• Title/Summary/Keyword: Cu via

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Thermal Compression of Copper-to-Copper Direct Bonding by Copper films Electrodeposited at Low Temperature and High Current Density (저온 및 고전류밀도 조건에서 전기도금된 구리 박막 간의 열-압착 직접 접합)

  • Lee, Chae-Rin;Lee, Jin-Hyeon;Park, Gi-Mun;Yu, Bong-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.102-102
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    • 2018
  • Electronic industry had required the finer size and the higher performance of the device. Therefore, 3-D die stacking technology such as TSV (through silicon via) and micro-bump had been used. Moreover, by the development of the 3-D die stacking technology, 3-D structure such as chip to chip (c2c) and chip to wafer (c2w) had become practicable. These technologies led to the appearance of HBM (high bandwidth memory). HBM was type of the memory, which is composed of several stacked layers of the memory chips. Each memory chips were connected by TSV and micro-bump. Thus, HBM had lower RC delay and higher performance of data processing than the conventional memory. Moreover, due to the development of the IT industry such as, AI (artificial intelligence), IOT (internet of things), and VR (virtual reality), the lower pitch size and the higher density were required to micro-electronics. Particularly, to obtain the fine pitch, some of the method such as copper pillar, nickel diffusion barrier, and tin-silver or tin-silver-copper based bump had been utillized. TCB (thermal compression bonding) and reflow process (thermal aging) were conventional method to bond between tin-silver or tin-silver-copper caps in the temperature range of 200 to 300 degrees. However, because of tin overflow which caused by higher operating temperature than melting point of Tin ($232^{\circ}C$), there would be the danger of bump bridge failure in fine-pitch bonding. Furthermore, regulating the phase of IMC (intermetallic compound) which was located between nickel diffusion barrier and bump, had a lot of problems. For example, an excess of kirkendall void which provides site of brittle fracture occurs at IMC layer after reflow process. The essential solution to reduce the difficulty of bump bonding process is copper to copper direct bonding below $300^{\circ}C$. In this study, in order to improve the problem of bump bonding process, copper to copper direct bonding was performed below $300^{\circ}C$. The driving force of bonding was the self-annealing properties of electrodeposited Cu with high defect density. The self-annealing property originated in high defect density and non-equilibrium grain boundaries at the triple junction. The electrodeposited Cu at high current density and low bath temperature was fabricated by electroplating on copper deposited silicon wafer. The copper-copper bonding experiments was conducted using thermal pressing machine. The condition of investigation such as thermal parameter and pressure parameter were varied to acquire proper bonded specimens. The bonded interface was characterized by SEM (scanning electron microscope) and OM (optical microscope). The density of grain boundary and defects were examined by TEM (transmission electron microscopy).

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The Effect of Powdered Herb of Aster scaber Thunb. on Antioxidant System in Ethanol-Treated Rats (참취 분말이 에탄올을 투여한 흰쥐의 항산화계에 미치는 효과)

  • 이승은;성낙술;정태영;최미영;윤은경;정유진
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.30 no.6
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    • pp.1215-1219
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    • 2001
  • The present study was conducted to investigate effect of powdered herb of Aster scaber Thunb. (chamchwi) on antioxidant system in ethanol-administrated rats. Four week-old Sprague Dawley male rats which had initial body weights of 97.10$\pm$4.50 g were randomly divided into three groups: control (ethanol treated, vitamin E-deficient group); 5% chamchwi (ethanol-treated, 5% chamchwi powder-supplemented group): 10% chamchwi (ethanol-treated, 10% chamchwi powder-suplemented group). Three groups of rats were suplemented with three experimental diets for 4 weeks and orally administrated 10% ethanol (v/v) daily via drinking water in the last experimental week. Contents of TBARS (thiobarbituric acid reactive substance). glutathione in liver and kidney and serum albumin were determined. The activities of superoxide dismutase (SOD), catalase and glutathione peroxidase (GSH-px) in liver and kidney were also analyzed. Relative weight of liver and spleen to body in chamchwi groups was lower than that in control group (p<0.05). The most remarkable result was that liver TBARS contents in chamchwi groups (5% chamchwi group, 46 $\mu\textrm{g}$ in MDA value; 10% chamchwi group, 35 $\mu\textrm{g}$) were significantly lower (p<0.05) than that in control group (66 $\mu\textrm{g}$). The supplement of chamchwi powder lowered the activity of manganese- superoxide dismutase (Mn-SOD), catalase in liver and GSH-px in kidney. The levels of glutathione in liver and kidney and serum albumin were not significantly different in all experimental groups (p<0.05). These results indicate that powdered herb of Aster scaber decreases lipid peroxidation and acitvity of Mn-SOD increased by alcohol-induced oxidative stress in liver of rats.

