• Journal of the Semiconductor & Display Technology
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• v.8 no.1
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• pp.1-5
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• 2009

Typically, single-wafer wet etching is done by dispensing chemical onto the front and back side of spin wafer. The wafer is fixed by a number of chuck pins, which obstruct the chemical flow and would result in the incomplete removal of the remaining film, which can become a source of contamination in the next process. In this paper, we introduce a novel design of wafer chuck, in which chuck pins are groupped into two and each group of pins fixes the substrate alternatively. Two groups of chuck pins fix the high-speed spin substrate with non contact method using a magnetic material. The actual process has been executed to observe the effectiveness of this new wafer chuck. It was found that the new wafer chuck performed better than the conventional wafer chuck for removing the remaining film from the bevel and edge side of substrate.

• Journal of Sensor Science and Technology
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• v.22 no.5
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• pp.352-356
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• 2013

We developed a novel fabrication method of polydimethylsioxane (PDMS) lens, which can easily control the shapes of the lens using soft lithography with common photolithography and water droplet molding. A mold for PDMS lens was prepared by patterning of hydrophobic photoresist on the hydrophilic substrate and dispensing small water droplets onto the predefined hydrophilic patterns. The size of patterns determined the dimension of the lens and the dispensed volume of the water droplet decided the radius of curvature of the PDMS lens independently. The water droplet with photoresist pattern played a robustly fixed mold for lens due to difference in wettability. The radius of curvature could be calculated theoretically because the water droplets could approximate spherical cap on the substrate. Finally, concave and convex PDMS lenses which could reduce or magnify optically were fabricated by curing of PDMS on the prepared mold. The measured radii of the fabricated PDMS lenses were well matched with the estimated values. We believe that our simple and efficient fabrication method can be adopted to PDMS microlens and extended to micro optical device, lab on a chip, and sensor technology.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1116-1118
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• 2005

We studied laser crystallization of amorphous silicon films prepared at ultra low temperatures ($<150^{\circ}C$). Amorphous silicon films having a low content of hydrogen were deposited by using catalytic chemical vapor deposition method. Influence of process parameters on the hydrogen content was investigated. Laser crystallization was performed dispensing with the preliminary dehydrogenation process. Crystallization took place at a laser energy density value as low as $70\;mJ/cm^2$, and the grain size increased with increasing the laser energy. The ELA crystallization of Catalytic CVD a-Si film is a promising candidate for Poly-Si TFT in active-matrix flexible display on plastic substrates.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.8
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• pp.88-93
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• 2020

The goal of this study is to determine the influence of major factors on the spiral surface microparticle injection machining of cylindrical specimens by the statistical method ANOVA. Before the experiment, rod-shaped test specimens and jigs for helical surface spraying were prepared, and the surface roughness was measured with a surface roughness meter. The injection particle, nozzle diameter, and injection pressure were the primary parameters of the experiment. Other factors that were considered were injection height, injection time, revolutions, and feed distance. The surface roughness after machining was measured, and the effects of the surface roughness data on the primary factors were determined with ANOVA.

• KSBB Journal
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• v.28 no.4
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• pp.254-259
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• 2013

Herein we present a diagnostic paper chip that can quantitatively detect albumin without external electronic reader and dispensing apparatus. We fabricated a diagnostic paper chip device by printing wax barrier on the paper and wicking it with citrate buffer and tetrabromophenol blue to detect albumin in sample solution. The paper chip is so simple that we dropped a sample solution at sample pad and measure the ratio of two travel distances of the sample solvent and albumin under the name of retention factor. Our result confirmed that the retention factor was constant in the samples with same concentration of albumin and useful determinant for the measurement of albumin concentration. The paper chip is affordable and equipment-free, and close to ideal point-of-care test in accordance with the assured criteria, outlined by the World Health Organization. We assume that this diagnostic paper chip will expand the concept of colorimetric determination and provide a inexpensive diagnostic method to aging society and developing country.

