• 제목/요약/키워드: Diamond film

검색결과 446건 처리시간 0.023초

알루미늄 합금 양극산화피막의 표면경도 측정법 (Novel Methods for Measuring the Surface Hardness of Anodic Oxide Films on Aluminum Alloy)

  • 문성모
    • 한국표면공학회지
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    • 제53권1호
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    • pp.36-42
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    • 2020
  • In this study, two novel methods to measure the surface hardness of anodic oxide films on aluminum alloys are reported. The first method is to impregnate oil-based ink into pores in the anodic oxide film and then to clean the ink on the surface using ethanol, resulting in an impregnation of inks only inside of the pores in anodic oxide film. The second method is to coat the anodic oxide film surface with thin Au layer less than 0.1 ?. Both the ink-impregnating method and Au-coating method provided clear indentation marks on the anodic oxide film surface when it was indented using a pyramidal-diamond penetrator. Thus, Vickers hardness of anodic oxide films on aluminium alloy could be measured successfully and precisely from the anodic film surface. In addition, advantages and disadvantages of the ink-impregnating method and Au-coating method for the measurement of surface hardness of anodic oxide films are discussed.

Improved Adhesion of DLC Films by using a Nitriding Layer on AISI H13 Substrate

  • Park, Min-Seok;Kim, Dae-Young;Shin, Chang-Seouk;Kim, Wang Ryeol
    • 한국표면공학회지
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    • 제54권6호
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    • pp.307-314
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    • 2021
  • Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.

a-C:H 박막을 이용한 이온빔 배향 TN 셀의 Electro-Optical 특성에 관한 연구 (A Study on Electro-Optical Characteristics of the Ion Beam Aligned TN Cell on the a-C:H Thin Film)

  • 박창준;조용민;황정연;서대식;노순준;백홍구;정연학
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 제5회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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    • pp.57-60
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    • 2003
  • Electro-Optical (EO) performances for the ion beam (IB) aligned twisted-nematic (TN)-liquid crystal display (LCD) with ion beam exposure on the new of diamond like carbon (DLC) thin film surface were investigated. Voltage-transmittance (V-T) curve and response time without backflow bounce in the ion beam aligned TN-LCD with ion beam exposure for 0.5 and 1min on the DLC thin film was observed. Also. the fast response time of ion beam aligned TN-LCD with ion beam exposure for 1min on the DLC thin film surface can be achieved. The residual DC voltage of the ion beam aligned TN-LCD on the DLC thin film surface was almost the same as that of the rubbing aligned TN-LCD on the polyimide(PI) surface.

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절삭 공구용 다이아몬드 복합체의 저온 저압 소결 합성 및 후속 도전형 박막 공정 특성 연구 (A Study on the Sintering of Diamond Composite at Low Temperature Under Low Pressure and its Subsequent Conductive PVD Process for a Cutting Tool)

  • 조민영;반갑수
    • 한국산업융합학회 논문집
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    • 제23권1호
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    • pp.25-32
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    • 2020
  • Generally, high-temperature, high-pressure, high-priced sintering equipment is used for diamond sintering, and conductivity is a problem for improving the surface modification of the sintered body. In this study, to improve the efficiency of diamond sintering, we identified a new process and material that can be sintered at low temperature, and attempted to develop a composite thin film that can be discharged by doping boron gas to improve the surface modification of the sintered body. Sintered bodies were sintered by mixing Si and two diamonds in different particle sizes based on CIP molding and HIP molding. In CVD deposition, CVD was performed using WC-Co cemented carbide using CH4 and H2 gas, and the specimen was made conductive using boron gas. According to the experimental results of the sintered body, as the Si content is increased, the Vickers hardness decreases drastically, and the values of tensile strength, Young's modulus and fracture toughness greatly increase. Conductive CVD deposited diamond was boron deposited and discharged. As the amount of boron added increased, the strength of diamond peaks decreased and crystallinity improved. In addition, considering the release processability, tool life and adhesion of the deposition surface according to the amount of boron added, the appropriate amount of boron can be confirmed. Therefore, by solving the method of low temperature sintering and conductivity problem, the possibility of solving the existing sintering and deposition problem is presented.

