Preparatio and properties of the paraelectric PLT thin film for the cpapcitor dielectrics of ULSI DRAM (ULSI DRAM의 캐패시터 절연막을 위한 Paraelectric PLT 박막의 제작과 특성)
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- Journal of the Korean Institute of Telematics and Electronics A
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- v.32A no.8
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- pp.78-85
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- 1995