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http://dx.doi.org/10.4313/JKEM.2006.19.3.222

Processing and Properties of RAINBOW Piezoelectric Actuator  

Paik Jong-Hoo (요업기술원 전자소재기술개발사업단)
Lim Eun-Kyeong (요업기술원 전자소재기술개발사업단)
Kim Chang-il (요업기술원 전자소재기술개발사업단)
Lee Mi-Jae (요업기술원 전자소재기술개발사업단)
Jee Mi-Jung (요업기술원 전자소재기술개발사업단)
Choi Byung-Hyun (요업기술원 전자소재기술개발사업단)
Kim Sei-Ki (요업기술원 전자소재기술개발사업단)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.3, 2006 , pp. 222-227 More about this Journal
Abstract
RAINBOW(Reduced And Internally Biased Oxide Wafers) are a new class of high-displacement, piezoelectric actuator produced by selectively removing oxygen from one surface of ceramic using a high-temperature chemical reduction process. In this paper, RAINBOW actuator materials of $0.4Pb(Ni_{1/3}Nb_{2/3})O_3-0.6Pb(Zr_{x}Ti_{1-x})O_3$ ceramics were prepared. Its dielectric and piezoelectric properties were investigated in the vicinity of MPB. The piezoelectric properties showed the maximum value of ${\epsilon}r$ = 4871, $d_{33}$ = 610 ($10^{-12}$ m/V), $d_{31}$ = -299 ($10^{-12}$ m/V), $k_{33}$ = $71\%$, Qm = 70, in $0.4Pb(Ni_{1/3}Nb_{2/3})O_{3}-0.6Pb(Zr_{405}Ti_{595})O_3$ composition sintered at $1250^{\circ}C$. The strain - electric field characteristics of RAINBOW actuator were significantly improved comparison with the conventional bulk actuator. The prepared RAINBOW actuator showed about $390\;{\mu}m/100\;V$ displacement.
Keywords
RAINBOW; Piezoelectric; Actuator; Reduction; High-displacement;
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