• 한국재료학회지
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• 제12권3호
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• pp.225-230
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• 2002

Sn was selected as an alloying element of Cu. The Cu-Sn thin layers were deposited on the Si substrates by the electroplating method and their properties were studied. By rapidly thermal annealing(RTA) up to 40$0^{\circ}C$ after electroplating, sheet resistance decreased and adhesion strength increased, but that trend was reversed at the 50$0^{\circ}C$ RTA. Cu-Sn particles grew dense and the surface was uniform up to 40$0^{\circ}C$, but at 50$0^{\circ}C$, empty area was introduced and the surface became rough owing to oxidation and particle coarsening and agglomeration. Deposited layer contained significant amount of Si, while pure Cu-Sn layer with the composition ratio of 90:10 was present only on the top surface. However, no significant change in the Cu composition within alloy layers occured by the RTA regardless of its temperature. This indicates that the Cu diffusion into the Si was suppressed by the presence of Sn.

• 한국표면공학회지
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• 제39권6호
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• pp.276-281
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• 2006

In order to improve the performance of PPFs (Pre-Plated Frames), a PPF that employed a Cu-Sn alloy instead of conventionally used Ni was developed and then its properties were investigated. It was found that the electoplated Cu-Sn alloy layer was a mixture of uniformly distributed fine crystallites, resulting In better wettability and crack resistance than those of Ni PPF. Moreover, as in Cu/Ni/Pd/Au PPF, migration of copper atoms from the base metal to the top of the Cu/Cu-Sn/Pd/Au PPF surface was not found although the Cu-Sn layer itself contained considerable amount of copper. It was expected that, by using the newly developed Cu-Sn PPF, any possible heat generation and signal interrupt caused by an external electro-magnetic field could be reduced because the Cu-Sn layer was paramagnetic, i.e., nonmagnetic.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.95.1-95.1
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• 2017

In this study, it has been tried to make the single Mo-Cu alloying targets with the Cu showing the best surface hardness that was determined by investigation on the coatings with the double target process. The single alloying targets were prepared by powder metallurgy methods such as mechanical alloying and spark plasma sintering. The nanocomposite coatings were prepared by reactive magnetron sputtering process with the single alloying targets in $Ar+N_2$ atmosphere. The microstructure changes of the Mo-Cu-N coatings with diverse Cu contents were investigated by using XRD, SEM and EDS. The mechanical properties of the coatings were evaluated by using nano-indentor, scratch test, and ball on disc methods. Especially, the coated samples were tested by using various lubricating oil to compare the property of anti wear-resistance. In this study, the nano-composite MoN-Cu coatings prepared using an alloying target was eventually compared with the coatings from the multiple targets.

• 한국자기학회지
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• 제12권5호
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• pp.184-188
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• 2002

수직자기이방성을 가지는 Cu/Ni/Cu(002)/Si(100) 자성박막을 전자빔 증발법을 이용하여 초고진공에서 증착 하였다. 증착 시 RHEED로 측정 한 결과 실리콘 기판 위에 자성박막이 적층성장되었음을 확인하였다. 이러한 Cu/Ni/Cu(001)/Si(100) 자성박막에 1 MeV C 이온을 이온선량 2$\times$$10^{16}$ ions/$\textrm{cm}^2$로 조사한 후 MOKE로 자기이력곡선을 측정한 결과 이온 조사에 의해 자화용이축이 수직에서 수평방향으로 변화되었음을 확인하였다 포항 방사광가속기를 이용하여 X-선 반사도와 Grazing Incident X-ray diffraction(GE) 분석을 수행한 결과 첫 번째 Cu층과 Ni층 사이의 계면은 이온 조사 후 거칠기는 증가하였으나, Cu와 Ni의 전자밀도의 대비는 더욱 명확해졌다. 그리고, 증착 후 Cu와 Ni원자의 격자 상수 차이에 의해 Ni층이 가지고 있었던 strain은 이온 조사 후 완화되었음을 알 수 있었다. 끝으로, 이온조사 시 자성특성 변화와 직접적인 관계가 있는 strain 완화, 계면 혼합층(혹은 새로운 상)등이 생성되는 기구를 탄성충돌 및 비탄성충돌에 의한 열화학적 구동력으로 규명하였다.

• 한국표면공학회지
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• 제44권3호
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• pp.117-123
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• 2011

We investigated the spectroscopic and electrochemical properties of the citrate-based CuNi solution at different solution pH and analyzed various surface properties of CuNi codeposition layer. By combining UV-Visible spectroscopic data with potentiodynamic polarization curves, it could be found that the complexation of $Ni^{2+}$-citrate pair was completed at lower solution pH than $Cu^{2+}$-citrate pair and was affected by the coexistent $Cu^{2+}$ ions, while the complexation between $Cu^{2+}$ ions and citrate was not sensitive to the presence of $Ni^{2+}$ ions. Also, the electron transfer from cathode to $Cu^{2+}$-citrate and$Ni^{2+}$-citrate was hindered by strong complexation between $Cu^{2+}/Ni^{2+}$ ions and citrate and so apparent codeposition current densities were reduced as the solution pH increases. CuNi codeposited layers had a higher Cu content when they were prepared at high pH solution due to the suppression of Ni deposition, and when codeposition was executed in an agitated condition due to the acceleration of mass transfer of $Cu^{2+}$ ions in the solution. Actually, solution pH had little effect on the surface morphology and deposits orientation, but greatly influenced the corrosion resistance in 3.5% NaCl solution by modifying the chemical composition of CuNi layers and so pH 3 was expected as the most suitable solution pH in the viewpoint of corrosion coatings.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.39-45
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• 2012

