• Title/Summary/Keyword: Defect inspection

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Characteristic of Through Silicon Via's Seed Layer Deposition and Via Filling (실리콘 관통형 Via(TSV)의 Seed Layer 증착 및 Via Filling 특성)

  • Lee, Hyunju;Choi, Manho;Kwon, Se-Hun;Lee, Jae-Ho;Kim, Yangdo
    • Korean Journal of Materials Research
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    • v.23 no.10
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    • pp.550-554
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    • 2013
  • As continued scaling becomes increasingly difficult, 3D integration has emerged as a viable solution to achieve higher bandwidths and good power efficiency. 3D integration can be defined as a technology involving the stacking of multiple processed wafers containing integrated circuits on top of each other with vertical interconnects between the wafers. This type of 3D structure can improve performance levels, enable the integration of devices with incompatible process flows, and reduce form factors. Through silicon vias (TSVs), which directly connect stacked structures die-to-die, are an enabling technology for future 3D integrated systems. TSVs filled with copper using an electro-plating method are investigated in this study. DC and pulses are used as a current source for the electro-plating process as a means of via filling. A TiN barrier and Ru seed layers are deposited by plasma-enhanced atomic layer deposition (PEALD) with thicknesses of 10 and 30 nm, respectively. All samples electroplated by the DC current showed defects, even with additives. However, the samples electroplated by the pulse current showed defect-free super-filled via structures. The optimized condition for defect-free bottom-up super-filling was established by adjusting the additive concentrations in the basic plating solution of copper sulfate. The optimized concentrations of JGB and SPS were found to be 10 and 20 ppm, respectively.

The Development of an Algorithm for Internal Defect Inspection of Concrete using Ultrasonic Detective Device and Radar Equipment (초음파 및 레이더를 활용한 콘크리트 내부결함탐상 알고리즘 개발)

  • Oh, Hong-Seob;Ju, Min-Kwan;Lee, Ju-Won
    • Proceedings of the Korea Concrete Institute Conference
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    • 2008.04a
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    • pp.1029-1032
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    • 2008
  • Nowadays, the necessity of the NDT technique for concrete structure has been increased due to maintenance of infra-structure. With this reason, NDT detecting technique has been considered as a effective maintenance method to prevent the rapid degradation of the infra-structure. In this study, to investigate the internal defect of concrete structure, ultrasonic detection device and radar equipment was applied then tested in laboratory and field. In the result of the experimental test, the internal cavity and steel arrangement can be detected and it was possible to adopt the ultrasonic detection method to the maintenance of concrete structure. And an algorithm for performing the maintenance procedure of concrete structure applying ultrasonic detection device and radar equipment was developed and suggested in this study.

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Texture Analysis Algorithm and its Application to Leather Automatic Classification Inspection System (텍스처 분석 알고리즘과 피혁 자동 선별 시스템에의 응용)

  • 김명재;이명수;권장우;김광섭;길경석
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2001.10a
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    • pp.363-366
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    • 2001
  • The present process of grading leather quality by the rare eyes is not reliable. Because inconsistency of grading due to eyes strain for long time can cause incorrect result of grading. Therefore it is necessary to automate the process of grading quality of leather based on objective standard for it. In this paper, leather automatic classification system consists of the process obtaining the information of leather and the process grading the quality of leather from the information. Leather is graded by its information such as texture density, types and distribution of defects. This paper proposes the algorithm which sorts out leather information like texture density and defects from the gray-level images obtained by digital camera. The density information is sorted out by the distribution value of Fourier spectrum which comes out after original image is converted to the image in frequency domain. And the defect information is obtained by the statistics of pixels which is relevant to Window using searching Window after sort out boundary lines from preprocessed images. The information for entire leather is used as standard of grading leather quality, and the proposed algorithm is practically applied to machine vision system.

