• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.6
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• pp.563-569
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• 2009

In this paper, four different types of pulsed eddy current(PEC) probe are designed and their performance of detecting wall thickness reduction is compared. By using the backward difference method in time and the finite element method in space, PEC signals from various thickness and materials are numerically calculated and three features of the signal are selected. Since PEC signals and features are obtained by various types and sizes of probe, the comparison is made through the normalized features which reflect the sensitivity of the feature to thickness reduction. The normalized features indicate that the shielded reflection probe provides the best sensitivity to wall thickness reduction for all three signal features. Results show that the best sensitivity to thickness reduction can be achieved by the peak value, but also suggest that the time to peak can be a good candidate because of its linear relationship with the thickness variation.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.563-566
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• 1999

The functional diagnosis instrument should be preceded first to both the accurate selection of exact acupoint and discrimination. so the measuring and stimulating method are improved to SPAC pattern to evaluate impedance existed in the body. As a result, the resistance factor between skin and probe, the dipolization of cell was reduced so that the judgement of acupoint is advanced. After extraction of optimization parameter of SPAC pattern which the high discrimination efficiency and the lowest affection on the human body is controlled by using microprocessor to enhance conviction. The discrimination efficiency was confirmed by meridian visualization system. Also mechanism of probe was improved to increase efficiency of image recognition processing. The image of discriminated acupoint with probe is obtained by using a camera, the location on the tip of probe is recognized and processed. And then these are converted to virtual color by proportional to measuring current level of scan point on skin.

• Journal of the Semiconductor & Display Technology
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• v.19 no.3
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• pp.43-48
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• 2020

The demand for stable plasma has been on the rise because of the increased delivery power amount in the chamber for improving productivity, and fast and accurate plasma impedance matching become a crucial performance measure for radio frequency (RF) power system in semiconductor manufacturing equipment. In this paper, the overall impedance matching was understood, and voltage and current values were extracted with voltage - current (VI) probe to measure plasma impedance in real-time. Actual matching data were analyzed to derive calibration coefficient for V and I measurements to understand the characteristics of VI probe, and we demonstrated the tendency of RF impedance matching according to changes in load impedance. This preliminary empirical research can contribute to fast RF matching as well as advanced equipment control for the next level of detailed investigation on embedded system based-RF matching controller.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1609-1611
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• 1994

In ECR and helicon reactors for plasma processing, a high density plasma is generated in a source region which is connected to a diffusion region where the processing takes place. Large density and potential gradients can develop at the orifice of the source which drive ion currents into the diffusion region. The average ion velocity may become the order of the sound velocity. Measurements of the ion saturation current to a Langmuir probe are used as a standard method of determining the plasma density in laboratory discharges. However, the analysis becomes difficult in a steaming plasma. We have used the HAMLET plasma simulator to simulate the ion flow to a large langmuir probe in an ECR plasma. The collection surface was aligned with the Held upstream, normal to the field, and downstream. ion trajectories through the electric and magnetic fields were calculated including ion-neutral collisions. We examines the ratio of ion current density to plasma density as a function of magnetic field and pressure.

• Nuclear Engineering and Technology
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• v.50 no.7
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• pp.1160-1167
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• 2018

Detectability of the loose parts (LPs) in steam generator (SG) was studied with eddy current testing technique such as X-probe, bobbin and rotating coils ($MRPC^{(R)}$) as a function of LP size and spacing between LP and tube or between LP and support structures. SG mockup simulating SG tube and support structures with LP was fabricated. The X-probe showed slightly better detectability than $MRPC^{(R)}$ for LP of ferrous (F-LP) material and vice versa for LP of nonferrous (NF-LP) material. In terms of feasibility, inspection rate and other predictable features of the SG tubing inspections, X-probe can be used reliably for monitoring the LPs and the flaws formed by LPs on SG tubes.

• Progress in Superconductivity and Cryogenics
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• v.9 no.3
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• pp.1-4
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• 2007

The current profiles in a coated conductor with transport current were calculated using an iterative inversion method from the data of the magnetic flux density profiles measured. The applied current was increased from 0 to 60 A by 10A step and decreased down to -60A by 20A step. The magnetic flux profiles were measured at a distance of 400 mm above the surface of the coated conductor using a scanning hall probe method. The current profiles calculated were very different from the Bean model: current density profile is not a constant in the critical region. However the aspect of the change of the current and magnetic flux density profiles in the case of decreasing applied current are similar to the theoretical calculations in Brandt's paper.

• Proceedings of the IEEK Conference
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• 1998.10a
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• pp.613-616
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• 1998

In this paper, a model of a Eddy-current probe coil with a ferrite core in the presence of a half-space with a layer is developed. The half-space with a layer is accounted for by computing the appropriate Green's function by using Bessel transforms. Upon introducing equivalent Amperian currents within a core to explain effect to a impedance change in the coil due to a (ferrite) core, we derive a volume integral equation, The integral equation is transformed via the method of moments into a vector-matrix equation, which is then solved using a linear equation solver. Through the above processing, we computed impedance value in a Eddy-current probe coil due to a conductivity change of layer.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.5
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• pp.561-564
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• 2001

The cladding area of HANARO Research Reactor fuel rods should be checked not to have any defects larger than the size required at QA documents by using eddy torrent testing method doting fabrication process. To apply eddy current testing inspection to the fuel rods, encircling differential probes and standard specimen were designed and fabricated. The impedance of the fabricated probes was measured with impedance analyzer in order to cheek that the probe has a suitable impedance for the inspection frequency, and with this probe and MIZ-40A eddy current equipment, the detectability of this probes was investigated. The developed probes could detect artificial notch with 2mm length 10% depth of cladding thickness in cladding area. In addition, the probe was successfully applied to detect the defects in cladding area doting fabrication of the research reactor rods.

• Journal of Sensor Science and Technology
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• v.22 no.1
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• pp.89-94
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• 2013

In this paper, we developed a beam of MEMS probe card using a BeCu sheet. Silicon wafer thickness of $400{\mu}m$ was fabricated by using deep reactive ion etching (RIE) process. After forming through silicon via (TSV), the silicon wafer was bonded with BeCu sheet by soldering process. We made BeCu beam stress-free owing to removing internal stress by using joule heating. BeCu beam was fused by using joule heating caused by high current. The fabricated BeCu beam measured length of 1.75 mm and width of 0.44 mm, and thickness of $15{\mu}m$. We measured fusing current as a function of the cutting planes. Maximum current was 5.98 A at cutting plane of $150{\mu}m^2$. The proposed low-cost and simple fabrication process is applicable for producing MEMS probe beam.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.6
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• pp.505-510
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• 2013

An encircling send-receive type pulsed eddy current (PEC) probe is designed for use in aluminum tube inspection. When bare receive coils located away from the exciter were used, the peak time of the signal did not change although the distance from the exciter increased. This is because the magnetic flux from the exciter coil directly affects the receive coil signal. Therefore, in this work, both the exciter and the sensor coils were shielded in order to reduce the influence of direct flux from the exciter coil. Numerical simulation with the designed shielded encircling PEC probe showed the corresponding increase of the peak time as the sensor distance increased. Ferrite and carbon steel shields were compared and results of the ferrite shielding showed a slightly stronger peak value and a quicker peak time than those of the carbon steel shielding. Simulation results showed that the peak value increased as the defect size (such as depth and length) increased regardless of the sensor location. To decide a proper sensor location, the sensitivity of the peak value to defect size variation was investigated and found that the normalized peak value was more sensitive to defect size variation when the sensor was located closer to the exciter.