Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
- /
- Pages.20-21
- /
- 1995
Surface Roughness and Defect Morphology in Low Temperature Electron Cyclotron Resonance Hydrogen Plasma Cleaned (100) Silicon
- Hwang, Ki-Hyun (Dept. of Inorganic Materials Engineering) ;
- Yoon, Eui-Joon (Dept. of Inorganic Materials Engineering) ;
- Whang, Ki-Woong (Dept. of Electrical Engineering)
- Published : 1995.06.01
Abstract
Keywords