem of fluid systems to consider the effect of material in LDI. In this study, by using an in-house fluid/material two-way coupled method which considers reflection and transmission of pressure, stress and velocity on the fluid/material interface, high-speed LDI on wet/dry material surface is simulated. As a result, in the case of LDI on wet surface, maximum equivalent stress are less than those of dry surface due to damping effect of liquid film. Empirical formula of the damping effect function is formulated with the fluid factors of LDI, which are impingement velocity, droplet diameter and thickness of liquid film on material surface.

• Journal of Pharmaceutical Investigation
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• 제19권3호
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• pp.145-154
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• 1989

Methyl methacrylate-butyl methacrylate copolymer (MMBM)-povidone (PVP) films were investigated as a potential topical drug delivery system for the controlled release of econazole nitrate as a model drug. The effect of changes in film composition, drug concentration, film thickness, pH and temperature of release medium on the in vitro release of econazole nitrate were studied. The release rate constant was found to be increased with increasing povidone content in dry films. Drug release followed zero-order kinetics in the initial stage and then release rate increased gradually with time, espicially in the films having larger proportions of PVP. The release rate was found to be dependent on drug content, film thickness, the pH and temperature of release medium. Antimicrobial test showed that microbial growth was inhibited markedly with increasing proportions of PVP in films. Also drug content and film thickness affected the antimicrobial activity.

• 전자공학회논문지A
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• 제29A권9호
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• pp.20-28
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• 1992

Dielectric thin film of N/O ($Si_{3]N_{4}/SiO_{2}$) for high density stacked dynamic-RAM cell was formed by LPCVD and oxidation(dry & pyrogenic oxidation methods) of the top 7nm $Si_{3]N_{4}$ film. The thickness, structure and composition of this film were measured by ellipsometer, high resolution TEM, AES and SIMS. The insulating characteristics(I-V characteristics) were investigated by HP 4145, and the characteristics of TDDB (Time Dependent Dielectric Breakdown) were evaluated by using CCST(Current Constant Stress Time) method. In this experiment, The optimum oxidation condition for preparation of good insulating and TDDB characteristics of N/O film was pyrogenic oxidation at 85$0^{\circ}C$ for 30 minutes. The leakage current was reduced from 400pA to 7.5pA when SiO$_{2}$ film with thickness of 2nm was formed on the top of $Si_{3]N_{4}$ film by the pyrogenic oxidation method.

• 한국정밀공학회지
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• 제30권6호
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• pp.596-600
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• 2013

We report here on the processing and manufacturing of thin film for printed electronics by micro-gravure coating system. The micro-gravure coating systems are consisted of various modules such as web and system tension controller, micro-gravure coating units, dispenser and hybrid dry units (UV, NIR, Hot air). Especially, for the optimization of system, the number of idle roller was minimized and tension isolating infeeder was included. Also, we applied four patterns circle, 45 degree, square and 35 degree for the optimizing coating thickness. The micro-gravure coating system which applied various patterns to enable continuous coating process and fast coating time compare with conventional batch coating system. In this paper, introduce of micro-gravure coating system and testing results of coating thickness (20~700nm), coating time (1~2sec) and surface roughness (3~12nm) by using micro-gravure coating system.