• Title/Summary/Keyword: Cu via

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Studies on Cu Dual-damascene Processes for Fabrication of Sub-0.2${\mu}m$ Multi-level Interconnects (Sub-0.2${\mu}m$ 다층 금속배선 제작을 위한 Cu Dual-dmascene공정 연구)

  • Chae, Yeon-Sik;Kim, Dong-Il;Youn, Kwan-Ki;Kim, Il-Hyeong;Rhee, Jin-Koo;Park, Jang-Hwan
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.12
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    • pp.37-42
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    • 1999
  • In this paper, some of main processes for the next generation integrated circuits, such as Cu damascene process using CMP, electron beam lithography, $SiO_2$ CVD and RIE, Ti/Cu-CVD were carried cut and then, two level Cu interconnects were accomplished. In the results of CMP unit processes, a 4,635 ${\AA}$/min of removal rate, a selectivity of Cu : $SiO_2$ of 150:1, a uniformity of 4.0% are obtained under process conditions of a head pressure of 4 PSI, table and head speed of 25rpm, a oscillation distance of 40 mm, and a slurry flow rate of 40 ml/min. Also 0.18 ${\mu}m\;SiO_2$ via-line patterns are fabricated using 1000 ${\mu}C/cm^2$ dose, 6 minute and 30 second development time and 1 minute and 30 second etching time. And finally sub-0.2 ${\mu}$ twolevel metal interconnects using the developed processes were fabricated and the problems of multilevel interconnects are discussed.

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A Study on the Ball-off of Via Balls Bonded by Solder Paste (Solder Paste로 접합된 비아볼의 Ball-off에 관한 연구)

  • Kim, Kyoung-Su;Kim, Jin-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.6
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    • pp.575-579
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    • 2004
  • Package reliability test was conducted to investigate the effect of solder paste composition at BGA Package. It was found that the shape and size of the phase form are affected by the processing parameters. The material have used to fill in the via was Sn/36Pb/2Ag and Sn/0.75Cu type solder paste. Sn/36Pb/2Ag and Sn/0.75Cu paste were fabricated on Tape-BGA substrates by screen printing process, and via ball mount data were characterized with variations of dwell time of 85 seconds at reflow peak temperature at 22$0^{\circ}C$ or 24$0^{\circ}C$. The test condition was MRT 30 $^{\circ}C$/60 %RH/96 HR. Failures formed of a ball-off in solder paste process were observed by using a Optical Microscope and SEM(Scanning Electron Microscope). It was concluded that intermetallic layer growth played important roles in increasing solder fatigue strength for addition of Ag composition. The degradation of shear strength of solder composition is discussed.

Preliminary studies for production of 61Cu using natural nickel target with RFT-30 cyclotron

  • Lee, Jun Young;Hur, Min Goo;Yang, Seung Dae;Park, Jeong Hoon
    • Journal of Radiopharmaceuticals and Molecular Probes
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    • v.5 no.2
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    • pp.79-82
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    • 2019
  • 61Cu is a promising PET radiometal having favorable nuclear decay characteristics with appropriate half-life of 3.3 h. Owing its promising capabilities in radiopharmaceutical chemistry and its chemical similarities with its isotopes 64Cu and 67Cu, in this work we have tried to optimize the production and separation conditions of 61Cu. 61Cu was produced via (p, x) reaction with natural nickel which was electroplated on the high purity silver coated copper backing target holder. The optimization of target electrodeposition, beam energy and current modulation, target dissolution and separation were optimized in this study. Preliminary studies show that 61Cu was successfully produced and separated which can be further extended for the production of 64Cu and 67Cu.

Performances of Metallic (sole, composite) and Non-Metallic Anodes to Harness Power in Sediment Microbial Fuel Cells

  • Haque, Niamul;Cho, Daechul;Kwon, Sunghyun
    • Environmental Engineering Research
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    • v.19 no.4
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    • pp.363-367
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    • 2014
  • One chambered sediment microbial fuel cell (SMFC) was equipped with Fe, brass (Cu/Zn), Fe/Zn, Cu, Cu/carbon cloth and graphite felt anode. Graphite felt was used as common cathode. The SMFC was membrane-less and mediator-less as well. Order of anodic performance on the basis of power density was Fe/Zn ($6.90Wm^{-2}$) > Fe ($6.03Wm^{-2}$) > Cu/carbon cloth ($2.13Wm^{-2}$) > Cu ($1.13Wm^{-2}$) > brass ($Cu/Zn=0.24Wm^{-2}$) > graphite felt ($0.10Wm^{-2}$). Fe/Zn composite anode have twisted 6.73% more power than Fe alone, Cu/carbon cloth boosted power production by 65%, and brass (Cu/Zn) produced 65% less power than Cu alone. Graphite felt have shown the lowest electricity generation because of its poor galvanic potential. The estuarine sediment served as supplier of oxidants or electron producing microbial flora, which evoked electrons via a complicated direct microbial electron transfer mechanism or making biofilm, respectively. Oxidation reduction was kept to be stationary over time except at the very initial period (mostly for sediment positioning) at anodes. Based on these findings, cost effective and efficient anodic material can be suggested for better SMFC configurations and stimulate towards practical value and application.

