• Journal of the Korean Society for Precision Engineering
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• v.26 no.3
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• pp.122-128
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• 2009

DBD(Dielectric Barrier Discharges) plasma is often used to clean the surface of semiconductor. The cleaning performance is affected mainly by plasma density and duration time. In this study, the plasma density is predicted by coupled simulation of flow, chemistry mixing and reaction, plasma, and electric field. 13.56 MHz of RF source is used to generate plasma. The effect of dielectric thickness, gap distance, and flow velocity on plasma density is investigated. It is shown that the plasma density increases as the dielectric thickness decreases and the gap distance increases.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1684-1689
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• 2003

Dielectric Barrier Discharges (DBD) in oxygen and air are well established for the production of large quantities of ozone and are more recently being applied to a wider range of after treatment processes for HAPs(Hazardous Air Pollutants). The potential use as a charger for particle collection are not well known. In this work, we measured charge distribution of nanometer or submicron sized particles passing through the dielectric barrier discharge reactor. The bipolar charge characteristics of particles passing DBD reactor were investigated. Fluorometric method using uranine particles and a fluorometer was employed to examine the bipolar charging characteristics of the charged particles by DBD reactor. Finally, the charge distributions of particles were determined from the electrical mobility classification using DMA.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.12
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• pp.673-678
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• 2000

The dielectric barrier discharge(DBD) is a common method to create a nonthermal plasma in which electrical energy is used to create electrons with a high average kinetic energy. The unique aspect of dielectric barrier discharges is the large array of short lifetime(10ns) silent discharges created over the surface of the dielectric. A silent discharge is generated when the applied voltage exceeds the breakdown voltage of the carrier gas creating a conduction path between the applied electrode and grounded electrode. As charge accumulates on the dielectric, the electric field is reduced below the breakdown field of the carrier gas and the silent discharge self terminates preventing the DBD cell from producing a thermal arc. In fact, the most significant application of dielectric barrier discharges is to generate ozone for contaminated water treatment. Therefore, experiments were perfomed at 1∼2[bar] pressure using a coaxial geometry single dielectric barrier discharge for ozone concentrations and energy densities. The main result show that the concentration and efficiency of ozone are influenced by gas nature, gas quantity, gas pressure, supplied voltage and frequency.

• Applied Science and Convergence Technology
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• v.26 no.4
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• pp.74-78
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• 2017

The discharge characteristics of the radio frequency (RF) surface dielectric barrier discharge have been simulated for the investigation of the ratio of the ion transit time to the RF period. From one-dimensional particle-in-cell (PIC) simulation for a planar dielectric barrier discharge (DBD), it was observed that the high-frequency driving voltage confines the ions in the plasma because of a shorter RF period than the ion transit time. For two-dimensional surface dielectric barrier discharges, a fluid simulation is performed to investigate the characteristics of RF discharges from 1 MHz to 40 MHz. The ratio of the peak density to the average density decreases with the increasing frequency, and the spatiotemporal discharge patterns change abruptly with the change in the ratio of ion transit time to the RF period.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.5
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• pp.717-720
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• 2012

Various types of dielectric-barrier-discharge (DBD) devices have been developed for diverse applications for the last decade. In this study, a flat non-thermal DBD micro plasma source under atmospheric pressure has been developed. The flat-panel type plasma is generated by bipolar pulse voltages, and driving gas is air. In this study, the plasma source was investigated with intensified charge coupled device (ICCD) images and Optical Emission Spectroscopy (OES). The micro discharges are generated on the crossed electrodes. For theoretical analysis, 2-dimensional fluid simulation was performed. The plasma source can be driven in air, and thus the operation cost is low and the range of application is wide.

• Korean Chemical Engineering Research
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• v.57 no.3
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• pp.432-437
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• 2019

An atmospheric pressure floating electrode-dielectric barrier discharge (FE-DBD) system having flexible electrodes was developed and its plasma characteristics was investigated. Polytetrafluoroethylene (PTFE), polydiemethylsiloxane (PDMS), and polyethylene terephthalate (PET) were used as flexible dielectrics for flexible powered-electrodes. The optical intensity and electron temperature of the atmospheric pressure FE-DBD plasma increased with the voltage applied to the powered electrode, and increased in the order of PTFE < PDMS < PET at a fixed voltage. This behavior was explained in terms of the change in the capacitance of the flexible dielectrics with the dielectric type and voltage, implying that the plasma characteristics of an atmospheric pressure FE-DBD having flexible electrodes can be controlled by modulating the flexible dielectrics for the flexible powered-electrode and the voltage applied to the powered electrode. Because an atmospheric pressure FE-DBD system can generate a plasma along the curvature of skins, it is expected to have useful applications in plasma medicine.