Cu-Cu 패턴의 직접접합 공정을 위하여 Buffered Oxide Etch(BOE) 및 Hydrofluoric acid(HF)의 습식 조건에 따른 Cu와 $SiO_2$의 식각 특성에 대한 평가를 수행하였다. 접촉식 3차원측정기(3D-Profiler)를 이용하여 Cu와 $SiO_2$의 단차 및 Chemical Mechanical Polishing(CMP)에 의한 Cu의 dishing된 정도를 분석 하였다. 실험 결과 BOE 및 HF 습식 식각 시간이 증가함에 따라 단차가 증가 하였고, BOE가 HF보다 더 식각 속도가 빠른 것을 확인하였다. BOE 및 HF 습식 식각 후 Cu의 dishing도 식각시간 증가에 따라 감소하였다. 식각 후 산화막 유무를 알아보기 위해 Cu표면을 X-선 광전자 분광법(X-ray Photoelectron Spectroscopy, XPS)를 이용하여 분석 한 결과 HF습식 식각 후 BOE습식 식각보다 Cu표면산화막이 상대적으로 더 얇아 진 것을 확인하였다.

• 한국표면공학회지
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• 제53권5호
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• pp.232-240
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• 2020

Cu₂O films as a photocathode for photoelectrochemical water splitting were potentiostatically deposited on FTO glasses. The morphology and composition of the electrodeposited Cu₂O films were adjusted by the applied potentials. The potential-dependent grain size of Cu₂O films was characterized by XRD and SEM analysis. Photoelectrochemical properties of the fabricated Cu₂O photocathodes were investigated with photocurrents as a function of potentials under 1 sun condition of 100mW/㎠. Photocurrents of the electrodeposited Cu₂O films were controlled with the tailored surface morphologies of Cu₂O photocathodes.

• 한국표면공학회지
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• 제36권2호
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• pp.194-199
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• 2003

Polarization measurements were peformed to investigate the electrochemical behavior of copper ions and limiting current density in waste rinse water from copper electroplating processes. A newly designed cyclone type electrolyzer was tested to recover the copper powder. Synthetic solutions were prepared using analytical grade $CuSO_4$ to the desired waste water concentration and pH was adjusted with $H_2$$SO_4$. Electrowinning was peformed at room temperature and the solution was cycled with a pump. Results showed that more than 99 percent of Cu was recovered and the size of the recovered Cu powder ranges from 0.1 - $0.5\mu\textrm{m}$. The chemical composition of the Cu powder mainly consists of $Cu_2$O and Cu and can be easily reduced to pure Cu powder.

• 한국표면공학회지
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• 제51권6호
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• pp.360-364
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• 2018

A facile method to fabricate freestanding CuO nanoleaves and CuO nanowires-based films was demonstrated. $Cu(OH)_2$ nanoleaves and nanowires were prepared by a hydrolysis reaction in aqueous solution including pyridine and NaOH with the tailored concentrations at room temperature. The films of freestanding CuO nanoleaves and CuO nanowires can be successfully obtained via the simple vacuum infiltration following a thermal dehydration reaction. The morphologies and crystallinity of the $Cu(OH)_2$ nanoleaves/nanowires and CuO nanoleaves/nanowires were characterized by XRD, SEM, TEM and FT-IR. The films fabricated with freestanding CuO nanoleaves and nanowires in this study may be applicable for building high-efficiency organic binder-free devices, such as gas sensors, batteries, photoelectrodes for water splitting and so on.

• 접착 및 계면
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• 제23권4호
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• pp.108-115
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• 2022

본 연구에서는 표면처리된 Cu 리드프레임과 에폭시 컴포지트의 접착강도를 향상시키기 위하여 신규 고분자 접착증진제인 poly(itaconic acid-co-acrylamide) (IAcAAM)를 합성하였다. 이타콘산과 아크릴아마이드를 포함하는 IAcAAM은 라디칼 수성 중합을 통해 제조되었다. IAcAAM의 구조 및 물성은 FT-IR, ¹H-NMR, GPC 및 DSC로 분석하였다. Cu 리드프레임의 표면은 고온, 알칼리, UV 오존으로 처리하였다. 표면처리 후 Cu 리드프레임의 접촉각이 감소함에 따라 Cu 리드프레임/에폭시 컴포지트의 접착강도는 증가하였다. 에폭시 혼합물에 IAcAAM을 첨가함에 따라 Cu 리드프레임/에폭시 컴포지트의 접착강도가 증가하였다. 또한, 에폭시 혼합물에 실리카 함량이 증가할수록 Cu 리드 프레임과 에폭시 컴포지트의 접착강도는 약간 감소하는 경향을 나타내었다.