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Comparison of Biochemical Characterization of Korean and Chinese Mung Bean Lectin (한국산 녹두와 중국산 녹두에 있어서 Lectin의 생화학적 특성 비교)

  • Roh, Kwang Soo
    • Journal of Life Science
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    • v.24 no.6
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    • pp.603-611
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    • 2014
  • The lectins were separated from Korean and Chinese mung bean seeds finally via chromatography using Sephadex G-100 and their biochemical features were studied and compared. They showed no hemagglutination with human red blood cells regardless of trypsin treatment and showed hemagglutination with only trypsin treated rabbit red blood cells. The molecular weights of two lectins were identified as 54 kDa and 28 kDa by SDS-PAGE. It was found that while the optimal reaction temperature of the lectin from Korean mung bean was $60^{\circ}C$, that of the lectin from Chinese mung bean seeds was $50^{\circ}C$. It was found also that the most thermal stable temperature of the seed lectin from Korean mung bean seeds was $50^{\circ}C$ and the lectin from Chinese mung bean was $40-50^{\circ}C$. The lectin from Korean mung bean seeds showed the highest activity at pH 3.2 and the lectin from Chinese mung bean showed the highest activity at pH 6.2. It was identified that when treating a denaturant, thiourea and guanidine-HCl resulted in no hemagglutination, so they induced denaturalization. It was identified also that there was no hemagglutination with urea, so it did not induced denaturalization. They showed no septicity to 6 types of carbohydrates including D-glucose. In addition, the lectins from the two mung bean seed had specificity to metal ions.

Generation of Testability on High Density /Speed ATM MCM and Its Library Build-up using BCB Thin Film Substrate (고속/고집적 ATM Switching MCM 구현을 위한 설계 Library 구축 밀 시험성 확보)

  • 김승곤;지성근;우준환;임성완
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.2
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    • pp.37-43
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    • 1999
  • Modules of the system that requires large capacity and high-speed information processing are implemented in the form of MCM that allows high-speed data processing, high density circuit integration and widely applied to such fields as ATM, GPS and PCS. Hence we developed the ATM switching module that is consisted of three chips and 2.48 Gbps data throughput, in the form of 10 multi-layer by Cu/Photo-BCB and 491pin PBGA which size is $48 \times 48 \textrm {mm}^2$. hnologies required for the development of the MCM includes extracting parameters for designing the substrate/package through the interconnect characterization to implement the high-speed characteristics, thermal management at the high-density MCM, and the generation of the testability that is one of the most difficult issues for developing the MCM. For the development of the ATM Switching MCM, we extracted signaling delay, via characteristics and crosstalk parameters through the interconnect characterization on the MCM-D. For the thermal management of 15.6 Watt under the high-density structure, we carried out the thermal analysis. formed 1.108 thermal vias through the substrate, and performed heat-proofing processing for the entire package so that it can keep the temperature less than $85^{\circ}C$. Lastly, in order to ensure the testability, we verified the substrate through fine pitch probing and applied the Boundary Scan Test (BST) for verifying the complex packaging/assembling processes, through which we developed an efficient and cost-effective product.

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The Effect of NO Donor on Contraction, Cytosolic $Ca^{2+}$ Level and Ionic Currents in Guinea-pig Ileal Smooth Muscle

  • Kwon, Seong-Chun;Park, Ki-Young;Ahn, Duck-Sun;Lee, Young-Ho;Kang, Bok-Soon
    • The Korean Journal of Physiology and Pharmacology
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    • v.4 no.1
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    • pp.33-40
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    • 2000
  • This study was designed to clarify the mechanism of the inhibitory action of a nitric oxide (NO) donor, 3-morpholino-sydnonimine (SIN-1), on contraction, cytosolic $Ca^{2+}$ level $([Ca^{2+}]_i)$ and ionic currents in guinea-pig ileum. SIN-1 $(0.01{\sim}100\;{\mu}M)$ inhibited 25 mM KCl- or histamine $(10\;{\mu}M)-induced$ contraction in a concentration-dependent manner. SIN-1 reduced both the 25 mM KCl- and the histamine-stimulated increases in muscle tension in parallel with decreased $[Ca^{2+}]_i.$ Using the patch clamp technique with a holding potential of -60 mV, SIN-1 $(10\;{\mu}M)$ decreased peak Ba currents $(I_{Ba})$ by $30.9{\pm}5.4%$ (n=6) when voltage was stepped from -60 mV to +10 mV and this effect was blocked by ODQ $(1\;{\mu}M),$ a soluble guanylyl cyclase inhibitor. Cu/Zn SOD (100 U/ml), the free radical scavenger, had little effect on basal $I_{Ba},$ and SIN-1 $(10\;{\mu}M)$ inhibited peak $I_{Ba}$ by $32.4{\pm}5.8%$ (n=5) in the presence of Cu/Zn SOD. In a cell clamped at a holding-potential of -40 mV, application of $10\;{\mu}M$ histamine induced an inward current. The histamine-induced inward current was markedly and reversibly inhibited by $10\;{\mu}M$ SIN-1, and this effect was abolished by ODQ $(1\;{\mu}M).$ In addition, SIN-1 markedly increased the depolarization-activated outward $K^+$ currents in the all potential ranges. We concluded that SIN-1 inhibits smooth muscle contraction mainly by decreasing $[Ca^{2+}]_i$ resulted from the inhibition of L-type $Ca^{2+}$ channels and the inhibition of nonselective cation currents and/or by the activation of $K^+$ currents via a cGMP-dependent pathway.