다결정 산화갈륨/다이아몬드 이종 박막 성장 및 열처리 효과 연구 (Growth and thermal annealing of polycrystalline Ga2O3/diamond thin films on Si substrates)

  • 서지연;김태규;신윤지;정성민;배시영
    • 한국결정성장학회지
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    • 제31권6호
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    • pp.233-239
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    • 2021
  • 본 연구에서는 산화갈륨의 방열 특성 향상을 위해 산화갈륨/다이아몬드 이종 박막 성장을 진행하였다. 먼저, 핫필라멘트 화학기상증착법을 이용하여 다결정 다이아몬드를 증착시킨 후, 미스트 화학기상증착법을 통해 450~600℃ 사이의 온도구간에서 산화갈륨 박막을 성장시켰다. 열처리 전후 비교를 통해 500℃에서 산화갈륨/다이아몬드 계면 분리 현상이 발생함을 확인하였다. 이는 비정질과 결정질이 혼재된 산화갈륨 박막이 성장된 후, 냉각 과정에서 열팽창계수의 차이로 인해 계면이 분리된 것으로 판단하였다. 따라서, 본 연구를 통한 산화갈륨/다이아몬드 계면의 물리적 안정성을 통해 산화갈륨의 열물성 보완및 고전력 반도체로의 활용이 기대된다.

초소형 디스크 요소기술 (Technologies for Small Form Factor Optical Disks)

  • 김진홍;김종환
    • 정보저장시스템학회:학술대회논문집
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    • 정보저장시스템학회 2005년도 추계학술대회 논문집
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    • pp.113-118
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    • 2005
  • Small form factor optical disks for near-field optics using solid immersion lens were developed. Disk durability properties in terms of head-disk interface (HDI) properties were investigated by drag test, diamond like carbon film and lubricant film were coated on the small form factor disk to enhance HDI. Disks with glass substrates and lubricant films after heat treatment showed more durable characteristics. Coverlayers made of UV resin were uniformly coated by spin coating In which the ski-jump could not be formed by adopting outer ring technique.

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초소형 디스크 요소기술 (Technologies for Small Form Factor Optical Disks)

  • 김진홍
    • 정보저장시스템학회논문집
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    • 제2권1호
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    • pp.26-31
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    • 2006
  • Small form factor optical disks for near-field optics using solid immersion lens were developed. Diamond like carbon film and lubricant film were coated on the small form factor optical disk to enhance the head-disk interface(HDI) characteristics. The disk durability properties in terms of HDI phenomena were investigated by drag test. Disks with glass substrates and the lubricant films experienced heat treatment showed more durable characteristics. Coverlayers made of UV resin were uniformly coated by spin coating in which the ski-jump could be removed by adopting outer ring technique

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나노 압입곡선의 이론적 분석을 통한 박막의 잔류응력 평가 (Evaluation of Thin Film Residual Stress through the Theoretical Analysis of Nanoindentation Curve)

  • 이윤희;장재일;권동일
    • 대한기계학회논문집A
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    • 제26권7호
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    • pp.1270-1279
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    • 2002
  • Residual stress is a dominant obstacle to efficient production and safe usage of device by deteriorating the mechanical strength and failure properties. Therefore, we proposed a new thin film stress-analyzing technique using a nanoindentation method. For this aim, the shape change in the indentation load-depth curve during the stress-relief in film was theoretically modeled. The change in indentation depth by load-controlled stress relaxation process was related to the increase or decrease in the applied load using the elastic flat punch theory. Finally, the residual stress in thin film was calculated from the changed applied load based on the equivalent stress interaction model. The evaluated stresses for diamond-like carbon films from this nanoindentation analysis were consistent with the results from the conventional curvature method.

Tribolgical Characteristics of DLC Film using Substrates with Varying Hardness

  • Park, Jae-Hong;Jang, Beom-Taek;Kim, Seock-Sam
    • KSTLE International Journal
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    • 제9권1_2호
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    • pp.31-35
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    • 2008
  • DLC (Diamond Like Carbon) films have predominant tribological properties like a high hardness, low friction and high chemical resistance; therefore, DLC films are applied in a wide range of industrial fields. This paper evaluated the characteristics of DLC films deposited on bearing steel with different hardness by RF-PECVD (Radio Frequency - Plasma Enhanced Chemical Vapor Deposition) method. Si-interlayer was deposited on bearing steel to improve adhesion strength by RF-Sputtering method. The DLC film structures were analyzed with Raman spectra and Gaussian function. Adhesion strength of DLC films was measured with a scratch tester. Friction and wear test were carried out with a ball-on -disc type to investigate the tribological characteristics. Experimental results showed that DLC films deposited on bearing steel under same deposition condition have typical structure DLC films regardless of hardness of bearing steel. Adhesion strength of DLC film is increased with a hardness of bearing steel. Friction coefficient of DLC film showed lower at the high hardness of bearing steel.