• Title/Summary/Keyword: Dispensing process

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Development of Bonding Dispenser and Press Machine to Regenerate Retainer Ring for Semiconductor CMP Process (반도체 CMP 공정용 리테이너 링 재생을 위한 본딩 디스펜서 및 프레스 머신 개발)

  • Hyoung-Keun Park
    • The Journal of the Korea institute of electronic communication sciences
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    • v.19 no.3
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    • pp.507-514
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    • 2024
  • In the semiconductor manufacturing line, continuous efforts are being made to reduce the cost of products produced, and the demand for this is accelerating in the chemical mechanical polishing(CMP) process, and a representative example of these cost reduction items is the 5-Zone Ring. After about 150 hours of use in the CMP process, the thickness of the ring decreases to less than 1 mm and must be replaced with a new product. Therefore, in this study, bonding dispensers and press machines with a dispensing amount error of 10g±0.8% or less and a pressure uniformity of ±1.8% or less were developed to reduce semiconductor manufacturing costs by repeatedly regenerating worn parts of the retainer ring, and to minimize environmental pollution caused by industrial waste treatment.

Nano-patterning technology using an UV-NIL method (UV-NIL(Ultraviolet-Nano-Imprinting-Lithography) 방법을 이용한 나노 패터닝기술)

  • 심영석;정준호;손현기;신영재;이응숙;최성욱;김재호
    • Journal of the Korean Vacuum Society
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    • v.13 no.1
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    • pp.39-45
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    • 2004
  • Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. A 5${\times}$5${\times}$0.09 in. quartz stamp is fabricated using the etch process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. FAS(Fluoroalkanesilane) is used as a material for anti-adhesion surface treatment on the stamp and a thin organic film to improve adhesion on a wafer is formed by spin-coating. The low viscosity resin droplets with a nanometer scale volume are dispensed on the whole area of the coated wafer. The UV-NIL experiments have been performed using the EVG620-NIL. 370 nm - 1 m features on the stamp have been transferred to the thin resin layer on the wafer using the multi-dispensing method and UV-NIL process. We have measured the imprinted patterns and residual layer using SEM and AFM to evaluate the potential of the process.

Study on Correlation-based Feature Selection in an Automatic Quality Inspection System using Support Vector Machine (SVM) (SVM 기반 자동 품질검사 시스템에서 상관분석 기반 데이터 선정 연구)

  • Song, Donghwan;Oh, Yeong Gwang;Kim, Namhun
    • Journal of Korean Institute of Industrial Engineers
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    • v.42 no.6
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    • pp.370-376
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    • 2016
  • Manufacturing data analysis and its applications are getting a huge popularity in various industries. In spite of the fast advancement in the big data analysis technology, however, the manufacturing quality data monitored from the automated inspection system sometimes is not reliable enough due to the complex patterns of product quality. In this study, thus, we aim to define the level of trusty of an automated quality inspection system and improve the reliability of the quality inspection data. By correlation analysis and feature selection, this paper presents a method of improving the inspection accuracy and efficiency in an SVM-based automatic product quality inspection system using thermal image data in an auto part manufacturing case. The proposed method is implemented in the sealer dispensing process of the automobile manufacturing and verified by the analysis of the optimal feature selection from the quality analysis results.

A Study on the Improvement of the Domestic Maintenance Capability Development System of Military for Overseas Maintenance Items through the Case Study of Intermittent Failure of an Avionics (항전계통 간헐결함 사례 분석을 통한 군의 해외 정비품 국내정비능력 개발제도 개선방안 고찰)

  • Lee, Hoyong
    • Journal of the Korean Society for Aviation and Aeronautics
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    • v.26 no.2
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    • pp.68-75
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    • 2018
  • A flare from an Air Force fighter was abnormally dispensed during the landing. To determine the cause of the abnormal dispensing, fracture analysis, signal analysis and reproduction experiments based on physics of failures were performed. The primary cause of the failure was analyzed to be due to an intermittent fault of an internal circuit card in the AN/ALE-40 chaff/flare dispenser by a broken lid of a capacitor, and the root cause which had derived the primary cause was considered to be an improper handling during the domestic maintenance which were changed from the overseas maintenance due to the DMSMS problem. Therefore, the overall process of the maintenance capability development system was reviewed and alternative ways that considers maintenance error decision aid(MEDA) for system improvement were suggested to prevent further failures.

