Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2008.11a
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- Pages.22.2-22.2
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- 2008
Properties of lanthanum oxide deposited by electron cyclotron resonance atomic layer deposition
- Kang, Byung-Woo (Division of Materials science and engineering, Hanyang university) ;
- Kim, Woong-Sun (Division of Materials science and engineering, Hanyang university) ;
- Moon, Dae-Yong (Division of Materials science and engineering, Hanyang university) ;
- Park, Jong-Wan (Division of Materials science and engineering, Hanyang university)
- Published : 2008.11.07