Wire-like Bundle Arrays of Copper Hydroxide Prepared by the Electrochemical Anodization of Cu Foil

  • La, Duc-Duong;Park, Sung-Yeol;Choi, Young-Wook;Kim, Yong-Shin
    • Bulletin of the Korean Chemical Society
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    • v.31 no.8
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    • pp.2283-2288
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    • 2010
  • Nanostructured copper compounds were grown by electrochemical anodization of copper foil in aqueous NaOH under varying conditions including electrolyte concentration, reaction temperature, current density, and reaction time. Their morphology and atomic composition were investigated by using SEM, TEM, XRD, EDS and XPS. At the conditions ([NaOH] = 1 M, $20^{\circ}C$, $2\;mA\;cm^{-2}$), wire-like orthorhombic $Cu(OH)_2$ nanobundles with an average width of 100 - 300 nm and length of $10\;{\mu}m$ were synthesized with the preferential [100] growth direction. Furthermore, when the concentration decreased to 0.5 M NaOH, the 1D nanobundle structure became narrower and longer without any change in compositions or crystalline structure. Side reaction pathways appeared to compete with the 1D nanostructure formation channels: the formation of CuO nanoleaves at $50^{\circ}C$ via the sequential dehydration of $Cu(OH)_2$, CuO/$Cu_2O$ aggregates in 4 M NaOH, and $Cu_2O$ nanoparticles and CuO nanosheets at lower current density.

Hydrogenation of Ethyl Acetate to Ethanol over Bimetallic Cu-Zn/SiO2 Catalysts Prepared by Means of Coprecipitation

  • Zhu, Ying-Ming;Shi, Xin Wang Li
    • Bulletin of the Korean Chemical Society
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    • v.35 no.1
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    • pp.141-146
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    • 2014
  • A series of bimetallic Cu-Zn/$SiO_2$ catalysts were prepared via thermal decomposition of the as-synthesized $CuZn(OH)_4(H_2SiO_3)_2{\cdot}nH_2O$ hydroxides precursors. This highly dispersed Cu-solid base catalyst is extremely effective for hydrogenation of ethyl acetate to ethanol. The reduction and oxidation features of the precursors prepared by coprecipitation method and catalysts were extensively investigated by TGA, XRD, TPR and $N_2$-adsorption techniques. Catalytic activity by ethyl acetate hydrogenation of reaction temperatures between 120 and $300^{\circ}C$, different catalyst calcination and reduction temperatures, different Cu/Zn loadings have been examined extensively. The relation between the performance for hydrogenation of ethyl acetate and the structure of the Cu-solid base catalysts with Zn loading were discussed. The detected conversion of ethyl acetate reached 81.6% with a 93.8% selectivity of ethanol. This investigation of the Cu-Zn/$SiO_2$ catalyst provides a recently proposed pathway for ethyl acetate hydrogenation reaction to produce ethanol over Cu-solid base catalysts.

Synthesis and Characterization of CuInS2 Semiconductor Nanoparticles and Evolution of Optical Properties via Surface Modification (CuInS2 나노 반도체 합성 및 표면 개질을 통한 광학적 효율 분석 연구)

  • Yang, Hee-Seung;Kim, Yoo-Jin
    • Journal of Powder Materials
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    • v.19 no.3
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    • pp.177-181
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    • 2012
  • Copper composite materials have attracted wide attention for energy applications. Especially $CuInS_2$ has a desirable direct band gap of 1.5 eV, which is well matched with the solar spectrum. $CuInS_2$ nanoparticles could make it possible to develop color-tunable $CuInS_2$ nanoparticle emitter in the near-infrared region (NIR) for energy application and bio imaging sensors. In this paper, $CuInS_2$ nanoparticles were successfully synthesized by thermo-decomposition methods. Surface modification of $CuInS_2$ nanoparticles were carried out with various semiconductor materials (CdS, ZnS) for enhanced optical properties. Surface modification and silica coating of hydrophobic nanoparticles could be dispersed in polar solvent for potential applications. Their optical properties were characterized by UV-vis spectroscopy and photoluminescence spectroscopy (PL). The structures of silica coated $CuInS_2$ were observed by transmission electron microscopy (TEM).

Pre-adaptation to Cu during Plant Tissue Culture Enhances Cu Tolerance and Accumulation in Begonia (Begonia evansiana Andr.)

  • Ahn, Yeh-Jin;Park, Jong-Moon
    • Journal of Ecology and Environment
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    • v.30 no.3
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    • pp.271-276
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    • 2007
  • A simple and efficient protocol was developed for culturing Cu-tolerant and Cu-accumulating plants via pre-adaptation to Cu during plant tissue culture. We induced multiple shoots from begonia (Begonia evansiana Andr.) leaf explants on MS medium supplemented with naphtaieneacetic acid and benzyladenine. After 3 months, small plantlets were transferred to MS medium supplemented with $100{\mu}M\;CuCl_2$ for pre-adaptation to Cu and cultured for 5 months. Then, these plantlets were individually planted in pots containing artificial soil. An additional 500 mg of Cu dissolved in 1/4 strength MS solution was applied to each pot during irrigation over the course of 2 months. We planted pre-adapted and control begonias in soil from the II-Kwang Mine, an abandoned Cu mine in Pusan, Korea, to examine their ability to tolerate and accumulate Cu for phytore-mediation. Pre-adapted begonias accumulated $1,200{\mu}g$ Cu/g dry root tissue over the course of 45 days. On the other hand, non-Cu-adapted controls accumulated only $85{\mu}g$ Cu/g dry root tissue. To enhance Cu extraction, chelating agents, ethylenediamine tetraacetic acid (EDTA)-dipotassiun and pyridine-2,6-dicarboxylic acid (PDA), were applied. While the chelating agents did not enhance accumulation of Cu in the roots of control begonias, EDTA application increased the level of Cu in the roots of pre-adapted begonias twofold (to $2,500{\mu}g$ Cu/g dry root tissue). Because pre-adapted begonias accumulated a large amount of Cu, mainly in their roots, they could be used for phytostabilization of Cu-contaminated soils. In addition, as a flowering plant, begonias can be used to create aesthetically pleasing remediation sites.