Comparison of Conditions for Cell Death-Inducing Agents Using a High Throughput-Compatible Nuclear Staining Assay (핵 염색을 이용한 세포사멸 유도물질 스크리닝의 조건 비교)

  • Lee, Sang-Han
    • Journal of Life Science
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    • v.18 no.9
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    • pp.1312-1315
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    • 2008
  • High throughput-drug screening plays a pivotal role for early stage of drug discovery process. In the course of assay development for screening of cell death-inducing agents, a protocol that is simple, time-saving, and high throughput-compatible was designed which was confirmed that the protocol can be worked by a HTS-compatible machine. In 96-well format, PC-3 cancer cells (1${\times}10^{4}$ cells/ml) were cultured for 24 hr. After 24 h-incubation with various medicinal plants extracts, the cells were then stained with DAPI for 30 min. The fluorescence intensity of the stained cells was measured semi-automatically with a multilabel counter. To test whether the present assay system effectively works, we screened about 850 medicinal plant extracts, and selected 1 positive crude extracts that contained cell death-inducing activity. These results suggest that the protocol is highly amenable to HTS implementation for a cell death-inducing agent(s).

Properties of Perovskite Materials and Devices Fabricated Using the Solvent Engineered One-Step Spin Coating Method (단일 스텝 스핀 코팅 방법에서 증발 제어 공정 변경에 따른 페로브스카이트 박막 물성 및 태양 전지 소자 특성 변화에 관한 연구)

  • Oh, Jungseock;Kwon, Namhee;Cha, DeokJoon;Yang, JungYup
    • New Physics: Sae Mulli
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    • v.68 no.11
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    • pp.1208-1214
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    • 2018
  • The one-step spin coating method is reported as an excellent thin film process because it can be easily used to fabricate high-quality methyl-ammonium lead tri-iodide ($MAPbI_3$) perovskite layers. One of the important things in the one-step spin coating method towards obtaining high-quality $MAPbI_3$ layers is the anti-solvent (AS) engineering, which consists of an one-step deposition of the $MAPbI_3$ film and dripping of the AS. The properties of the $MAPbI_3$ layer were found to be strongly influenced by the amount, dispensing speed, and spraying time of the AS solution. The $MAPbI_3$ solution was prepared by dissolving lead iodide and methyl-ammonium iodide in N,N-dimethylformamide and adding N,N-dimethyl sulfoxide. Diethyl ether (DE) was used for the AS solution. The results indicate that a $MAPbI_3$ layer appropriately sprayed with DE is beneficial for improving film quality and device efficiency because nucleation of $MAPbI_3$ layer is affected by the characteristics of DE, which affect the film's crystallinity, density, and surface morphology. The $MAPbI_3$ layer, which was optimized by using 0.7 mL of DE, a 3.03 mL/sec dispensing speed, and a 7 second time to spray after spinning showed the best efficiency of 13.74%, which was reproducible.

Pharmaceutical Affairs Act Issues Related to Self-administration of Medicines by Medical Personnel (의료인의 자가 투약 관련 약사법 쟁점)

  • Sungmin Park
    • The Korean Society of Law and Medicine
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    • v.24 no.3
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    • pp.3-26
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    • 2023
  • This paper reviewed the Pharmaceutical Affairs Act issues in case of self-administration of medicines by medical personnel without going through the general process (prescription, dispensing, distribution, administration). If a medical personnel self-medicates, the medicine supplier or medical personnel may be subject to criminal punishment under the Pharmaceutical Affairs Act. The core reprehensibility of the punishment lies in undermining the order in distribution of medicines stipulated in the Pharmaceutical Affairs Act. First, the sale of medicines by a medicine supplier to medical personnel may be the violation of Article 47 of the Pharmaceutical Affairs Act. However, if it was distributed for the case where medical personnels can dispense it directly under the Pharmaceutical Affairs Act, it can be justified under the general provision of the Criminal Act (justifiable act, the exclusion of illegality). If medicine suppliers distribute medicines knowing that the medical personnel acquires medicines for selfadministration, they can be punished as the violation of Article 47 of Pharmaceutical Act. Second, when a medical personnel acquires a medicine for the purpose of self-administration, the medicine supplier distributes the medicine under the false pretense that the medical personnel acquires the medicine for the case in which the medical personnel can directly dispense the medicine according to the Pharmaceutical Affairs Act. At this time, even if the medicine supplier has received all the payment for the medicines, the distribution of the medicines by deceit can constitute the fraud under the Criminal Act. Third, self-administration by medical personnel is a the violation of Article 23 of the Pharmaceutical Affairs Act. It is not a justifiable act under the general provision of the Criminal Act. This is because it is the abuse of the special status granted to medical personnel in the Pharmaceutical Affairs Act, which undermines the order in distribution of medicines.

