• Title/Summary/Keyword: Diamond-like Carbon(DLC)

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Optical Properties of DLC-coated ZnS Substrates in the Mid-infrared Region (중적외선 영역의 DLC 코팅된 ZnS 기판의 광학 특성)

  • Kwon, Tae-Hyeong;Yeo, Seo-Yeong;Kim, Chang-Il;Nahm, Sahn;Kwon, Min-Chul;Chu, Byoung-Uck;Paik, Jong-Hoo
    • Journal of Sensor Science and Technology
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    • v.28 no.2
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    • pp.101-105
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    • 2019
  • ZnS substrates with excellent transmittance in the mid-infrared region ($3-5{\mu}m$) were prepared using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon(DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance. More specifically DLC was coated using CVD with an Ar and $C_2H_2$ mixed gas, and Ge was used as the bonding layer. During CVD, the bias voltage was fixed to 500 V and analyzed by Fourier transform infrared spectroscopy (FT-IR), nanoindenter, scanning electron microscope and energy dispersive spectrometry. Results of hardness analysis using the nanoindenter, showed that DLC coating increased from 5.9 to 17.7 GPa after deposition. The FT-IR spectroscopy results showed that, in the mid-infrared region ($3-5{\mu}m$), the average transmittance of the samples with DLC coating on one and both sides increased by approximately 6% and approximately 11.2% respectively. In conclusion, the DLC coating improved the durability and transmittance of the ZnS substrates.

A Research on DLC Thin Film Coating of a SiC Core for Aspheric Glass Lens Molding (비구면 유리렌즈 성형용 SiC 코어의 DLC 코팅에 관한 연구)

  • Park, Soon-Sub;Won, Jong-Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.12
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    • pp.28-32
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    • 2010
  • Technical demands for aspheric glass lens formed in market increases its application from simple camera lens module to fiber optics connection module in optical engineering. WC is often used as a metal core of the aspheric glass lens, but the long life time is issued because it fabricated in high temperature and high pressure environment. High hard thin film coating of lens core increases the core life time critically. Diamond Like Carbon(DLC) thin film coating shows very high hardness and low surface roughness, i.e. low friction between a glass lens and a metal core, and thus draw interests from an optical manufacturing industry. In addition, DLC thin film coating can removed by etching process and deposit the film again, which makes the core renewable. In this study, DLC films were deposited on the SiC ceramic core. The process variable in FVA(Filtered Vacuum Arc) method was the substrate bias-voltage. Deposited thin film was evaluated by raman spectroscopy, AFM and nano indenter and measured its crystal structure, surface roughness, and hardness. After applying optimum thin film condition, the life time and crystal structure transition of DLC thin film was monitored.

Effects of Thermal Treatment on Structural Properties of DLC Films Deposited by FCVA Method (FCVA 방법으로 증착된 DLC 박막의 열처리에 따른 구조적 물성 분석)

  • 김영도;장석모;박창균;엄현석;박진석
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.52 no.8
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    • pp.325-329
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    • 2003
  • Effects of thermal treatment on the structural properties of diamond-like carbon (DU) films were examined. The DLC films were deposited by using a modified filtered cathodic vacuum arc (FCVA) deposition system and by varying the negative substrate bias voltage, deposition time, and nitrogen flow rate. Thermal treatment on DLC films was performed using a rapid thermal annealing (RTA) process at $600^{\circ}C$ for 2min. Raman spectroscopy, x-ray photoemission spectroscopy (XPS), atomic force microscope (AFM), and surface profiler were used to characterize the I$_{D}$I$_{G}$ intensity ratio, sp$^3$ hybrid carbon fraction, internal stress, and surface roughness. It was found for all the deposited DLC films that the RTA-treatment results in the release of internal compressive stress, while at the same time it leds to the decrease of sp$^3$ fraction and the increase of I$_{D}$I$_{G}$ intensity ratio. It was also suggested that the thermal treatment effect on the structural property of DLC films strongly depends on the diamond-like nature (i.e., sp$^3$ fraction) of as-deposited film.ed film.

The noble method for superhydrophobic thin film coating

  • Seo, Hyeon-Uk;Kim, Gwang-Dae;Jeong, Myeong-Geun;Kim, Dong-Un;Kim, Myeong-Ju;;Kim, Yeong-Dok;Im, Dong-Chan;Lee, Gyu-Hwan;Eom, Seong-Hyeon;Lee, Jae-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.496-496
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    • 2011
  • A very simple and cost-effective method for fabrication of SiOx-incorporated diamond-like carbon (DLC) thin films at a preparation temperature of less than $200^{\circ}C$ was developed. Since DLC coating can be prepared not under vacuum but atmospheric conditions without any carrier gas flow, not only wafers but also powderic substrates can be used for DLC coating. Formation of DLC coating could result in appearance of superhydrophobic behaviors, which was sustained in a wide range of pH (1~14). DLC-coated surfaces selectively interacted with toluene in a toluene/water mixture. These results imply that our preparation method of the DLC coating can be useful in many application fields such as creating self-cleaning surfaces, and water and air purification filters.

