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http://dx.doi.org/10.7842/kigas.2016.20.4.15

Reactivity Considerations with Miscibility of Process Gases in Semiconductor industry  

Lee, Keun Won (Occupational Safety & Health Research Institute, KOSHA)
Publication Information
Journal of the Korean Institute of Gas / v.20, no.4, 2016 , pp. 15-24 More about this Journal
Abstract
In the semiconductor industry, the risk of chemical accidents due to miscibility between the many types of chemicals and leakage of toxic chemicals has increased. In order to evaluate the reactivity with miscibility of chemicals, experimental method is the most reliable, but there is a time and cost limitations to be evaluated through experiment all the chemicals. In the study, the reactivity of process gases in the semiconductor industry was considered by the CRW (Chemical Reactivity Worksheets) 3.0 program developed by US NOAA (National Oceanic and Atmospheric Administration) and EPA. The reactivity informations with the miscibility of process gases for semiconductor industry provided, and also a KOSHA guide for the storage/separation of gas cylinders in dispensing cabinets in the semiconductor industry was proposed.
Keywords
CRW 3.0; reactivity; semiconductor industry; gas cylinders; cabinets;
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  • Reference
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