Pulsed Magnetron Sputtering Deposit ion of DLC Films Part I : Low-Voltage Bias-Assisted Deposition |
Oskomov, Konstantin V.
(Inst. of High Current Electronics, Siberian Div. of RAS)
Chun, Hui-Gon (School of Materials Science and Engineering, ReMM, University of Ulsan) You, Yong-Zoo (School of Materials Science and Engineering, ReMM, University of Ulsan) Lee, Jing-Hyuk (School of Materials Science and Engineering, ReMM, University of Ulsan) Kim, Kwang-Bok (School of Materials Science and Engineering, ReMM, University of Ulsan) Cho, Tong-Yul (School of Materials Science and Engineering, ReMM, University of Ulsan) Sochogov, Nikolay S. (Inst. of High Current Electronics, Siberian Div. of RAS) Zakharov, Alexender N. (Inst. of High Current Electronics, Siberian Div. of RAS) |
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