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Effects of oxygen, hydrogen and nitrogen addition in the synthesis of diamond-like carbon films (DLC 합성시 산소, 수소 및 질소 첨가의 효과)

  • 황민선;이종무
    • Journal of the Korean Vacuum Society
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    • v.8 no.2
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    • pp.165-171
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    • 1999
  • Diamond-like carbon(DLC) films were synthesized using the rf-plasma CVD technique with the addition of small amounts of nitrogen and oxygen to a gas mixture of $CH_4$ and $H_2$. The gas flow ratio of $CH_4$ to $H_2$ was 2.4:1, and 3% , 13.6% of nitrogen were added to the gas mixture of $CH_4$ and $H_2$ for the deposition of DLC films. The film stress tended to decrease as the nitrogen concentration increased from 3% to 13.6%, probably due to the decrease of the number of the interlink between carbon atoms. The residual stress tended to slightly decrease when 3% of oxygen was added. Scratch tests were performed to investigate the adhesion between the DLC films and the Ti intelayer after pretreating the TiN surface with direct hydrogen plasma. The adhesion was enhanced by adding nitrogen and oxygen to the $CH_4$ and $H_2$ gas mixture. The adhesion for the 3% nitrogen addition was better than that for the 13.6% nitrogen addition. The Vicker's hardness of the DLC films was measured to be 1100Hv.

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Pulsed Magnetron Sputtering Deposit ion of DLC Films Part I : Low-Voltage Bias-Assisted Deposition

  • Oskomov, Konstantin V.;Chun, Hui-Gon;You, Yong-Zoo;Lee, Jing-Hyuk;Kim, Kwang-Bok;Cho, Tong-Yul;Sochogov, Nikolay S.;Zakharov, Alexender N.
    • Journal of the Korean institute of surface engineering
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    • v.36 no.1
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    • pp.27-33
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    • 2003
  • Pulsed magnetron sputtering of graphite target was employed for deposition of diamond-like carbon (DLC) films. Time-resolved probe measurements of magnetron discharge plasma have been performed. It was shown that the pulsed magnetron discharge plasma density ($∼10^{17}$ $m^{-3}$ ) is close to that of vacuum arc cathode sputtering of graphite. Raman spectroscopy was sed to examine DLC films produced at low ( $U_{sub}$ / < 1 kV) pulsed bias voltages applied to the substrate. It has been shown that maximum content of diamond-like carbon in the coating (50-60%) is achieved at energy per deposited carbon atom of $E_{c}$ =100 eV. In spite of rather high percentage of $sp^3$-bonded carbon atoms and good scratch-resistance, the films showed poor adhesion because of absence of ion mixing between the film and the substrates. Electric breakdowns occurring during the deposition of the insulating DLC film also thought to decrease its adhesion.

Properties of Diamond-like Carbon(DLC) Thin Films deposited by Negative Ion Beam Sputter (I) (Negative ion beam sputter 법으로 증착한 DLC 박막의 특성 (I))

  • Kim, Dae-Yeon;Gang, Gye-Won;Choe, Byeong-Ho
    • Korean Journal of Materials Research
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    • v.10 no.7
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    • pp.459-463
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    • 2000
  • Direct use of negative ions for modification of materials has opened new research such as charging-free ion implantation and new materials syntheses by pure kinetic bonding reactions. For these purposes, a new solid-state ce-sium ion source has been developed in the laboratory scale. In this paper, diamond like carbon(DLC) films were prepared on silicon wafer by a negative cesium ion gun. This system does not need any gas in the chamber; deposition occurs under high vacuum. The ion source has good control of the C- beam energy(from 80 to 150eV). The result of Raman spectrophotometer shows that the degree of diamond-like character in the films, $sp^3$ fraction, increased as ion beam energy increases. The nanoindentation hardness of the films also increases from 7 to 14 GPa as a function of beam energy. DLC films showed ultra-smooth surface(Ra~1$\AA$)and an impurity-free quality.

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Adhesion of Diamond-like Carbon Thin Film Prepared by Filtered Vacuum Arc: The Effect of Substrate Bias Voltage (Filtered Vacuum Arc를 이용한 WC-Co상 DLC 박막 증착에서의 기판 전압에 따른 밀착력 특성 평가)

  • Kim, Gi-Taek;Yang, Won-Gyun;Lee, Seung-Hun;Kim, Do-Geun;Kim, Jong-Guk
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2013.05a
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    • pp.214-214
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    • 2013
  • Diamond like carbon(DLC) 박막은 고경도, 저마찰, 내스크래치 특성을 요구하는 표면기술 응용분야에 널리 사용되며, 대면적 저가 코팅 방법 개발 및 물성 조절 기술이 요구된다. 본 연구에서는 Filtered Vacuum Arc (FVA)를 통해 증착되는 Hydrogen-free DLC 박막의 밀착력 제어를 위한 증착시 기판 전압에 따른 증착 및 밀착력 특성을 분석하였다. 기판전압이 0~-150 V 까지 변화함에 따른 스크래치 테스트 결과를 통해 최적 증착 조건을 도출하였다.

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Deposition of Diamond-Like Carbon Films on the Air Conditioner Cold Fin (에어컨용 냉각핀의 DLC 박막합성)

  • 김태규;한진영;김상록;김한기
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.242-242
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    • 2003
  • DLC(Diamond-Like Carbon)는 높은 경도, 내마모성, 화학적 안정성, 생체친화성 및 열전도율이 우수하여 VTR 헤드드럼, CRT Gun, Video Tape, 인공골절, 면도날 등에 널리 사용되고 있다. 에어컨용 Al 냉각핀은 높은 냉각성능의 향상으로 인한 전기절전 효과와 내부식성 및 친수성 등이 요구된다. DC-Sputtering법에 의한 에어컨용 알루미늄 냉각핀에 인가전압의 변화 (300V, 500V, 600V)와 증착시간 (3시간, 5시간 증착)의 변화에 따른 DLC 박막을 합성하여 AFM, XRD 및 Raman spectroscopy 측정을 통하여 분석하고, Micro Vickers Hardness 및 Roughness 등을 측정하였다.

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