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Study on Optimal Welding Condition for Shipbuilding Steel Materials (조선강재의 최적 용접조건에 관한 연구)

  • Kim, Ok-Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.6
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    • pp.128-133
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    • 2011
  • In this study, the steel material for shipbuilding(LR-A class) was used, and FCAW was taken advantage of 3G attitude and they are welded by different welding ways. As a result of analyzing wave with welding monitoring system, the stable values are obtained which are the first floor(electronic current 164~182 A, voltage 24 V), the second floor(electronic current 174~190 A, voltage 22~25 V), the third floor(electronic current 158~188 A, voltage 22~25 V), and fourth floor(electronic current 172~184 A, voltage 22~25 V), at this time, the stable wave standard deviation and changing coefficient could be obtained. When the welding testing through nondestructive inspection was analyzed know defect of welding, there was no defect of welding in A, D, E, but some porosities in B, and slag conclusion near the surface in C, because the length of arc was not accurate, and the electronic current and voltage was not stable. After observing the change of heat affect zone through micro testing, each organization of floor formed as Grain Refinement, so welding part was fine, the distance of heat affect zone is getting wider up to change the values of the electronic current and voltage. As a result of degree of hardness testing, the hardness orders were the heat affect zone(HAZ), Welding Zone(WZ), and Base Metal(BM). When the distribution of degree of hardness is observed. B is the highest degree of hardness The reason why heat effect zone is higher than welding zone and base metal, welding zone is boiled over melting point($1539^{\circ}C$) and it starts to melt after the result of analysis through metal microscope, so we can know that delicate tissue is created at the welding zone. Therefore, in order to get the optimal conditions of the welding, the proper current of the welding and voltage is needed. Furthermore the precise work of welding is required.

A Study on the Safety Improvement of Structural Weakness Using Accident Analysis for Vehicle-Mounted MEWP (차량탑재형 고소작업대의 재해분석을 통한 취약 구조부의 안전성 향상 방안에 관한 연구)

  • Yoo, Yong-tae;Seo, Su-eun;You, Hee-Jae;Kang, Kyung-sik
    • Journal of the Korea Safety Management & Science
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    • v.19 no.1
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    • pp.15-25
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    • 2017
  • The findings were summarized as follows. The safety check by manufacturer showed that 6 of 13 companies are over the average occurrence of defects. It was expected that there would be a difference between manufacturing technology capability and production system of each manufacturer. Consequently, manufacturers should institutionally improve and strengthen certification items for the upward standardization of safety certification before factory. Second, the safety check by year showed that the results of this study accord with those of previous studies on defect time. Consequently, manufacturers should classify the 3-year-old equipment for vehicle-mounted MEWP into a special check subject to do a nondestructive test according to proven results, and also reflect the test in a safety test system to do regular preventive activities of equipment defects. Third, the safety check by part showed that the boom and outrigger parts of vehicle-mounted MEWP have the most defects. Stress concentration resulted in defects as the boom part was most frequently operated in the structural parts for a real work. To prevent this, it is suitable to improve the hardness of boom materials. The outrigger part needs improvement in safety devices with materials. As an outrigger supports the overturning moment of equipment, it is most affected by its load based on the operating radius, resulting in fatigue crack.

Infrared Imaging and a New Interpretation on the Reverse Contrast Images in GaAs Wafer (GaAs 웨이퍼의 적외선 영상기법 및 콘트라스트 반전 영상에 대한 새로운 해석)

  • Kang, Seong-jun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.11
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    • pp.2085-2092
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    • 2016
  • One of the most important properties of the IC substrate is that it should be uniform over large areas. Among the various physical approaches of wafer defect characterization, special attention is to be payed to the infrared techniques of inspection. In particular, a high spatial resolution, near infrared absorption method has been adopted to directly observe defects in semi-insulating GaAs. This technique, which relies on the mapping of infrared transmission, is both rapid and non-destructive. This method demonstrates in a direct way that the infrared images of GaAs crystals arise from defect absorption process. A new interpretation is presented for the observed reversal of contrast in the infrared absorption of nonuniformly distributed deep centers, related to EL2, in semi-insulating GaAs. The low temperature photoquenching experiment has demonstrated in a direct way that the contrast inverse images of GaAs wafers arise from both absorption and scattering mechanisms rather than charge re-distribution or local variation of bandgap.

