• Journal of the Optical Society of Korea
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• v.18 no.5
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• Korean Journal of Remote Sensing
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• v.23 no.4
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• pp.237-245
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• 2007

GB-SAR (Ground-Based Synthetic Aperture Radar) system is an imaging radar that obtains high resolution 2-D image through a synthetic aperture effect from the accurate linear-motion control of antenna on the ground. The highly versatile system configurations and accurate repeatability of GB-SAR operation allow one to accurately monitor the stability of surface scatterers with millimeter accuracy by SAR interferometry. In this paper we introduce the development of a GB-SAR system and show the possibilities of SAR polarimetry and interferometry such as DInSAR, Cross-Track InSAR, Delta-f InSAR, and PSInSAR.

• Proceedings of the KSRS Conference
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• 2005.10a
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• pp.542-545
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• 2005

Spaceborne radar interferometry has been widely used to estimate the topography and deformation of the Earth. It is difficult to obtain coherent interferometric SAR pairs especially over coastal areas mainly because of variation of surface conditions. We carried out the experiment using a cross-interferometric pair with a perpendicular baseline of about 1.4 km, a 30 minutes temporal separation and the height sensitivity of about 6 meters. The temporal decorrelation can be reduced by the cross interferometric technique with a 30 minutes temporal separation. Accurate coregistration was performed through resampling of ENVISAT ASAR data to equivalent pixel spacing to the ERS SAR data, because of the differences of the pulse repetition frequency and range sampling rate between the two sensors. Then we estimated range and azimuth offset to a sub-pixel accuracy using image intensity cross correlation. A larger window chip size than a general case was used because it was difficult to distinguish typical features. As range bin increased, the difference of Doppler centroid also increased. It resulted in lower coherence in far range than in near range. Coherences over wetland in near and far range were about 0.8 and 0.5, respectively. The coherence was improved by applying azimuth and range common band filtering, but coherence gap still existed. ERS-ENVISAT cross-interferogram usually lost information in urban area. However, high coherence over a city in this pair was shown, because of less man-made structures than other major cities. Accuracy of the DEM constructed by the ERS-ENVISAT 30-minute pair in a coastal area is to be evaluated.

• Journal of Mechanical Science and Technology
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• v.14 no.5
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• pp.477-482
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• 2000

This study discusses a non-contact optical technique (electronic speckle pattern interferometry) that is well suited for thermal deformation measurement without any surface preparation and compensating process. Fiber reinforced plastics ($[0]_{16},\;[0/90]_{8S}$) were analyzed by ESPI to determine their thermal expansion coefficients. The thermal expansion coefficient of the transverse direction of a uniaxial composite is evaluated as $48.78{\times}10^{-6}(1/^{\circ}C)$. Also, the thermal expansion coefficient of the cross-ply laminate $[0/90]_{8S}$ is numerically estimated as $3.23{\times}10^{-6}(1/^{\circ}C)$ that is compared with that measured by ESPI.

• Korean Journal of Remote Sensing
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• v.28 no.1
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• pp.121-128
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• 2012

High resolution intertidal DEM is a basic material for science research like sedimentation/erosion by ocean current, and is invaluable in a monitoring of environmental changes and practical management of coastal wetland. Since the intertidal zone changes rapidly by the inflow of fluvial debris and tide condition, remote sensing is an effective tool for observing large areas in short time. Although radar interferometry is one of the well-known techniques for generating high resolution DEM, conventional repeat-pass interferometry has difficulty on acquiring enough coherence over tidal flat due to the limited exposure time and the rapid changes in surface condition. In order to overcome these constraints, we tested the feasibility of radar interferometry using Cosmo-SkyMed tandem-like one-day data and ERS-ENVISAT cross tandem data with very short revisit period compared to the conventional repeat pass data. Small temporal baseline combined with long perpendicular baseline allowed high coherence over most of the exposed tidal flat surface in both observations. However the interferometric phases acquired from Cosmo-SkyMed data suffer from atmospheric delay and changes in soil moisture contents. The ERS-ENVISAT pair, on the other hand, provides nice phase which agree well with the real topography, because the atmospheric effect in 30-minute gap is almost same to both images so that they are cancelled out in the interferometric process. Thus, the cross interferometry with very small temporal baseline and large perpendicular baseline is one of the most reliable solutions for the intertidal DEM construction which requires very accurate mapping of the elevation.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.28 no.4
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• pp.431-439
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• 2010