• Journal of the Korea Convergence Society
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• v.13 no.3
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• pp.281-289
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• 2022

Plasma ozone is utilized in a variety of applications in the field of sterilization due to its high sterilization performance. Dielectric materials used in DBD(dielectric barrier discharges) are mainly polymer, quartz and ceramics. These dielectric layers have the advantage of limiting the amount of supplied electron charge and allowing plasma to occur evenly on the surface of dielectric. Actually, the target or environment for sterilization is often a complex structure, so research and academic study are needed by utilizing the concept of space sterilization. In this study, the device is applied to generate DBD plasma at atmospheric pressure for disinfection due to the effectiveness in producing radicals and ozone. The generator of plasma ozone is a basic structure of dielectric barrier discharge by placing ceramic tube dielectrics and stainless steel electrical conductors at regular intervals. Various applications can be developed based on the proposed design method. Plasma ozone generation for space sterilization device is recognized as an excellent sterilization device. Through the design and verification of the device, we intend to establish an optimal design of the spatial sterilization device and provide the basis data for sterilization applications.

• Journal of Korean Society for Atmospheric Environment
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• v.18 no.E1
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• pp.13-20
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• 2002

The electrical and chemical properties of the dielectric barrier discharge (DBD) process for the benzene removal were investigated. The benzene removal was initiated with the applied voltage higher than the discharge onset value. The removal efficiency over 95 % was obtained at approximately 1.6 kJ lite $r^{r-1}$ of the electrical energy density. The increase of the inlet concentration decreased the removal efficiency. However, the benzene decomposition rate increased with the inlet concentration . While the increase of the gas retention time enhanced the removal efficiency, the decomposition rate decreased. Identification of the optimum condition between the decomposition rate and the removal efficiency is required for field applications of the DBD process.s.

• Journal of the Speleological Society of Korea
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• no.76
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• pp.37-42
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• 2006

The Dielectric Barrier Discharge (DBD) is a nonequilibrium gas discharge that is generated in the space between two electrodes, which are separated by an insulating dielectric layer. The dielectric layer can be put on either of the two electrodes or be inserted in the space between two electrodes. If an AC or pulse high voltage is applied to the electrodes that is operated at applied frequency from 50Hz to several MHz and applied voltages from a few to a few tens of kilovolts rms, the breakdown can occur in working gas, resulting in large numbers of micro-discharges across the gap, the gas discharge is the so called DBD. Compared with most other means for nonequilibrium discharges, the main advantage of the DBD is that active species for chemical reaction can be produced at low temperature and atmospheric pressure without the vacuum set up, it also presents many unique physical and chemical process including light, heat, sound and electricity. This has led to a number of important applications such as ozone synthesizing, UV lamp house, CO2 lasers, et al. In recent years, due to its potential applications in plasma chemistry, semiconductor etching, pollution control, nanometer material and large area flat plasma display panels, DBD has received intensive attention from many researchers and is becoming a hot topic in the field of non-thermal plasma.

• Korean Journal of Materials Research
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• v.25 no.2
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• pp.100-106
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• 2015

Plasma properties of dielectric barrier discharges (DBDs) at atmospheric pressure were measured and characterized using optical emission spectroscopy. Optical emissions were measured from argon, nitrogen, or air discharges generated at 5-9 kV using 20 kHz power supply. Emissions from nitrogen molecules were markedly measured, irrespective of discharge gases. The intensity of emission peaks was increased with applied voltage and electrode gap. The short wavelength peaks (315.9 nm and 337.1 nm) measured at the middle of DBDs were significantly increased with applied voltage. The optical emission from DBDs decreased with the addition of oxygen gas, which was especially significant in argon discharge. Emission from oxygen molecules cannot be measured from air discharge and argon discharge with 4.8% oxygen. The emission intensity at 337.1 nm and 357.7 nm related with nitrogen molecule was sensitively changed with electrode types and discharge voltages. However, the pattern of argon emission spectrum was nearly the same, irrespective of electrode type, oxygen content, and discharge voltage.