• Journal of the Korean Institute of Gas
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• v.20 no.4
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• pp.15-24
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• 2016

In the semiconductor industry, the risk of chemical accidents due to miscibility between the many types of chemicals and leakage of toxic chemicals has increased. In order to evaluate the reactivity with miscibility of chemicals, experimental method is the most reliable, but there is a time and cost limitations to be evaluated through experiment all the chemicals. In the study, the reactivity of process gases in the semiconductor industry was considered by the CRW (Chemical Reactivity Worksheets) 3.0 program developed by US NOAA (National Oceanic and Atmospheric Administration) and EPA. The reactivity informations with the miscibility of process gases for semiconductor industry provided, and also a KOSHA guide for the storage/separation of gas cylinders in dispensing cabinets in the semiconductor industry was proposed.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.32 no.1
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• pp.48-54
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• 1987

To search for the optimal nitrogen application method for the machine transplanting to Dongjinbyeo, compared to conventional method, in the various methods of nitrogen split application at different growth stages of rice plant. This experiment was performed at Honam Crop Experiment Station, in 1985 year. The results were as followed; the nitrogen contents of leaf blade was the highest at maximum tillering stage under the conventional method and reduction division stage under the nitrogen top-dressing at panicle initiation and 5 times split application of nitrogen for the whole rice growth stages. CGR, RGR and NAR after heading was highest under 5 times split application of nitrogen for the whole rice growth stages. Relationships between CGR and NAR, NAR and RGR, CGR and RGR showed the positive correlation significantly at each rice growth stage, respectively, and showed more high correlation according to further rice growth stages. The degree of contribution of CGR to rice grain yield was the highest at 20 days after heading. Rice grail: yield was higher under top-dressing of nitrogen at panicle initiation and basal application (30%) + 4 times equal dispensing top-dressing after basal application of nitrogen than conventional method.

• Journal of the Korean Vacuum Society
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• v.13 no.1
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• pp.39-45
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• 2004

Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. A 5${\times}$5${\times}$0.09 in. quartz stamp is fabricated using the etch process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. FAS(Fluoroalkanesilane) is used as a material for anti-adhesion surface treatment on the stamp and a thin organic film to improve adhesion on a wafer is formed by spin-coating. The low viscosity resin droplets with a nanometer scale volume are dispensed on the whole area of the coated wafer. The UV-NIL experiments have been performed using the EVG620-NIL. 370 nm - 1 m features on the stamp have been transferred to the thin resin layer on the wafer using the multi-dispensing method and UV-NIL process. We have measured the imprinted patterns and residual layer using SEM and AFM to evaluate the potential of the process.

• Journal of The Korea Institute of Healthcare Architecture
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• v.21 no.3
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• pp.69-77
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• 2015

Purpose: Under a trend of hospitals that repeated expansion in line with fast increasing factors of medical demands in the past, medical buildings where clinic businesses have regularly gathered in one building have exponentially increased since separation of prescribing and dispensing in 2000. Thus, this study aims at analyzing characteristics of architectural plan of the current medical buildings, identifying strengths and weaknesses through Post Occupancy Evaluation and suggesting an architectural planning method of medical buildings to be planned in the future. Methods: Scope of study has been limited to 23 medical buildings that are registered in the building register as medical buildings out of the Class 1 neighborhood facilities build as 5 floors or more in Cheongju region since 2000 and being actually used for the usage. Study method is to define concepts of the medical buildings through literature review and advanced researches, analyze characteristics of architectural plan through drawing analysis and site survey. Results: General characteristics of architectural plans for the medical buildings in Cheongju have been analyzed. There are the most frequencies in general commercial area and semi-residential area, most of them are reinforced concrete structure and the Class 1 neighborhood facilities. Average land area is $482.68m^2$, gross floor area $3720.8m^2$, the number of underground floors level 1.16, the number of floors level 7.76, total number of floors 8.92, the building-to-land ratio 67.28%, floor area ratio 452.6%, height 31.44m, and the number of parked vehicles 24.16. Implications: This research will contribute to the establishment of the planning methods which increase the quality of Medical Buildings in Cheongju.

• Membrane Journal
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• v.26 no.1
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• pp.26-31
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• 2016

Polycaprolactone (PCL) has been fabricated into the membrane type scaffolds of 3 dimensional pore network for the tissue engineering applications by the blade method of salt (NaCl) leaching and solution casting. In this study, the experimental designs have each conditions of drying temperature, salt particle size, salt content. The modified dispensing pump connected up to homogenizing mixer system is used for mixing the $PCL/CHCl_3$ solution and NaCl particles. The membrane fabricated use by the film applicator to poured mixed solution on the glass plate. The great pore by NaCl particles and the small pore by the evaporated $CHCl_3$ in the frame wall of great pores are multiply formed in membrane scaffolds.