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Synthesis of Dendritic Polystyrene-block-Linear Poly(t-butyl acrylate) Copolymers by an Amide Coupling (아미드 커플링을 통한 덴드리틱 Polystyrene-Block-Linear Poly(t-butyl acrylate) 공중합체의 합성)

  • Song, Jie;Cho, Byoung-Ki
    • Polymer(Korea)
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    • v.33 no.2
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    • pp.158-163
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    • 2009
  • In this study, we synthesized a series of dendritic polystyrene-b-linear poly (t-butyl acrylate) copolymers with well-defined molecular architectures. The hydroxyl group located at the focal point of the second generation dendron bearing polystyrene ($M_n$ = 1000 g/mol) peripheries was converted into amine group via the following stepwise reactions: 1) tosylatoin, 2) azidation, and 3) reduction. On the other hand, the linear poly (t-butyl acrylate)s were prepared by an atom transfer radical polymerization (ATRP) of t-butyl acrylate where benzyl 2-bromopropanoate and Cu(I)Br/PMDETA were used as initiator and catalyst, respectively. To convert the end group of prepared poly (t-butyl acrylate) s into carboxylic acid, a debenzylation was performed using Pd/C catalyst under $H_2$ atmosphere. In the final step, dendritic-linear block copolymers were obtained through a simple amide coupling reaction mediated by 4-(dimethylamino) pyridine(DMAP) and N,N'-diisopropylcarbodiimide(DIPC). The resulting diblock copolymers were shown to have well-defined molecular weights and narrow molecular weight distributions as supported by $^1H$-NMR spectroscopy and gel permeation chromatography(GPC).

A Study on the Vanadium Oxide Thin Films as Cathode for Lithium Ion Battery Deposited by RF Magnetron Sputtering (RF 마그네트론 스퍼터링으로 증착된 리튬 이온 이차전지 양극용 바나듐 옥사이드 박막에 관한 연구)

  • Jang, Ki-June;Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.6
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    • pp.80-85
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    • 2019
  • Vanadium dioxide is a well-known metal-insulator phase transition material. Lots of researches of vanadium redox flow batteries have been researched as large scale energy storage system. In this study, vanadium oxide($VO_x$) thin films were applied to cathode for lithium ion battery. The $VO_x$ thin films were deposited on Si substrate($SiO_2$ layer of 300 nm thickness was formed on Si wafer via thermal oxidation process), quartz substrate by RF magnetron sputter system for 60 minutes at $500^{\circ}C$ with different RF powers. The surface morphology of as-deposited $VO_x$ thin films was characterized by field-emission scanning electron microscopy. The crystallographic property was confirmed by Raman spectroscopy. The optical properties were characterized by UV-visible spectrophotometer. The coin cell lithium-ion battery of CR2032 was fabricated with cathode material of $VO_x$ thin films on Cu foil. Electrochemical property of the coin cell was investigated by electrochemical analyzer. As the results, as increased of RF power, grain size of as-deposited $VO_x$ thin films was increased. As-deposited thin films exhibit $VO_2$ phase with RF power of 200 W above. The transmittance of as-deposited $VO_x$ films exhibits different values for different crystalline phase. The cyclic performance of $VO_x$ films exhibits higher values for large surface area and mixed crystalline phase.

