• Journal of the Korean Institute of Telematics and Electronics A
• /
• v.31A no.4
• /
• pp.63-69
• /
• 1994

The Ultrahigh Vacuum Electron Cyclotron Resonance Chemical Vapor Deposition(UHV-ECRCVD) system whose base pressure is 1${\times}10^{9}$ torr has been constructed. In-situ cleaning prior to the epitaxial growth was carried out at 56$0^{\circ}C$ by ECR generated uniform hydrogen plasma whose density is $10^{10}/cm{3}$. The natural oxide was effectively removed without damage by applying positive DC bias(+10V) to the substrate. RHEED(Reflection High Energy Electron Diffraction) analysis has been used to confirm the removal of the surgace oxide and the streaky 2$\times$1 reconstruction of the Si surface, and the suppression of the substrate damage is anaylized by X-TEM(cross-sectional Transmission Electron Microscopy). Surface cleaning technique by ECR hydrogen plasma confirmed good quality epitaxial growth at low temperature.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.242.1-242.1
• /
• 2014

The electron cyclotron resonance plasma source with a belt-type magnet assembly (BMA) is designed for effective plasma confinements. For characterizing the plasma source, the plasma parameters are measured by Langmuir probe. However, the plasma parameters and the motion of charged particles near the ECR zone are not easy to diagnostics, because of the high plasma density and temperature. Thus, as an alternative method, the electromagnetic simulation of the plasma source has been performed by using three-dimensional particle-in-cell and Monte Carlo collisional (PIC-MCC) simulation codes. For considering the limitation of simulation resources and time, the periodic boundary condition is applied and the coulomb collision is neglected. In this paper, we present the results of 3D PIC simulations of ECR plasmas with BMA and we compare them with the experimental results.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2003.12a
• /
• pp.310-310
• /
• 2003

• Proceedings of the International Microelectronics And Packaging Society Conference
• /
• 2001.11a
• /
• pp.161-164
• /
• 2001

• Proceedings of the Korean Vacuum Society Conference
• /
• 2002.02a
• /
• pp.172-172
• /
• 2002

• Proceedings of the Korean Vacuum Society Conference
• /
• 1995.06a
• /
• pp.20-21
• /
• 1995

• Korean Journal of Plant Resources
• /
• v.29 no.5
• /
• pp.588-597
• /
• 2016

Little attention has been paid to the functional aspect of the flower petal of Paeonia lactiflora, compared to that of its root. To determine the components of flower petal of Paeonia lactiflora, we conducted the Fourier transform ion cyclotron resonance (FT-ICR) MASS spectrophotometric analysis. We detected the 24 different types of ingredients from the 70% ethanol extracts of flower petal of peonia lactiflora cv. ‘Red Charm’. The main compounds were quercetin glucopyranosides, methyl gallate, paonioflolol and kaemperol glucopyranosides. We further tested its functional activity. The 2,2-diphenyl-1-picrylhydrazyl (DPPH) radical scavenging activity of the extracts was 87.9-90.4% at 0.1mg/ml. This result showed that these flower extracts have approximately 5-fold stronger antioxidant potential than a previous report with root extracts (Bang et al. 1999). The result of tyrosinase inhibition assay of Paeonia lactflora extract was almost similar to that of arbutin except significantly higher effect in the coral sunset extract at 0.1% concentration. Hyaluronidase inhibition assay showed 76.5% inhibition at 5% concentration of this flower extract, indicating that Peaonia lactiflora flower extracts have the major anti-inflammatory, anti-oxidant and brightening effects. Taken together, these results suggest these three Paeonia lactiflora species extracts might provide the basis to develop a new natural brightening agent.

• Korean Journal of Materials Research
• /
• v.8 no.4
• /
• pp.359-361
• /
• 1998

Visible photoluminescence(PU was observed from hydrogenated amorphous silicon deposited on silicon(a-Si : H/Si) using electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR- PECVD) with silane ($SiH_{4}$) gas as the reactant source. The PL spectra from a-Si : H/Si were very similar to those from porous silicon. Hydrogen contents of samples annealed under oxygen atmosphere for 2minutes at $500^{\circ}C$ by rapid thermal annealing were reduced to 1~2%, and the samples did not show visible PL, indicating that hydrogen has a very important role in the PL process of a- Si : H/Si. As the thickness of deposited a-Si : H film increased, PL intensity decreased. The visi¬ble PL from a-Si: H deposited on Si by ECR-PECVD with $SiH_{4}$ . is suggested to be from silicon hydrides formed at the interface between the Si substrate and the deposited a-Si : H film during the deposition.

• Journal of Astronomy and Space Sciences
• /
• v.39 no.2
• /
• pp.35-42
• /
• 2022

During their respective missions, the spacecraft Voyager and Cassini measured several Saturn magnetosphere parameters at different radial distances. As a result of information gathered throughout the journey, Voyager 1 discovered hot and cold electron distribution components, number density, and energy in the 6-18 Rs range. Observations made by Voyager of intensity fluctuations in the 20-30 keV range show electrons are situated in the resonance spectrum's high energy tail. Plasma waves in the magnetosphere can be used to locate Saturn's inner magnetosphere's plasma clusters, which are controlled by Saturn's spin. Electromagnetic electron cyclotron (EMEC) wave ring distribution function has been investigated. Kinetic and linear approaches have been used to study electromagnetic cyclotron (EMEC) wave propagation. EMEC waves' stability can be assessed by analyzing the dispersion relation's effect on the ring distribution function. The primary goal of this study is to determine the impact of the magnetosphere parameters which is observed by Cassini. The magnetosphere of Saturn has also been observed. When the plasma parameters are increased as the distribution index, the growth/damping rate increases until the magnetic field model affects the magnetic field at equator, as can be seen in the graphs. We discuss the outputs of our model in the context of measurements made in situ by the Cassini spacecraft.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2008.11a
• /
• pp.22.2-22.2
• /
• 2008