Acknowledgement
Grant : Utilizing Technology Development for Oxide Thin-Film Transistor Sputtering Deposition Equipment on Width 1500 mm Flexible Substrates
Supported by : National Research Foundation of the Republic of Korea (NRF), KEIT
Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2014.02a
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- Pages.242.1-242.1
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- 2014
Three-Dimensional Particle-in-cell Simulation of Electron Cyclotron Resonance Plasma with Belt-type Magnet Assembly
- Lee, Hui Jea (Dept. of Physics, POSTECH) ;
- Kim, Seong Bong (National Fusion Research Institute) ;
- Yoo, Suk Jae (National Fusion Research Institute) ;
- Cho, Moohyun (Dept. of Physics, POSTECH) ;
- Namkung, Won (Pohang Accelerator Laboratory)
- Published : 2014.02.10
Abstract
The electron cyclotron resonance plasma source with a belt-type magnet assembly (BMA) is designed for effective plasma confinements. For characterizing the plasma source, the plasma parameters are measured by Langmuir probe. However, the plasma parameters and the motion of charged particles near the ECR zone are not easy to diagnostics, because of the high plasma density and temperature. Thus, as an alternative method, the electromagnetic simulation of the plasma source has been performed by using three-dimensional particle-in-cell and Monte Carlo collisional (PIC-MCC) simulation codes. For considering the limitation of simulation resources and time, the periodic boundary condition is applied and the coulomb collision is neglected. In this paper, we present the results of 3D PIC simulations of ECR plasmas with BMA and we compare them with the experimental results.