Geochemical Contamination Assessment and Distribution Property Investigation of Heavy Metals, Arsenic, and Antimony Vicinity of Abandoned Mine (폐광산 인근지역에서 중금속, 비소, 안티모니의 지구화학적 오염도 평가 및 분산 특성 조사)

  • Han-Gyum Kim;Bum-Jun Kim;Myoung-Soo Ko
    • Economic and Environmental Geology
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    • v.55 no.6
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    • pp.717-726
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    • 2022
  • This study was conducted to assess the geochemical contamination degree of As, Cd, Cu, Pb, Sb, and Zn in the soil and water samples from an abandoned gold mine. Enrichment Factor (EF), Geoaccumulation Index (Igeo), and Pollution Load Index (PLI) were carried out to assess the geochemical contamination degree of the soil samples. Variations of sulfate and heavy metals concentration in water samples were determined to identify the geochemical distribution with respect to the distance from the mine tailing dam. Geochemical pollution indices indicated significant contaminated with As, Cd, Pb, and Zn in the soil samples that areas close to the mine tailing dam, while, Sb showed similar indices in all soil samples. These results indicated that the As, Cd, Pb, and Zn dispersion has occurred via anthropogenic sources, such as mining activities. In terms of water samples, anomalies in the concentrations of As, Cd, Zn, and SO42- was determined at specific area, in addition, the concentrations of the elements gradually decreased with distance. This result implies the heavy metals distribution in water has carried out by the weathering of sulfide minerals in the mine tailing and soil. The study area has been conducted the remediation of contaminated soil in the past, however, the geochemical dispersion of heavy metals was supposed to be occurred from the potential contamination source. Therefore, continuous monitoring of the soil and water is necessary after the completion of remediation.

Risk Assessment of Heavy Metals in the Vicinity of the Abandoned Metal Mine Areas (폐금속광산지역 중금속의 위해성 평가)

  • Lee, Jin-Soo;Kwon, Hyun-Ho;Shim, Yon-Sik;Kim, Tae-Heok
    • Journal of Soil and Groundwater Environment
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    • v.12 no.1
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    • pp.97-102
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    • 2007
  • An environmental survey from three abandoned metal mine areas was undertaken on to assess the risk of adverse health effects on human exposure to heavy metals influenced by past mining activities. Tailings contained high concentrations of heavy metals may have a impact on soils and waters around the tailing piles. In order to perform the human risk assessment, chemical analysis data of soils, rice grains and waters for As, Cd, Cu and Pb have been used. The HQ values for heavy metals via the rice consumption were significantly higher compared with other exposure pathways in all metal mine areas. The resulting HI values in three mine areas were higher than 9.0, and their toxic risk due to rice ingestion was strong in these mine areas. The cancer risk of being exposed to As by the rice consumption from the A, B and C mine areas was $5.1\;{\times}\;10^{-3}$, $6.8\;{\times}\;10^{-3}$ and $3.1\;{\times}\;10^{-3}$, respectively. The As cancer risk via the exposure pathway of rice ingestion from these mine areas exceeds the acceptable risk of 1 in 10,000 set for regulatory purposes. Thus, the daily intakes of rice by the local residents from these mine areas can pose a potential health threat if exposed by long-term As exposure.

Optical and Electrical Properties of ZnO Hybrid Structure Grown on Glass Substrate by Metal Organic Chemical Vapor Deposition (유기금속화학증착법으로 유리기판 위에 성장된 산화아연 하이브리드 구조의 광학적 전기적 특성)

  • Kim, Dae-Sik;Kang, Byung Hoon;Lee, Chang-Min;Byun, Dongjin
    • Korean Journal of Materials Research
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    • v.24 no.10
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    • pp.543-549
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    • 2014
  • A zinc oxide (ZnO) hybrid structure was successfully fabricated on a glass substrate by metal organic chemical vapor deposition (MOCVD). In-situ growth of a multi-dimensional ZnO hybrid structure was achieved by adjusting the growth temperature to determine the morphologies of either film or nanorods without any catalysts such as Au, Cu, Co, or Sn. The ZnO hybrid structure was composed of one-dimensional (1D) nanorods grown continuously on the two-dimensional (2D) ZnO film. The ZnO film of 2D mode was grown at a relatively low temperature, whereas the ZnO nanorods of 1D mode were grown at a higher temperature. The change of the morphologies of these materials led to improvements of the electrical and optical properties. The ZnO hybrid structure was characterized using various analytical tools. Scanning electron microscopy (SEM) was used to determine the surface morphology of the nanorods, which had grown well on the thin film. The structural characteristics of the polycrystalline ZnO hybrid grown on amorphous glass substrate were investigated by X-ray diffraction (XRD). Hall-effect measurement and a four-point probe were used to characterize the electrical properties. The hybrid structure was shown to be very effective at improving the electrical and the optical properties, decreasing the sheet resistance and the reflectance, and increasing the transmittance via refractive index (RI) engineering. The ZnO hybrid structure grown by MOCVD is very promising for opto-electronic devices as Photoconductive UV Detectors, anti-reflection coatings (ARC), and transparent conductive oxides (TCO).