Faith Formation Through Guided Participation in Practice (신앙형성과 원칙에 따르는 실천의 참여)

  • Joyce Ann Mercer
    • Journal of Christian Education in Korea
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    • v.73
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    • pp.39-54
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    • 2023
  • In this study I want to explore faith formation through the framework of practice. First, I will describe discipleship as a lifelong process of identity formation, defining Christian religious education as a faith community's intentional work of equipping people to walk in the way of Jesus through apprenticeship in faith practices. I will argue that this process is more about the teaching of practices and engaging in theological reflection on practices than it is about dispensing correct information. This idea is not original with me, but has been expounded by many others particularly in the past decade in the U.S., as part of a larger movement within theological discourse emphasizing the centrality of practice. Second, I will describe some resources from educational theorists that can help us to understand what it means to educate through practices toward an identity as Christians. And finally, I will suggest that in our complex, broken and wounded world, as Christian religious educators we especially have a calling to equip disciples in two urgent faith practices: earth-care, and dealing with conflict.

Evaluation for Adhesion Characteristics of UV-curable Bump Shape Stamp for Transfer Process (전사공정을 위한 UV 경화성 범프형 스탬프의 점착특성 평가)

  • Jeong, Yeon-Woo;Kim, Kyung-Shik;Lee, Chung-Woo;Lee, Jae-Hak;Kim, Jae-Hyun;Kim, Kwang-Seop
    • Tribology and Lubricants
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    • v.32 no.3
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    • pp.75-81
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    • 2016
  • Future electronics such as electronic paper and foldable cellphone are required to be flexible and transparent and should have a high performance. In order to fabricate the flexible electronics using flexibility transfer process, techniques for transferring various devices from rigid substrate onto flexible substrate by elastomeric stamp, have been developed. Adhesion between the elastomeric stamp and various devices is crucial for successful transfer process. The adhesion can be controlled by the thickness of the stamp, separation velocity, contact load, and stamp surface treatment. In this study, we fabricated the bump shape stamp consisting of a UV-curable polymer and investigated the effects of curing condition, separation velocity, and contact load on the adhesion characteristics of bumps. The bumps with hemispherical shape were fabricated using a dispensing process, which is one of the ink-jet printing techniques. Curing conditions of the bumps were controlled by the amount of UV irradiation energy. The adhesion characteristics of bumps are evaluated by adhesion test. The results show that the pull-off forces of bumps were increased and decreased as UV irradiation energy increased. For UV irradiation energies of 300 and 500 mJ/cm2, the pull-off forces were increased as the separation velocity increased. The pull-off forces also increased with the increase of contact load. In the case of UV irradiation energy above 600 mJ/cm2, however, the pull-off forces were not changed. Therefore, we believe that the bump shape stamp can be applied to roll-based transfer process and selective transfer process as an elastomeric stamp.

A Study on the Computational Design of Static Mixer and Mixing Characteristics of Liquid Silicon Rubber using Fluidic Analysis for LED Encapsulation (LED Encapsulation을 위한 스태틱 믹서의 전산 설계 및 유동해석을 이용한 액상 실리콘의 혼합 특성에 대한 연구)

  • Cho, Yong-Kyu;Ha, Seok-Jae;Huxiao, Huxiao;Cho, Myeong-Woo;Choi, Jong Myeong;Hong, Seung-Min
    • Design & Manufacturing
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    • v.7 no.1
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    • pp.55-59
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    • 2013
  • A Light Emitting Diode(LED) is a semiconductor device which converts electricity into light. LEDs are widely used in a field of illumination, LCD(Liquid Crystal Display) backlight, mobile signals because they have several merits, such as low power consumption, long lifetime, high brightness, fast response, environment friendly. In general, LEDs production does die bonding and wire bonding on board, and do silicon and phosphor dispensing to protect LED chip and improve brightness. Then lens molding process is performed using mixed liquid silicon rubber(LSR) by resin and hardener. A mixture of resin and hardener affect the optical characteristics of the LED lens. In this paper, computational design of static mixer was performed for mixing of liquid silicon. To evaluate characteristic of mixing efficiency, finite element model of static mixer was generated, and fluidic analysis was performed according to length of mixing element. Finally, optimal condition of length of mixing element was applied to static mixer from result of fluidic analysis.

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