Optical Properties of Inductively Coupled Plasma with Ar Gas Pressure and RF Power (13.56MHz) (Ar 가스압력과 RF 전력변화 (13.56MHz)에 따른 유도결합형 플라즈마의 광학적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.05e
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- pp.92-95
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- 2003