Cross-interferometic synthetic aperture radar (CInSAR) technique from ERS-2 and Envisat images is capable of generating submeter-accuracy digital elevation model (DEM). However, it is very difficult to produce high-quality CInSAR-derived DEM due to the difference in the azimuth and range pixel size between ERS-2 and Envisat images as well as the small height ambiguity of CInSAR interferogram. In this study, we have proposed an efficient method to overcome the problems, produced a high-quality DEM over northern Alaska, and compared the CInSAR-derived DEM with the national elevation dataset (NED) DEM from U.S. Geological Survey. In the proposed method, azimuth common band filtering is applied in the radar raw data processing to mitigate the mis-registation due to the difference in the azimuth and range pixel size, and differential SAR interferogram (DInSAR) is used for reducing the unwrapping error occurred by the high fringe rate of CInSAR interferogram. Using the CInSAR DEM, we have identified and corrected man-made artifacts in the NED DEM. The wave number analysis further confirms that the CInSAR DEM has valid Signal in the high frequency of more than 0.08 radians/m (about 40m) while the NED DEM does not. Our results indicate that the CInSAR DEM is superior to the NED DEM in terms of both height precision and ground resolution.

• Journal of Sensor Science and Technology
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• v.9 no.4
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• pp.316-326
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• 2000

A new signal processing algorithm for white light interferometry has been proposed and investigated theoretically. The goal of the algorithm is to determine the absolute optical path length of an interferometer with very high precision (<< one optical wavelength). The algorithm features cross-correlation of interferometer fringe scans and hypothesis testing. The hypothesis test looks for a zero order fringe peak candidate about which the cross-correlation is symmetric minimizing the uncertainty of misidentification. The shot noise limited performance of the proposed signal processing algorithm has been analyzed using computer simulations. Simulation results were extrapolated to predict the misidentification rate at Signal to-Shot noise ratio (SNR) higher than 31 dB. Root-mean-square phase error between the computer-generated zero order fringe peak and the estimated zero order fringe peak has been calculated for the changes of three different parameters (SNR, fringe scan sampling rate, coherence length of light source). Results of computer simulations showed the ability of the proposed signal processing algorithm to identify the zero order fringe peak correctly. The proposed signal processing algorithm uses a software approach, which is potentially inexpensive, simple and fast.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.6
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• pp.81-87
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• 2003

Triangulation method, conoscopic holography method and interferometry method are analyzed for effective measurement of micro burr geometry, which is formed in micro drilling. To select proper sensor, the cross section of a cylinder with 0.5mm diameter is measured and the result shows that conoscopic holography method is effective for measuring highly inclined surface in cylinder. Burrs with 1.0mm and 30${\mu}{\textrm}{m}$ height are measured by three suggested methods. As a result, the conoscopic holography method is proved to be most proper in measuring burr geometry. Burr measurement system is developed, which consists of conoscopic laser sensor, X-Y table, controller and burr measurement program. Burrs can be measured automatically and the result is displayed in 3D shape

• Journal of the Korea Institute of Military Science and Technology
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• v.9 no.3
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• pp.109-115
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• 2006

The investigation of the polarization cross-coupling in fiber coils was made using white light Michelson interferometer. The white light interferometer has a light source of about 13nm spectral bandwidth and measurement resolution of less than -80dB. The measurement found that the 200m fiber coil has a polarization cross-coupling of about -64dB in average and -46dB in maximum.

• Geophysics and Geophysical Exploration
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• v.21 no.2
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• pp.94-102
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• 2018

To characterize virtual reflection images of deep subsurface by the method of seismic interferometry, we analyzed effects of offset range, ambient noise, missing data, and statics on interferograms. For the analyses, seismic energy was simulated to be generated by a 5 Hz point source at the surface. Vertical components of particle velocity were computed at 201 sensor locations at 100 m depths of 1 km intervals by the finite difference method. Each pair of synthetic seismic traces was cross-correlated to generate stacked reflection section by the conventional processing method. Wide-angle reflection problems in reflection interferometry can be minimized by setting a maximum offset range. Ambient noise, missing data, and statics turn to yield processing noise that spreads out from virtual sources due to stretch mutes during normal moveout corrections. The level of processing noise is most sensitive to amplitude and duration time of ambient noise in stacked sections but also affected by number of missing data and the amount of statics.