A Study on the Non-Contact Detection Technique of Defects Using AC Current - The Influence of Frequency and lift-off - (교류전류를 이용한 비접촉결함탐상법에 관한 연구 - 주파수 lift-off의 영향 -)

  • Kim, Hoon;Na, Eu-Gyun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.22 no.1
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    • pp.53-58
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    • 2002
  • New nondestructive inspection (NDI) technique to detect the defect in metal was developed in which an electromagnetic field is induced in a metal by AC current flowing in the magnetic coil and the leak magnetic-flux disturbed by defects is measured using a tape-recorder head with air gap. This technique can be applied in evaluating the location and sizing of surface defects in components of the ferromagnetic body by means of the non-contacting measurement. In this paper, we have applied this technique to the evaluation of two-dimensional surface cracks in ferromagnetic metal, and also investigated the influence of the various frequencies and lift-off. Defects were detected with maximum values in the distribution of voltage and it was found that the maximum values tend to increase with the defect depth. Although the maximum values for defects are affected by the frequency and lift-off, the depth of small defects can be estimated from the linear relationship between the depth and voltage rate$(V_0/V_{ave})$.

Quantitative Evaluation of Remote Field Eddy Current Defect Signals (배관 결함부 원거리장 와전류 신호 정량화 연구)

  • Jeong, Jin-Oh;Yi, Jae-Kyung;Kim, Hyoung-Jean
    • Journal of the Korean Society for Nondestructive Testing
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    • v.20 no.6
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    • pp.555-561
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    • 2000
  • The remote field eddy current (RFEC) inspection was performed on the ductile cast iron pipes with nominal outer diameter of 100mm, which were machined with various shapes and sizes of defects. Ductile cast iron pipes which are used as water supply pipe have the non-uniform thickness and asymmetric cross section due to relatively high degree of allowable errors during the manufacturing processes. These characteristics of ductile cast in pipes cause the long range background noises in RFEC signals along the pipe. In this study, tile machined defects in pipes were effectively classified by the moving window average (MWA) method which eliminated the long-range noise. The voltage plane polar plots (VPPP) method was used to quantitatively evaluate the depth and circumferential degree of defects. The VPPP signatures showed that the angle between defect signature and the normalized in-phase component on the VPPP is linear to the depth of defects. The nondestructive RFEC technique proved to be capable of quantitatively evaluating the machined defects of underground water supply pipe.

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X-ray Image Correction Model for Enhanced Foreign Body Detection in Metals (금속 내부의 이물질 검출 향상을 위한 X-ray 영상 보정 모델)

  • Kim, Won
    • Journal of the Korea Convergence Society
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    • v.10 no.10
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    • pp.15-21
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    • 2019
  • X-rays with shorter wavelengths than ultraviolet light have very good penetration power. It is convergence in industrial and medical fields has been used a lot. n particular, in the industrial field, various researches have been conducted on the detection of foregin body inside metal that can occur in the production process of products such as metal using x-ray, a non-destructive inspection device. Detectors are becoming increasingly popular for the popularization of DR (Digital Radiography) photography methods that digitally acquire X-ray video images. However, there are cases where foreign body detection is impossible depending on the sensor noise and sensitivity inside the detector. When producing a metal product, since the defective rate of the produced product may increase due to contamination of the foreign body, accurate detection is necessary. In this paper, we provide a correction model for X-ray images acquired in order to improve the efficiency of defect detection such as foreign body inside metal. When applied to defect detection in the production process of metal products through the proposed model, it is expected that the detection of product defects can be processed accurately and quickly.

Active Lamb Wave Propagation-based Structural Health Monitoring for Steel Plate (능동 램파 전파에 기초한 강판의 구조건전성 모니터링)

  • Jeong, Woon;Seo, Ju-Won;Kim, Hyeung-Yun
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.5A
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    • pp.421-431
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    • 2009
  • This paper is the study on the verification of structural health monitoring (SHM) algorithm based on the ultrasonic guided wave. An active inspection system using Lamb wave (LW) for SHM was considered. The basic study about the application of this algorithm was performed for detecting the circular notch defect in steel plate. LW testing technique, pitch-catch method, was used for interpretation of circular notch defect with depth of 50% of plate thickness and 7 mm width. Damage characterization takes place by comparing $S_0$ mode sensor signals collected before and after the damage event. By subtracting the signals of both conditions from each other, a scatter signal is produced which can be used for damage localization. The continuous Gabor wavelet transform is used to attain the time between the arrivals of the scatter and sensor signals. A new practical damage monitoring algorithm, based on damage monitoring polygon and pitch-catch method, has been proposed and verified with good accuracy. The possible damage location can be estimated by the average on calculated location points and the damage extent by the standard deviation.